[Scan]
initial_time=2016-02-16T01:54:57
final_time=2016-02-16T01:55:17
ip_count=19
run=1030
dataset=5
scan=392
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.77089E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.17921E-10
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=3.95501E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.76979E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=8.02851E-10
mult1=-9.63202E-9
mult2=-2.89227E-9
rf_tmon=-4.83086E-3
rf_agc=3.24984E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=3.71122E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62374E0
bslens_imon=2.56803E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20302E1
lens5a_imon=2.02438E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04969E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53482E1
cs_ef1b_imon=3.02144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.18401E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0861E0
lens1_imon=1.51329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64128E1
os_ef1alow_imon=2.94325E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03454E1
cs_ea2_imon=1.58373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84423E1
cs_ef1a_imon=3.08886E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.67486E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.12073E1
os_restr1_imon=2.87791E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=1.91891E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63033E1
os_ef1bup_imon=3.04577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.25669E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9354E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01479E1
cs_anode1_imon=3.29738E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.0554E-10
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26843E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2605E1
iondef2_imon=1.54904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.95989E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30224E0
ionrepsh_imon=2.00032E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.20489E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75387E1
cs_ef2b_imon=3.17262E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.68142E-1
os_ea2_imon=-7.80247E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.0086E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.15559E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.52082E0
os_ef2alow_imon=-2.55721E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.66736E-1
os_ef2bup_imon=-4.69101E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11569E1
os_restr2_imon=2.93178E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02701E1
cs_anode2_imon=2.29338E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.119E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67583E1
iondef4_imon=1.06418E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.86652E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.58057E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.03515E0
cs_ionaccel_imon=-2.28614E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.48116E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5754E1
einzel_imon=7.75387E-6
window_vset=0.0E0
window_vmon=2.76765E-1
window_imon=-1.66059E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39706E-4
mask2_vset=0.0E0
mask2_vmon=-1.87253E1
mask2_imon=-3.95599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.09494E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.34104E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.49489E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.66836E0
defgridb_imon=6.47908E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=4.56513E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55385E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6658E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=1.00742E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.621E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66906E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.01468E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=4.75918E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75085E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28778E-1
cs_fil2_imon=-1.64978E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.94711E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22569E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.97647E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.25785E-1
res40_imon=-1.99074E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3339E4	1.3E1	1.47E2	4.1E1	-7.37874E-2	-8.80019E1	-2.86102E-4	-8.80003E1	4.76837E-5	5.55515E-3	9.32455E-2	2.73287E1	-3.26555E1	-3.26313E1	2.67301E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.99E-1
2.0E0	6.218E3	8.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80017E1	-4.76837E-5	-8.80003E1	0.0E0	5.4121E-3	9.33886E-2	2.7288E1	-3.2697E1	-3.2648E1	2.67944E1	1.73755E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80017E1	-2.86102E-4	-8.80004E1	1.90735E-4	5.36442E-3	9.34362E-2	2.73281E1	-3.26343E1	-3.26496E1	2.67998E1	1.73831E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.8002E1	-4.05312E-4	-8.80003E1	3.33786E-4	5.4121E-3	9.30786E-2	2.7255E1	-3.27133E1	-3.25942E1	2.67631E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80018E1	-3.33786E-4	-8.80005E1	2.6226E-4	5.31673E-3	9.33409E-2	2.7347E1	-3.26697E1	-3.25947E1	2.67711E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80021E1	-2.86102E-4	-8.80002E1	3.09944E-4	4.91142E-3	9.30309E-2	2.72567E1	-3.26609E1	-3.25758E1	2.6787E1	1.73605E-7	2.51814E-3	2.51814E-3	6.31269E-3	1.99061E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.8002E1	-2.38419E-4	-8.80003E1	4.52995E-4	5.14984E-3	9.32455E-2	2.73117E1	-3.26434E1	-3.26536E1	2.68088E1	1.73605E-7	2.51725E-3	2.51725E-3	6.3074E-3	1.99523E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80017E1	-1.90735E-4	-8.80001E1	5.48363E-4	5.26905E-3	9.32217E-2	2.73296E1	-3.26395E1	-3.26303E1	2.68016E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.98592E-1
1.2E1	3.24E2	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80018E1	-4.29153E-4	-8.80001E1	3.09944E-4	5.26905E-3	9.30548E-2	2.72324E1	-3.26843E1	-3.25803E1	2.6804E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9911E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.8002E1	-4.29153E-4	-8.80001E1	4.52995E-4	5.45979E-3	9.30071E-2	2.72841E1	-3.26615E1	-3.26224E1	2.67764E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9911E-1
1.4E1	7.12E2	2.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80021E1	-3.57628E-4	-8.80001E1	6.19888E-4	5.55515E-3	9.30548E-2	2.73582E1	-3.27428E1	-3.25782E1	2.68064E1	1.7368E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98764E-1
1.5E1	6.0E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.8002E1	-4.05312E-4	-8.8E1	2.38419E-4	5.34058E-3	9.3174E-2	2.73063E1	-3.26401E1	-3.26229E1	2.68004E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99283E-1
1.6E1	3.227E3	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80021E1	-2.38419E-4	-8.8E1	5.00679E-4	5.126E-3	9.30309E-2	2.73216E1	-3.27092E1	-3.26278E1	2.68082E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00151E-1
1.7E1	4.0507E4	1.4E1	6.87E2	4.7E2	-7.22418E-2	-8.80021E1	-1.19209E-4	-8.79998E1	3.8147E-4	5.26905E-3	9.28402E-2	2.73711E1	-3.26034E1	-3.26237E1	2.67881E1	1.73755E-7	2.5199E-3	2.5199E-3	6.28552E-3	2.00325E-1
1.8E1	1.8061E5	1.05E2	7.27E2	5.0E2	-7.23964E-2	-8.80018E1	-1.43051E-4	-8.80001E1	3.8147E-4	5.29289E-3	9.30309E-2	2.72635E1	-3.26425E1	-3.26872E1	2.67783E1	1.73605E-7	2.51472E-3	2.51472E-3	6.323E-3	1.99447E-1
1.9E1	2.401E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80016E1	2.38419E-5	-8.79999E1	3.57628E-4	5.10216E-3	9.29594E-2	2.73111E1	-3.27017E1	-3.25797E1	2.67854E1	1.73681E-7	2.5225E-3	2.5225E-3	6.32418E-3	1.9852E-1
2.0E1	3.31E2	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.8002E1	-7.15256E-5	-8.79999E1	2.6226E-4	5.03063E-3	9.31025E-2	2.73051E1	-3.27092E1	-3.25741E1	2.68047E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.97731E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.8002E1	1.43051E-4	-8.80005E1	4.52995E-4	5.45979E-3	9.28164E-2	2.72582E1	-3.2614E1	-3.26362E1	2.68004E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.98491E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80018E1	2.14577E-4	-8.80001E1	4.76837E-4	4.86374E-3	9.29832E-2	2.7347E1	-3.26762E1	-3.26219E1	2.68088E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.97216E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80017E1	-9.53674E-5	-8.79998E1	5.48363E-4	4.86374E-3	9.29594E-2	2.73189E1	-3.2605E1	-3.26843E1	2.67583E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.97647E-1