[Scan]
initial_time=2016-02-16T01:52:15
final_time=2016-02-16T01:52:35
ip_count=19
run=1030
dataset=5
scan=386
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.8219E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.3982E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=3.70467E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.7585E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=7.44951E-10
mult1=-9.94858E-9
mult2=-2.77225E-9
rf_tmon=-4.86342E-3
rf_agc=3.33563E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=3.84176E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67635E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19743E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05205E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.55341E1
cs_ef1b_imon=3.13175E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02384E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.18964E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08221E0
lens1_imon=1.55E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64611E1
os_ef1alow_imon=2.93148E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.5786E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83052E1
cs_ef1a_imon=2.98172E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=3.56209E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.12008E1
os_restr1_imon=2.95943E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16195E1
os_ea1_imon=1.88574E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64552E1
os_ef1bup_imon=3.09425E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19622E0
cs_ionrep_imon=1.27506E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.00718E1
cs_anode1_imon=3.21703E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.36988E-10
tplens_vset=1.4E-1
tplens_vmon=1.60659E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26649E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98584E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.96097E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24489E0
ionrepsh_imon=2.01948E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.19901E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74336E1
cs_ef2b_imon=3.17422E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30094E-1
os_ea2_imon=-4.36334E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00864E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72785E1
cs_ef2a_imon=3.23614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.644E0
os_ef2alow_imon=-3.24594E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.12364E-1
os_ef2bup_imon=-5.77592E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10976E1
os_restr2_imon=2.85434E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.28666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02092E1
cs_anode2_imon=2.19371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.12329E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.18172E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.85099E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=2.8789E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10655E0
cs_ionaccel_imon=-2.7364E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01919E2
cs_ionfocb_imon=1.47088E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56901E1
einzel_imon=8.74229E-6
window_vset=0.0E0
window_vmon=1.12839E-1
window_imon=-1.26795E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8243E2
mask1_imon=2.38638E-4
mask2_vset=0.0E0
mask2_vmon=-1.86509E1
mask2_imon=1.89887E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.93076E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=6.8673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.23643E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=5.84234E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.30156E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6647E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30829E1
cs_fil1_imon=1.0069E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62578E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66805E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-3.09812E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=3.51862E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87577E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29842E-1
cs_fil2_imon=-1.26403E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51365E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22481E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73827E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.03774E-1
res40_imon=-3.07963E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3016E4	1.8E1	1.47E2	4.1E1	-7.33239E-2	-8.80015E1	-5.00679E-4	-8.80001E1	1.43051E-4	5.48363E-3	9.3317E-2	2.73021E1	-3.26838E1	-3.26502E1	2.69055E1	1.7368E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.98419E-1
2.0E0	5.885E3	6.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80013E1	-4.76837E-4	-8.80002E1	-2.38419E-5	5.4121E-3	9.3317E-2	2.73159E1	-3.26807E1	-3.2629E1	2.6801E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.98153E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80015E1	-3.8147E-4	-8.80002E1	4.29153E-4	5.38826E-3	9.28402E-2	2.73345E1	-3.26567E1	-3.26633E1	2.67866E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.97903E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80018E1	-2.14577E-4	-8.80002E1	3.33786E-4	5.38826E-3	9.2721E-2	2.72968E1	-3.26496E1	-3.26036E1	2.67746E1	1.73605E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.97731E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.8002E1	-4.29153E-4	-8.80002E1	1.43051E-4	5.62668E-3	9.3317E-2	2.72973E1	-3.26482E1	-3.26194E1	2.67986E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80017E1	-3.8147E-4	-8.80004E1	2.14577E-4	5.53131E-3	9.32455E-2	2.72968E1	-3.26254E1	-3.26195E1	2.6803E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98075E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80014E1	-6.19888E-4	-8.80006E1	4.29153E-4	5.14984E-3	9.30786E-2	2.72818E1	-3.26676E1	-3.26125E1	2.68106E1	1.73753E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9883E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80016E1	-5.48363E-4	-8.80004E1	2.38419E-4	5.38826E-3	9.30786E-2	2.73169E1	-3.26443E1	-3.25806E1	2.67998E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98764E-1
1.2E1	3.52E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80018E1	-2.6226E-4	-8.80005E1	4.52995E-4	5.19753E-3	9.32217E-2	2.72727E1	-3.26199E1	-3.2746E1	2.67968E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98937E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80016E1	-5.24521E-4	-8.80007E1	3.8147E-4	5.60284E-3	9.30309E-2	2.7324E1	-3.2659E1	-3.25782E1	2.67908E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98937E-1
1.4E1	7.39E2	0.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80017E1	-3.57628E-4	-8.80004E1	5.48363E-4	5.22137E-3	9.31025E-2	2.73291E1	-3.26783E1	-3.26224E1	2.67734E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80016E1	-6.19888E-4	-8.80004E1	4.76837E-4	4.8399E-3	9.30071E-2	2.73075E1	-3.26809E1	-3.25947E1	2.67469E1	1.73755E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9911E-1
1.6E1	3.182E3	5.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80014E1	-3.57628E-4	-8.80004E1	1.66893E-4	5.19753E-3	9.29594E-2	2.73039E1	-3.26303E1	-3.26132E1	2.68743E1	1.73753E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.98491E-1
1.7E1	4.074E4	2.2E1	6.87E2	4.7E2	-7.15461E-2	-8.80015E1	-4.29153E-4	-8.80003E1	5.00679E-4	5.53131E-3	9.28164E-2	2.73393E1	-3.26851E1	-3.26138E1	2.6752E1	1.73681E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.97119E-1
1.8E1	1.80401E5	9.5E1	7.27E2	5.0E2	-7.18554E-2	-8.80017E1	-4.76837E-4	-8.80004E1	4.52995E-4	5.55515E-3	9.31978E-2	2.73488E1	-3.2679E1	-3.2626E1	2.67801E1	1.73532E-7	2.51287E-3	2.51287E-3	6.33919E-3	1.98561E-1
1.9E1	2.351E3	2.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80017E1	-4.76837E-4	-8.80006E1	4.05312E-4	5.14984E-3	9.30071E-2	2.73279E1	-3.26543E1	-3.26266E1	2.67986E1	1.73681E-7	2.51248E-3	2.51248E-3	6.32978E-3	1.9852E-1
2.0E1	3.67E2	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80015E1	-6.67572E-4	-8.80004E1	3.33786E-4	5.48363E-3	9.32693E-2	2.73135E1	-3.26561E1	-3.26158E1	2.67631E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97216E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80017E1	-3.33786E-4	-8.80006E1	3.57628E-4	5.53131E-3	9.32932E-2	2.7308E1	-3.26372E1	-3.25894E1	2.68186E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9911E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.80019E1	1.19209E-4	-8.80006E1	1.19209E-4	5.45979E-3	9.33647E-2	2.73151E1	-3.26791E1	-3.26325E1	2.67932E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80019E1	4.76837E-5	-8.80002E1	5.00679E-4	5.50747E-3	9.31025E-2	2.72974E1	-3.2652E1	-3.26649E1	2.67896E1	1.73827E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00363E-1