[Scan]
initial_time=2016-02-16T01:54:30
final_time=2016-02-16T01:54:50
ip_count=19
run=1030
dataset=5
scan=391
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.7854E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.74648E-10
ql2_vset=
ql2_vmon=3.33786E-4
ql2_imon=3.86012E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.65811E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=8.00371E-10
mult1=-1.02341E-8
mult2=-2.86433E-9
rf_tmon=-5.63597E-3
rf_agc=3.20298E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=4.08745E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=3.12506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=2.20117E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05277E0
lens1_imon=1.67256E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65744E1
os_ef1alow_imon=3.01261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.57968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83968E1
cs_ef1a_imon=2.97802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.90267E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10397E1
os_restr1_imon=2.89404E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1557E1
os_ea1_imon=1.876E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6438E1
os_ef1bup_imon=3.13371E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27914E0
cs_ionrep_imon=1.25523E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.24903E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.87206E-10
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.5375E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98616E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.08089E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=2.01371E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.20297E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73504E1
cs_ef2b_imon=3.11316E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52925E-1
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71432E1
cs_ef2a_imon=3.23101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.7261E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.88704E-1
os_ef2bup_imon=-5.76937E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10144E1
os_restr2_imon=2.81836E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.00992E1
cs_anode2_imon=2.24965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.13855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91258E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=3.81017E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.21003E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02017E2
cs_ionfocb_imon=1.46823E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55504E1
einzel_imon=7.9221E-6
window_vset=0.0E0
window_vmon=1.11026E-1
window_imon=-4.10272E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.38626E-4
mask2_vset=0.0E0
mask2_vmon=-1.85305E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=8.27684E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.3756E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33947E1
os_fil1_imon=5.08857E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.14593E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66679E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=1.00959E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66904E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.24434E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52903E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22652E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.78844E-1
res40_imon=-3.04838E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3587E4	1.5E1	1.47E2	4.1E1	-7.36328E-2	-8.80015E1	-4.29153E-4	-8.80004E1	2.38419E-4	5.57899E-3	9.35316E-2	2.72883E1	-3.26338E1	-3.26254E1	2.67421E1	1.73605E-7	2.51007E-3	2.51007E-3	6.32936E-3	1.97903E-1
2.0E0	6.147E3	5.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80016E1	-1.90735E-4	-8.80004E1	5.00679E-4	5.65052E-3	9.34362E-2	2.73257E1	-3.26815E1	-3.26404E1	2.68214E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99283E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80017E1	-5.24521E-4	-8.80003E1	3.33786E-4	5.79357E-3	9.3317E-2	2.72903E1	-3.2652E1	-3.26272E1	2.67944E1	1.73605E-7	2.52139E-3	2.52139E-3	6.33538E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80019E1	-5.72205E-4	-8.80002E1	2.6226E-4	5.74589E-3	9.35078E-2	2.72903E1	-3.26708E1	-3.26154E1	2.68136E1	1.73605E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.98322E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80019E1	-1.19209E-4	-8.80003E1	4.52995E-4	5.84126E-3	9.33409E-2	2.72727E1	-3.26603E1	-3.2629E1	2.67998E1	1.73605E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80019E1	-5.96046E-4	-8.80002E1	4.76837E-4	5.34058E-3	9.3174E-2	2.7298E1	-3.26472E1	-3.26378E1	2.67804E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80017E1	-1.19209E-4	-8.80003E1	6.4373E-4	5.60284E-3	9.31025E-2	2.73559E1	-3.25881E1	-3.26327E1	2.6768E1	1.7368E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80019E1	-5.96046E-4	-8.80001E1	4.52995E-4	5.43594E-3	9.32693E-2	2.7334E1	-3.26189E1	-3.26307E1	2.67998E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99977E-1
1.2E1	3.19E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80018E1	-2.14577E-4	-8.80002E1	3.57628E-4	5.55515E-3	9.29832E-2	2.72763E1	-3.26707E1	-3.26003E1	2.68052E1	1.73605E-7	2.50989E-3	2.50989E-3	6.3074E-3	2.00192E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80019E1	-5.24521E-4	-8.80003E1	6.19888E-4	5.34058E-3	9.32455E-2	2.72811E1	-3.263E1	-3.26195E1	2.68188E1	1.73758E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.00108E-1
1.4E1	7.77E2	2.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80016E1	-3.09944E-4	-8.80005E1	3.09944E-4	5.53131E-3	9.32217E-2	2.73339E1	-3.26554E1	-3.26326E1	2.68016E1	1.73793E-7	2.51838E-3	2.51838E-3	6.3074E-3	1.99091E-1
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80017E1	-2.38419E-4	-8.80002E1	3.8147E-4	5.45979E-3	9.3174E-2	2.72764E1	-3.26668E1	-3.26554E1	2.6792E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98075E-1
1.6E1	3.23E3	4.0E0	6.47E2	4.41E2	-7.201E-2	-8.80017E1	-5.72205E-4	-8.80002E1	3.09944E-4	5.34058E-3	9.33647E-2	2.72498E1	-3.26711E1	-3.26212E1	2.68106E1	1.73699E-7	2.51807E-3	2.51807E-3	6.3074E-3	1.98055E-1
1.7E1	4.0432E4	1.9E1	6.87E2	4.7E2	-7.32464E-2	-8.80014E1	-6.4373E-4	-8.80002E1	2.86102E-4	5.67436E-3	9.32217E-2	2.73157E1	-3.26974E1	-3.25747E1	2.67956E1	1.73755E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.97731E-1
1.8E1	1.80824E5	1.19E2	7.27E2	5.0E2	-7.26282E-2	-8.80015E1	-4.05312E-4	-8.79998E1	3.8147E-4	5.24521E-3	9.32932E-2	2.73351E1	-3.26416E1	-3.2587E1	2.67956E1	1.73679E-7	2.52599E-3	2.52599E-3	6.3074E-3	1.97478E-1
1.9E1	2.396E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80017E1	-5.00679E-4	-8.80003E1	1.66893E-4	5.4121E-3	9.33886E-2	2.73009E1	-3.26398E1	-3.26446E1	2.68064E1	1.7368E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.97559E-1
2.0E1	3.79E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80019E1	-7.15256E-5	-8.80002E1	3.57628E-4	5.6982E-3	9.30071E-2	2.73069E1	-3.26759E1	-3.2602E1	2.6819E1	1.73605E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.98075E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80021E1	-4.76837E-4	-8.80003E1	2.6226E-4	5.53131E-3	9.31025E-2	2.73104E1	-3.26496E1	-3.26107E1	2.67974E1	1.73755E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99456E-1
2.2E1	5.1E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80021E1	0.0E0	-8.80002E1	3.09944E-4	5.43594E-3	9.31263E-2	2.7278E1	-3.27363E1	-3.25977E1	2.67619E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00673E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80019E1	3.33786E-4	-8.80002E1	1.43051E-4	5.43594E-3	9.31501E-2	2.72955E1	-3.26621E1	-3.26266E1	2.68364E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9985E-1