[Scan]
initial_time=2016-02-16T01:53:36
final_time=2016-02-16T01:53:56
ip_count=19
run=1030
dataset=5
scan=389
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.76815E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.71084E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=3.95477E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.79794E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=7.99692E-10
mult1=-9.64122E-9
mult2=-2.82713E-9
rf_tmon=-4.30891E-3
rf_agc=3.29493E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.161E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61567E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=2.0029E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.0527E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54193E1
cs_ef1b_imon=3.09118E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=2.21703E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0035E0
lens1_imon=1.82397E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.5649E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83908E1
cs_ef1a_imon=3.01442E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.14026E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=2.91242E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=1.876E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64116E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27373E0
cs_ionrep_imon=1.25523E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93795E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01587E1
cs_anode1_imon=3.2548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.93064E-10
tplens_vset=1.4E-1
tplens_vmon=1.55852E0
tplens_imon=-2.89745E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26514E1
iondef3_imon=1.52344E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.09985E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=2.00254E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34343E1
lens5b_imon=2.17846E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74321E1
cs_ef2b_imon=3.14884E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.24686E-1
os_ea2_imon=-4.111E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7202E1
cs_ef2a_imon=3.22345E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64981E0
os_ef2alow_imon=-2.77808E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72196E-1
os_ef2bup_imon=-5.50268E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=2.87134E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.32344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.26623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72874E1
iondef1_imon=1.11175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.12702E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.92223E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.3505E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-2.17982E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02016E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=8.1023E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82568E2
mask1_imon=2.38893E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.84785E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.47654E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.31574E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33941E1
os_fil1_imon=5.46698E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67741E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66259E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30821E1
cs_fil1_imon=1.0085E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63123E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66628E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72238E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-1.90313E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.99803E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31371E-1
res40_imon=-2.88259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3172E4	1.4E1	1.47E2	4.1E1	-7.201E-2	-8.80015E1	-5.00679E-4	-8.80001E1	-3.09944E-4	5.19753E-3	9.34124E-2	2.73151E1	-3.26673E1	-3.26101E1	2.67433E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.98937E-1
2.0E0	6.033E3	7.0E0	3.16E2	1.6E2	-7.201E-2	-8.80014E1	-2.86102E-4	-8.80002E1	-1.43051E-4	5.26905E-3	9.32693E-2	2.72919E1	-3.26873E1	-3.25912E1	2.68046E1	1.73679E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9883E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80014E1	-1.90735E-4	-8.80004E1	-4.76837E-5	5.29289E-3	9.32455E-2	2.73033E1	-3.26402E1	-3.26354E1	2.67998E1	1.73755E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98937E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80017E1	-1.66893E-4	-8.79997E1	9.53674E-5	5.36442E-3	9.32217E-2	2.73514E1	-3.26392E1	-3.26464E1	2.67998E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80015E1	-4.76837E-5	-8.8E1	1.43051E-4	5.4121E-3	9.3317E-2	2.73165E1	-3.26536E1	-3.25924E1	2.68028E1	1.73605E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.99048E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80017E1	-2.14577E-4	-8.80002E1	7.15256E-5	5.48363E-3	9.3317E-2	2.72998E1	-3.26803E1	-3.26006E1	2.67932E1	1.73679E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80017E1	7.15256E-5	-8.80002E1	3.33786E-4	5.6982E-3	9.32932E-2	2.73027E1	-3.26773E1	-3.26236E1	2.68082E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80017E1	-2.14577E-4	-8.80003E1	2.38419E-4	5.26905E-3	9.34124E-2	2.73316E1	-3.26567E1	-3.26508E1	2.67884E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.99E-1
1.2E1	3.24E2	1.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80018E1	-3.33786E-4	-8.80001E1	4.29153E-4	5.38826E-3	9.32693E-2	2.72931E1	-3.26164E1	-3.26404E1	2.67992E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.00192E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80019E1	-1.90735E-4	-8.79999E1	7.15256E-5	5.43594E-3	9.33886E-2	2.73255E1	-3.27209E1	-3.26038E1	2.68286E1	1.73755E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9911E-1
1.4E1	7.22E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80019E1	-4.76837E-4	-8.80001E1	2.38419E-5	5.24521E-3	9.3317E-2	2.72528E1	-3.26765E1	-3.26579E1	2.67782E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98592E-1
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80017E1	-9.53674E-5	-8.80002E1	1.43051E-4	5.60284E-3	9.33409E-2	2.73201E1	-3.26669E1	-3.26278E1	2.67932E1	1.7368E-7	2.52154E-3	2.52154E-3	6.33211E-3	1.9963E-1
1.6E1	3.124E3	1.0E0	6.47E2	4.41E2	-7.32464E-2	-8.8002E1	-2.38419E-4	-8.8E1	4.29153E-4	5.43594E-3	9.32693E-2	2.72877E1	-3.26627E1	-3.26134E1	2.67775E1					
1.7E1	4.0872E4	2.8E1	6.87E2	4.7E2	-7.25507E-2	-8.80018E1	-3.33786E-4	-8.80002E1	9.53674E-5	5.67436E-3	9.2864E-2	2.72781E1	-3.26404E1	-3.26272E1	2.68038E1	1.73679E-7	2.51203E-3	2.51203E-3	6.30202E-3	1.98322E-1
1.8E1	1.81593E5	1.17E2	7.27E2	5.0E2	-7.3401E-2	-8.80018E1	-3.8147E-4	-8.80001E1	4.29153E-4	5.48363E-3	9.31263E-2	2.73766E1	-3.27263E1	-3.25527E1	2.68028E1	1.73605E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00108E-1
1.9E1	2.327E3	1.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80018E1	-5.00679E-4	-8.80003E1	2.6226E-4	5.36442E-3	9.31978E-2	2.73247E1	-3.2648E1	-3.26205E1	2.67986E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00325E-1
2.0E1	3.68E2	2.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80018E1	-9.53674E-5	-8.80007E1	2.6226E-4	5.45979E-3	9.32217E-2	2.72732E1	-3.26077E1	-3.26354E1	2.67998E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80018E1	-4.76837E-5	-8.80006E1	2.38419E-4	5.34058E-3	9.30548E-2	2.72949E1	-3.26945E1	-3.26308E1	2.67935E1	1.73605E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98247E-1
2.2E1	5.8E1	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80019E1	-1.90735E-4	-8.80005E1	2.14577E-4	5.36442E-3	9.28164E-2	2.73358E1	-3.26762E1	-3.25989E1	2.67775E1	1.73605E-7	2.51525E-3	2.51525E-3	6.35601E-3	1.9883E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80018E1	-3.33786E-4	-8.80007E1	2.38419E-4	5.8651E-3	9.29594E-2	2.72874E1	-3.26679E1	-3.26514E1	2.67836E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99803E-1