[Scan]
initial_time=2016-02-16T01:57:13
final_time=2016-02-16T01:57:33
ip_count=19
run=1030
dataset=5
scan=397
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.74906E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.42784E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=3.78025E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.63587E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=7.60722E-10
mult1=-1.10429E-8
mult2=-2.74374E-9
rf_tmon=-5.13269E-3
rf_agc=3.20513E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.06146E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65442E0
bslens_imon=2.7627E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20184E1
lens5a_imon=2.01766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.05724E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02464E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.18472E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06133E0
lens1_imon=1.52391E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.98009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.57346E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84481E1
cs_ef1a_imon=3.01206E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.76427E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=2.87653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14963E1
os_ea1_imon=1.90971E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=1.26801E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01919E1
cs_anode1_imon=3.26332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=7.20811E-10
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26006E1
iondef3_imon=1.51683E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26833E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98611E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.99566E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=2.02474E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.20312E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.823E-1
os_ea2_imon=-4.617E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00722E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.18408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62971E0
os_ef2alow_imon=-2.53983E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64216E-1
os_ef2bup_imon=-5.21925E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10388E1
os_restr2_imon=2.87965E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.32335E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.28399E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73026E1
iondef1_imon=1.10591E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68151E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.95732E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=3.80552E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.96641E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.47108E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56469E1
einzel_imon=7.94848E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-1.09412E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8258E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.87027E1
mask2_imon=-4.23401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=7.54798E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.35685E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52958E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33948E1
os_fil1_imon=4.54196E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80291E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66654E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30823E1
cs_fil1_imon=1.00778E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64781E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66925E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.61706E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66859E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.1479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22596E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.81998E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3247E4	2.5E1	1.47E2	4.1E1	-7.14689E-2	-8.80014E1	-4.05312E-4	-8.80003E1	1.19209E-4	5.29289E-3	9.32455E-2	2.7308E1	-3.26384E1	-3.26054E1	2.67866E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00705E-1
2.0E0	6.032E3	6.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80016E1	-4.05312E-4	-8.80001E1	2.14577E-4	5.17368E-3	9.3317E-2	2.72859E1	-3.26657E1	-3.26392E1	2.67842E1	1.73679E-7	2.51203E-3	2.51203E-3	6.29665E-3	1.9985E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80018E1	-3.8147E-4	-8.80003E1	1.90735E-4	5.00679E-3	9.33409E-2	2.73033E1	-3.26526E1	-3.26319E1	2.67788E1	1.73755E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00847E-1
4.0E0	4.0E0	1.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80019E1	-5.24521E-4	-8.80004E1	1.66893E-4	5.81741E-3	9.34362E-2	2.72817E1	-3.26675E1	-3.25828E1	2.67984E1	1.73753E-7	2.50882E-3	2.50882E-3	6.31817E-3	2.00534E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80017E1	-4.52995E-4	-8.80002E1	5.00679E-4	5.26905E-3	9.32455E-2	2.72985E1	-3.26639E1	-3.26134E1	2.6774E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.01022E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.80018E1	-6.67572E-4	-8.80003E1	1.43051E-4	5.4121E-3	9.34362E-2	2.73243E1	-3.26825E1	-3.26711E1	2.67836E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80017E1	-5.96046E-4	-8.80004E1	2.14577E-4	5.19753E-3	9.3317E-2	2.73111E1	-3.26837E1	-3.26176E1	2.67806E1	1.73755E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80017E1	-1.90735E-4	-8.80003E1	3.8147E-4	5.26905E-3	9.35316E-2	2.73204E1	-3.26567E1	-3.26307E1	2.6795E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00325E-1
1.2E1	3.27E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80018E1	-9.53674E-5	-8.80001E1	4.29153E-4	5.50747E-3	9.3317E-2	2.72841E1	-3.26663E1	-3.2638E1	2.68004E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00534E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80017E1	-4.05312E-4	-8.8E1	3.09944E-4	5.57899E-3	9.32455E-2	2.73027E1	-3.26705E1	-3.26182E1	2.684E1	1.73831E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.01022E-1
1.4E1	7.24E2	1.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80016E1	-3.09944E-4	-8.80002E1	4.05312E-4	5.50747E-3	9.32217E-2	2.73472E1	-3.26795E1	-3.25858E1	2.67926E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00847E-1
1.5E1	7.4E1	1.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80015E1	-2.38419E-4	-8.80003E1	4.76837E-5	5.48363E-3	9.34362E-2	2.72921E1	-3.26608E1	-3.25995E1	2.68146E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00325E-1
1.6E1	3.206E3	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80015E1	-9.53674E-5	-8.8E1	3.57628E-4	5.29289E-3	9.34362E-2	2.72943E1	-3.26524E1	-3.26404E1	2.67932E1	1.73679E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9883E-1
1.7E1	4.0274E4	2.3E1	6.87E2	4.7E2	-7.30918E-2	-8.80018E1	-1.19209E-4	-8.80002E1	3.33786E-4	5.48363E-3	9.35078E-2	2.73252E1	-3.27039E1	-3.26071E1	2.67872E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.97731E-1
1.8E1	1.80682E5	1.24E2	7.27E2	5.0E2	-7.29374E-2	-8.80019E1	-3.57628E-4	-8.80003E1	4.52995E-4	5.31673E-3	9.31978E-2	2.73706E1	-3.27895E1	-3.26364E1	2.67806E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.97984E-1
1.9E1	2.402E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80016E1	-2.6226E-4	-8.80002E1	5.00679E-4	5.4121E-3	9.28879E-2	2.73181E1	-3.27027E1	-3.26437E1	2.67986E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.97388E-1
2.0E1	3.33E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80023E1	-2.6226E-4	-8.80004E1	5.72205E-4	5.57899E-3	9.34124E-2	2.72803E1	-3.26626E1	-3.26024E1	2.67846E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.97903E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80017E1	-2.6226E-4	-8.8E1	2.14577E-4	5.43594E-3	9.32693E-2	2.72787E1	-3.26236E1	-3.26356E1	2.67813E1	1.73679E-7	2.51525E-3	2.51525E-3	6.35059E-3	1.9883E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80017E1	-2.14577E-4	-8.80003E1	5.72205E-4	5.43594E-3	9.30071E-2	2.73432E1	-3.26505E1	-3.26351E1	2.67746E1	1.73605E-7	2.51458E-3	2.51458E-3	6.3074E-3	2.00296E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80019E1	-2.6226E-4	-8.80004E1	4.29153E-4	5.29289E-3	9.29594E-2	2.73026E1	-3.26833E1	-3.26006E1	2.68151E1