[Scan]
initial_time=2016-02-16T01:50:51
final_time=2016-02-16T01:51:12
ip_count=19
run=1030
dataset=5
scan=383
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.75369E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.0755E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=3.8656E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.85951E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=7.65431E-10
mult1=-9.83671E-9
mult2=-2.75853E-9
rf_tmon=-3.9837E-3
rf_agc=3.32735E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=4.28736E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66339E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=2.00895E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05309E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=3.10137E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02024E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04646E1
cs_ea1_imon=2.21613E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04988E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65321E1
os_ef1alow_imon=3.00685E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0387E1
cs_ea2_imon=1.58937E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83595E1
cs_ef1a_imon=2.97731E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=4.20749E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1088E1
os_restr1_imon=2.9012E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15717E1
os_ea1_imon=1.89076E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64099E1
os_ef1bup_imon=3.10624E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23124E0
cs_ionrep_imon=1.2779E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93389E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=3.24282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=7.53701E-10
tplens_vset=1.4E-1
tplens_vmon=1.62579E0
tplens_imon=5.61282E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.48509E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.59771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.9877E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.07612E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28744E0
ionrepsh_imon=2.02112E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3331E1
lens5b_imon=2.18172E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7391E1
cs_ef2b_imon=3.11423E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.9788E-1
os_ea2_imon=-5.97398E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00751E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7193E1
cs_ef2a_imon=3.22787E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.70675E0
os_ef2alow_imon=-2.58848E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20775E-1
os_ef2bup_imon=-5.59458E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10475E1
os_restr2_imon=2.84038E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23115E2
cs_ionfoca_imon=6.29476E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01578E1
cs_anode2_imon=2.25897E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.1253E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.11735E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.02917E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.82388E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14404E0
cs_ionaccel_imon=-1.79613E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01999E2
cs_ionfocb_imon=1.46931E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56173E1
einzel_imon=8.1153E-6
window_vset=0.0E0
window_vmon=1.18641E-1
window_imon=-7.01421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82584E2
mask1_imon=2.389E-4
mask2_vset=0.0E0
mask2_vmon=-1.85857E1
mask2_imon=-7.08371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.22406E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.72697E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.35963E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66172E0
defgridb_imon=6.40715E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=5.26598E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.88979E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66609E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=1.0087E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61932E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66759E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24506E-2
os_fil2_imon=-2.50701E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.06671E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6652E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.12473E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23443E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22613E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.85677E-1
res40_imon=-2.90473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2992E4	1.7E1	1.47E2	4.1E1	-7.29374E-2	-8.80019E1	-5.48363E-4	-8.8E1	1.19209E-4	5.24521E-3	9.29356E-2	2.72868E1	-3.26437E1	-3.26166E1	2.67317E1	1.73677E-7	2.52342E-3	2.52342E-3	6.3074E-3	1.98894E-1
2.0E0	6.04E3	2.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80018E1	-6.4373E-4	-8.79998E1	3.33786E-4	4.88758E-3	9.31263E-2	2.73069E1	-3.26897E1	-3.26236E1	2.67968E1	1.73679E-7	2.50989E-3	2.50989E-3	6.31817E-3	1.99E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80016E1	-4.05312E-4	-8.80006E1	3.8147E-4	5.03063E-3	9.31025E-2	2.72925E1	-3.26783E1	-3.26536E1	2.6807E1	1.73755E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-4.76837E-4	-8.80004E1	4.52995E-4	5.22137E-3	9.29594E-2	2.72973E1	-3.26494E1	-3.26188E1	2.67848E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9911E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80015E1	-3.8147E-4	-8.80003E1	3.57628E-4	5.03063E-3	9.32455E-2	2.72859E1	-3.265E1	-3.26338E1	2.67674E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80017E1	-4.76837E-4	-8.80006E1	4.76837E-4	5.07832E-3	9.35793E-2	2.7269E1	-3.26657E1	-3.26128E1	2.67938E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80017E1	-1.66893E-4	-8.80002E1	4.05312E-4	5.34058E-3	9.31025E-2	2.73196E1	-3.26428E1	-3.26042E1	2.6783E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00673E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80022E1	-6.19888E-4	-8.80003E1	4.76837E-4	5.19753E-3	9.2864E-2	2.72936E1	-3.26635E1	-3.26648E1	2.68088E1	1.73675E-7	2.52058E-3	2.52058E-3	6.33809E-3	1.98372E-1
1.2E1	3.22E2	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80023E1	-8.82149E-4	-8.80001E1	2.86102E-4	5.36442E-3	9.29832E-2	2.73345E1	-3.26567E1	-3.26254E1	2.68106E1	1.73605E-7	2.51874E-3	2.51874E-3	6.29581E-3	1.99834E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80018E1	-3.57628E-4	-8.80001E1	4.52995E-4	5.22137E-3	9.30548E-2	2.72991E1	-3.26639E1	-3.26344E1	2.67812E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
1.4E1	7.32E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80019E1	-3.8147E-4	-8.79999E1	2.14577E-4	5.14984E-3	9.27925E-2	2.73358E1	-3.27416E1	-3.26158E1	2.67949E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.9911E-1
1.5E1	6.3E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80019E1	-5.00679E-4	-8.80003E1	3.33786E-4	5.24521E-3	9.32217E-2	2.72996E1	-3.26364E1	-3.26058E1	2.67818E1	1.73605E-7	2.51679E-3	2.51679E-3	6.3282E-3	1.99119E-1
1.6E1	3.216E3	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80018E1	4.76837E-5	-8.80002E1	2.86102E-4	5.48363E-3	9.32217E-2	2.73081E1	-3.26609E1	-3.2635E1	2.67935E1	1.73605E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.98696E-1
1.7E1	4.1163E4	2.5E1	6.87E2	4.7E2	-7.34782E-2	-8.80018E1	1.43051E-4	-8.80003E1	3.8147E-4	5.76973E-3	9.29832E-2	2.72733E1	-3.26543E1	-3.26374E1	2.68023E1	1.73755E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99456E-1
1.8E1	1.81553E5	1.11E2	7.27E2	5.0E2	-7.30918E-2	-8.80018E1	-4.76837E-5	-8.80003E1	3.57628E-4	5.4121E-3	9.30548E-2	2.73429E1	-3.26825E1	-3.26092E1	2.6813E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.00847E-1
1.9E1	2.377E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80017E1	7.15256E-5	-8.80003E1	5.00679E-4	5.45979E-3	9.29117E-2	2.73039E1	-3.26921E1	-3.26065E1	2.67986E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.99977E-1
2.0E1	3.43E2	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80019E1	-2.86102E-4	-8.80003E1	4.05312E-4	5.65052E-3	9.28164E-2	2.73111E1	-3.26524E1	-3.26518E1	2.67812E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.98153E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80017E1	-2.86102E-4	-8.80003E1	9.53674E-5	4.93526E-3	9.29117E-2	2.73616E1	-3.26705E1	-3.25918E1	2.6798E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80019E1	-9.53674E-5	-8.8E1	5.00679E-4	5.36442E-3	9.31025E-2	2.72762E1	-3.26626E1	-3.26301E1	2.68058E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.01022E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80016E1	-4.76837E-4	-8.80001E1	5.48363E-4	5.14984E-3	9.30309E-2	2.72985E1	-3.26657E1	-3.2641E1	2.678E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.98661E-1