[Scan]
initial_time=2016-02-16T01:54:03
final_time=2016-02-16T01:54:23
ip_count=19
run=1030
dataset=5
scan=390
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.74383E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.63257E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=3.70061E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.84265E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=7.74539E-10
mult1=-1.06796E-8
mult2=-2.80644E-9
rf_tmon=-5.45572E-3
rf_agc=3.26426E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=4.03154E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.65652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19759E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.1301E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=2.19994E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05189E0
lens1_imon=1.50621E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65617E1
os_ef1alow_imon=3.03532E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.59045E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8389E1
cs_ef1a_imon=2.94918E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.98147E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10228E1
os_restr1_imon=2.89584E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=1.89236E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64332E1
os_ef1bup_imon=3.15569E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=1.29491E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02218E1
cs_anode1_imon=3.23822E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.33197E-10
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-1.6439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26573E1
iondef3_imon=1.53807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26789E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.98714E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.99315E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=2.02368E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34159E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73588E1
cs_ef2b_imon=3.08866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8525E-1
os_ea2_imon=-2.8119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7151E1
cs_ef2a_imon=3.25192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.75193E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.65278E-1
os_ef2bup_imon=-5.72252E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.0964E1
os_restr2_imon=2.81512E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.33538E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.00812E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72709E1
iondef1_imon=1.09281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.14215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.87382E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=3.14653E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.24126E0
cs_ionaccel_imon=-1.66445E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02004E2
cs_ionfocb_imon=1.46624E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55204E1
einzel_imon=7.99418E-6
window_vset=0.0E0
window_vmon=1.09224E-1
window_imon=-3.70628E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.38562E-4
mask2_vset=0.0E0
mask2_vmon=-1.85155E1
mask2_imon=-9.72491E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93614E3
defgrida_imon=7.09848E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.24713E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61226E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=5.35886E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66489E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30829E1
cs_fil1_imon=1.00893E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6248E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66651E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.35245E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7306E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.25654E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22561E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=7.40111E-1
res40_imon=-2.99071E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3149E4	1.7E1	1.47E2	4.1E1	-7.22418E-2	-8.80018E1	-2.14577E-4	-8.80002E1	3.09944E-4	5.00679E-3	9.31025E-2	2.73275E1	-3.26826E1	-3.26272E1	2.68797E1	1.73605E-7	2.51203E-3	2.51203E-3	6.29128E-3	1.9917E-1
2.0E0	6.049E3	4.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80016E1	2.14577E-4	-8.79998E1	2.38419E-4	5.50747E-3	9.34362E-2	2.73027E1	-3.27005E1	-3.2632E1	2.67782E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99456E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80012E1	7.15256E-5	-8.8E1	1.43051E-4	5.24521E-3	9.31501E-2	2.72979E1	-3.26903E1	-3.26224E1	2.67873E1	1.73831E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00673E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80015E1	-7.15256E-5	-8.80002E1	3.09944E-4	5.36442E-3	9.32455E-2	2.73252E1	-3.26526E1	-3.26461E1	2.68058E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	-2.38419E-5	-8.80003E1	3.57628E-4	5.03063E-3	9.32693E-2	2.73051E1	-3.26549E1	-3.2608E1	2.68184E1	1.73605E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.00192E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80015E1	-2.38419E-4	-8.80003E1	3.09944E-4	5.17368E-3	9.32455E-2	2.73165E1	-3.26777E1	-3.26224E1	2.68088E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.9963E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80016E1	9.53674E-5	-8.80003E1	4.52995E-4	5.74589E-3	9.3174E-2	2.73327E1	-3.26663E1	-3.26086E1	2.67902E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80014E1	-1.43051E-4	-8.80006E1	5.00679E-4	5.6982E-3	9.32455E-2	2.7301E1	-3.26809E1	-3.26331E1	2.6804E1	1.73755E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.9911E-1
1.2E1	3.4E2	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80016E1	-3.09944E-4	-8.80004E1	2.14577E-4	5.74589E-3	9.30548E-2	2.72991E1	-3.26368E1	-3.25936E1	2.68262E1	1.7368E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99803E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80014E1	-7.15256E-5	-8.80003E1	2.38419E-5	4.88758E-3	9.30071E-2	2.7334E1	-3.26809E1	-3.25906E1	2.68198E1	1.73605E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.00151E-1
1.4E1	7.03E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80018E1	-4.29153E-4	-8.80002E1	2.14577E-4	5.43594E-3	9.29356E-2	2.72775E1	-3.26609E1	-3.26254E1	2.6792E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9934E-1
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80019E1	-3.09944E-4	-8.80001E1	9.53674E-5	5.6982E-3	9.32932E-2	2.72733E1	-3.26645E1	-3.26194E1	2.68076E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.9963E-1
1.6E1	3.168E3	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80017E1	-3.57628E-4	-8.80002E1	6.4373E-4	5.53131E-3	9.30071E-2	2.73074E1	-3.26493E1	-3.26283E1	2.67864E1	1.73758E-7	2.51804E-3	2.51804E-3	6.27954E-3	1.99224E-1
1.7E1	4.0629E4	2.0E1	6.87E2	4.7E2	-7.27053E-2	-8.80021E1	-3.57628E-4	-8.80003E1	2.14577E-4	5.24521E-3	9.34362E-2	2.72994E1	-3.26349E1	-3.26037E1	2.68138E1	1.73605E-7	2.51783E-3	2.51783E-3	6.323E-3	2.0027E-1
1.8E1	1.80708E5	1.07E2	7.27E2	5.0E2	-7.19325E-2	-8.80018E1	-5.72205E-4	-8.8E1	3.8147E-4	5.4121E-3	9.32455E-2	2.73742E1	-3.27077E1	-3.26518E1	2.68232E1	1.73605E-7	2.51725E-3	2.51725E-3	6.3131E-3	1.99343E-1
1.9E1	2.363E3	5.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80018E1	-4.29153E-4	-8.80001E1	1.90735E-4	5.14984E-3	9.31025E-2	2.73153E1	-3.27143E1	-3.25816E1	2.67607E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.99977E-1
2.0E1	3.81E2	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80021E1	-4.29153E-4	-8.80001E1	2.14577E-4	5.17368E-3	9.30786E-2	2.72808E1	-3.26834E1	-3.26376E1	2.67833E1	1.73605E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00499E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80018E1	-3.8147E-4	-8.80003E1	1.43051E-4	5.24521E-3	9.32455E-2	2.7337E1	-3.26927E1	-3.26266E1	2.68208E1	1.73677E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.00399E-1
2.2E1	5.0E1	0.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80021E1	-2.86102E-4	-8.80002E1	4.29153E-4	5.22137E-3	9.34362E-2	2.73004E1	-3.2688E1	-3.26048E1	2.68117E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9934E-1
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80021E1	-4.05312E-4	-8.80006E1	5.72205E-4	5.62668E-3	9.31978E-2	2.72709E1	-3.26789E1	-3.26573E1	2.67914E1	1.73605E-7	2.52384E-3	2.52384E-3	6.29665E-3	1.9951E-1