[Scan]
initial_time=2016-02-16T01:48:31
final_time=2016-02-16T01:48:52
ip_count=19
run=1030
dataset=5
scan=378
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.8255E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.54912E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=3.9984E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.87852E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=7.76672E-10
mult1=-9.71975E-9
mult2=-2.8336E-9
rf_tmon=-4.13584E-3
rf_agc=3.28684E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.03309E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=2.00001E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05302E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53334E1
cs_ef1b_imon=3.05946E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05174E1
cs_ea1_imon=2.20333E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02333E0
lens1_imon=1.5536E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=3.00396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0339E1
cs_ea2_imon=1.58869E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.01694E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.82233E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=2.88215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=1.90701E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.25884E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93651E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=3.27714E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=7.46369E-10
tplens_vset=1.4E-1
tplens_vmon=1.58736E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26799E1
iondef2_imon=1.58653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98634E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.91376E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=2.01516E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.82966E-1
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00821E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70903E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62999E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25345E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.88251E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02248E1
cs_anode2_imon=2.30768E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67966E1
iondef4_imon=1.07945E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.90718E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.26049E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09831E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=1.46465E-1
window_imon=-1.18512E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82597E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.5919E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.82765E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.56306E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.38784E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.08256E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79154E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6678E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=1.00862E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6275E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6668E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.05813E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.38982E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.00673E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18757E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3098E4	1.9E1	1.47E2	4.1E1	-7.23964E-2	-8.80017E1	9.53674E-5	-8.80001E1	4.05312E-4	5.79357E-3	9.32217E-2	2.7341E1	-3.26509E1	-3.26115E1	2.68267E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
2.0E0	5.954E3	9.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80015E1	4.76837E-5	-8.80004E1	1.19209E-4	5.60284E-3	9.33886E-2	2.72905E1	-3.26597E1	-3.26101E1	2.68051E1	1.73819E-7	2.51679E-3	2.51679E-3	6.31779E-3	1.99283E-1
3.0E0	3.0E0	1.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80014E1	-1.66893E-4	-8.80001E1	3.57628E-4	5.19753E-3	9.29594E-2	2.73051E1	-3.2688E1	-3.2629E1	2.68022E1	1.73605E-7	2.51874E-3	2.51874E-3	6.31321E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80015E1	2.6226E-4	-8.80002E1	4.76837E-5	5.43594E-3	9.32455E-2	2.72504E1	-3.26404E1	-3.26224E1	2.67722E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80018E1	-2.6226E-4	-8.80004E1	4.76837E-5	5.36442E-3	9.32455E-2	2.7334E1	-3.26956E1	-3.26136E1	2.68016E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80016E1	-3.57628E-4	-8.80002E1	-2.38419E-5	5.88894E-3	9.31025E-2	2.72889E1	-3.26711E1	-3.25996E1	2.68046E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80016E1	-3.09944E-4	-8.8E1	1.90735E-4	5.74589E-3	9.32932E-2	2.73045E1	-3.26554E1	-3.25761E1	2.67986E1	1.73755E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97388E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80019E1	-2.14577E-4	-8.80002E1	0.0E0	5.43594E-3	9.28879E-2	2.72931E1	-3.26458E1	-3.2626E1	2.6837E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.97731E-1
1.2E1	3.29E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80019E1	-2.38419E-5	-8.8E1	-4.76837E-5	5.48363E-3	9.33409E-2	2.73394E1	-3.26511E1	-3.26303E1	2.68352E1	1.73605E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.98153E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80017E1	-2.14577E-4	-8.8E1	0.0E0	5.14984E-3	9.30309E-2	2.72903E1	-3.26119E1	-3.25995E1	2.67812E1	1.73681E-7	2.51359E-3	2.51359E-3	6.30182E-3	1.97469E-1
1.4E1	7.48E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80017E1	-2.38419E-5	-8.80001E1	9.53674E-5	5.53131E-3	9.29594E-2	2.72684E1	-3.2605E1	-3.26002E1	2.68058E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98075E-1
1.5E1	8.2E1	1.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80017E1	1.66893E-4	-8.80001E1	1.66893E-4	5.53131E-3	9.33409E-2	2.72941E1	-3.26536E1	-3.26444E1	2.67631E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98592E-1
1.6E1	3.24E3	2.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80016E1	1.19209E-4	-8.80002E1	3.33786E-4	5.36442E-3	9.28879E-2	2.73293E1	-3.26732E1	-3.26402E1	2.67553E1	1.73605E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99803E-1
1.7E1	4.0636E4	1.7E1	6.87E2	4.7E2	-7.25507E-2	-8.80019E1	1.90735E-4	-8.80004E1	1.66893E-4	5.38826E-3	9.2864E-2	2.73387E1	-3.26765E1	-3.2587E1	2.6783E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00876E-1
1.8E1	1.81118E5	1.11E2	7.27E2	5.0E2	-7.30918E-2	-8.80017E1	2.14577E-4	-8.80003E1	1.43051E-4	5.36442E-3	9.33409E-2	2.73375E1	-3.26537E1	-3.2636E1	2.68244E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00499E-1
1.9E1	2.398E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80019E1	-1.66893E-4	-8.80005E1	-2.38419E-5	5.24521E-3	9.33409E-2	2.72678E1	-3.26687E1	-3.25864E1	2.67854E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.00151E-1
2.0E1	3.73E2	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80016E1	9.53674E-5	-8.80003E1	-1.43051E-4	5.36442E-3	9.3174E-2	2.72985E1	-3.26921E1	-3.26663E1	2.67902E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80019E1	-7.15256E-5	-8.80002E1	3.57628E-4	5.48363E-3	9.30309E-2	2.73138E1	-3.27002E1	-3.26156E1	2.67781E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.00705E-1
2.2E1	5.6E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80018E1	-3.8147E-4	-8.80003E1	3.8147E-4	5.31673E-3	9.34124E-2	2.72901E1	-3.27618E1	-3.28081E1	2.68046E1	1.73677E-7	2.51393E-3	2.51393E-3	6.3074E-3	2.00735E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80016E1	-1.66893E-4	-8.80001E1	1.43051E-4	5.65052E-3	9.31978E-2	2.73016E1	-3.26799E1	-3.26428E1	2.67966E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00673E-1