[Scan]
initial_time=2016-02-16T01:49:55
final_time=2016-02-16T01:50:16
ip_count=19
run=1030
dataset=5
scan=381
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.79862E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.02663E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=3.47078E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.7876E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=7.90393E-10
mult1=-1.04508E-8
mult2=-2.77849E-9
rf_tmon=-4.39226E-3
rf_agc=3.28529E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.97384E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64439E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05397E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54103E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.2095E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03065E0
lens1_imon=1.47436E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.95964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03454E1
cs_ea2_imon=1.55895E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83842E1
cs_ef1a_imon=3.03568E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.86691E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=2.86449E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=1.91608E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6399E1
os_ef1bup_imon=3.12326E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.27014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01262E1
cs_anode1_imon=3.24399E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=7.22444E-10
tplens_vset=1.4E-1
tplens_vmon=1.63966E0
tplens_imon=-1.46693E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.59151E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.20046E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=1.98333E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74868E1
cs_ef2b_imon=3.16434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58704E-1
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70813E1
cs_ef2a_imon=3.20651E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66964E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.33538E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01527E1
cs_anode2_imon=2.25434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73442E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89015E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.53646E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-2.0753E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.52321E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.57818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.08078E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=5.77332E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.63537E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=1.00911E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63087E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66638E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22488E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29721E-3
inlet_lpb_pmon=1.99983E-1
chamber_ion_pmon=1.73675E-7
chamber_cvt_pmon=2.51752E-3
foreline_cvt_pmon=2.51752E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.77933E-1
res40_imon=-2.72041E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3159E4	1.2E1	1.47E2	4.1E1	-7.33239E-2	-8.80013E1	-5.96046E-4	-8.79999E1	2.14577E-4	5.36442E-3	9.32455E-2	2.73099E1	-3.26585E1	-3.26104E1	2.67746E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98661E-1
2.0E0	6.176E3	6.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80011E1	-5.00679E-4	-8.80001E1	2.14577E-4	5.26905E-3	9.3174E-2	2.73111E1	-3.26524E1	-3.265E1	2.67692E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.99283E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80014E1	-6.91414E-4	-8.79999E1	1.90735E-4	5.48363E-3	9.33647E-2	2.72745E1	-3.26476E1	-3.26236E1	2.67619E1	1.73758E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.99401E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80014E1	-5.48363E-4	-8.79998E1	5.24521E-4	5.19753E-3	9.33647E-2	2.73216E1	-3.2698E1	-3.26142E1	2.673E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80015E1	-7.39098E-4	-8.8E1	4.29153E-4	5.34058E-3	9.31025E-2	2.73015E1	-3.26524E1	-3.26266E1	2.67824E1	1.73755E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80012E1	-3.8147E-4	-8.8E1	3.09944E-4	5.14984E-3	9.30786E-2	2.73063E1	-3.26723E1	-3.262E1	2.68178E1	1.73975E-7	2.50882E-3	2.50882E-3	6.29665E-3	2.00705E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80011E1	-4.76837E-4	-8.80005E1	1.90735E-4	5.31673E-3	9.30786E-2	2.72933E1	-3.26419E1	-3.26343E1	2.67818E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80013E1	-4.76837E-4	-8.80005E1	-9.53674E-5	5.26905E-3	9.30786E-2	2.73075E1	-3.265E1	-3.25779E1	2.68382E1	1.73679E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.00192E-1
1.2E1	3.28E2	1.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80016E1	-4.29153E-4	-8.80003E1	2.14577E-4	5.34058E-3	9.3174E-2	2.72843E1	-3.26572E1	-3.2593E1	2.68106E1	1.7368E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9963E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80015E1	-9.53674E-5	-8.80003E1	2.14577E-4	5.48363E-3	9.2864E-2	2.72732E1	-3.26567E1	-3.26567E1	2.678E1	1.73681E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.98872E-1
1.4E1	7.12E2	1.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80016E1	-2.86102E-4	-8.80005E1	3.33786E-4	5.19753E-3	9.32455E-2	2.72824E1	-3.26291E1	-3.26278E1	2.68322E1	1.73679E-7	2.51525E-3	2.51525E-3	6.28592E-3	2.00192E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80015E1	-4.05312E-4	-8.80004E1	6.91414E-4	5.45979E-3	9.35316E-2	2.72937E1	-3.26663E1	-3.2611E1	2.67806E1	1.73681E-7	2.52139E-3	2.52139E-3	6.30182E-3	1.99577E-1
1.6E1	3.179E3	2.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80019E1	-6.91414E-4	-8.80001E1	4.76837E-4	5.50747E-3	9.32932E-2	2.72839E1	-3.26614E1	-3.26183E1	2.67794E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.99456E-1
1.7E1	4.0799E4	1.1E1	6.87E2	4.7E2	-7.22418E-2	-8.80018E1	-2.6226E-4	-8.80003E1	4.76837E-4	5.4121E-3	9.28879E-2	2.73087E1	-3.26374E1	-3.26482E1	2.67812E1	1.73605E-7	2.5131E-3	2.5131E-3	6.25916E-3	2.00021E-1
1.8E1	1.81964E5	9.1E1	7.27E2	5.0E2	-7.31692E-2	-8.80018E1	-3.09944E-4	-8.80006E1	4.52995E-4	5.60284E-3	9.30071E-2	2.73552E1	-3.27211E1	-3.25583E1	2.67953E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1
1.9E1	2.374E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80018E1	-7.39098E-4	-8.80002E1	3.09944E-4	5.34058E-3	9.29356E-2	2.7285E1	-3.26487E1	-3.26578E1	2.68011E1	1.73676E-7	2.52093E-3	2.52093E-3	6.3282E-3	2.00435E-1
2.0E1	3.37E2	1.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80021E1	-5.00679E-4	-8.80003E1	1.19209E-4	5.43594E-3	9.2864E-2	2.72744E1	-3.26478E1	-3.26266E1	2.6798E1	1.73686E-7	2.51439E-3	2.51439E-3	6.34301E-3	2.00345E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80021E1	-4.76837E-4	-8.80004E1	2.14577E-4	5.38826E-3	9.27687E-2	2.72895E1	-3.26837E1	-3.2641E1	2.68065E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00876E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80018E1	-4.76837E-4	-8.80007E1	2.6226E-4	5.4121E-3	9.28879E-2	2.72989E1	-3.26316E1	-3.25818E1	2.68198E1	1.73755E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.00499E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80017E1	-8.58307E-4	-8.80004E1	3.8147E-4	5.55515E-3	9.30071E-2	2.73442E1	-3.26615E1	-3.2641E1	2.68244E1	1.73675E-7	2.51752E-3	2.51752E-3	6.29721E-3	1.99983E-1