[Scan]
initial_time=2016-02-16T01:57:40
final_time=2016-02-16T01:57:59
ip_count=19
run=1030
dataset=5
scan=398
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.77383E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.56354E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=3.98684E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.78075E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=7.83134E-10
mult1=-9.19199E-9
mult2=-2.88788E-9
rf_tmon=-5.16427E-3
rf_agc=3.3138E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=4.1343E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65014E0
bslens_imon=2.70467E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19584E1
lens5a_imon=1.98905E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05126E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53599E1
cs_ef1b_imon=3.05887E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05117E1
cs_ea1_imon=2.18409E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03165E0
lens1_imon=1.45586E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6434E1
os_ef1alow_imon=2.97653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0407E1
cs_ea2_imon=1.56005E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84251E1
cs_ef1a_imon=3.02069E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.01485E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11523E1
os_restr1_imon=2.88484E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=1.8796E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63236E1
os_ef1bup_imon=3.06897E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26067E0
cs_ionrep_imon=1.26878E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93376E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=3.29203E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=7.45249E-10
tplens_vset=1.4E-1
tplens_vmon=1.59613E0
tplens_imon=-3.10841E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.49246E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26461E1
iondef2_imon=1.60082E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98607E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.97253E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25332E0
ionrepsh_imon=2.00558E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33744E1
lens5b_imon=2.19143E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74957E1
cs_ef2b_imon=3.14607E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61008E-1
os_ea2_imon=-4.46741E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71027E1
cs_ef2a_imon=3.18649E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59848E0
os_ef2alow_imon=-2.6342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5085E-1
os_ef2bup_imon=-5.08184E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10924E1
os_restr2_imon=2.89457E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.32352E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02077E1
cs_anode2_imon=2.28528E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73234E1
iondef1_imon=1.09835E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.07979E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91534E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=3.86059E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07712E0
cs_ionaccel_imon=-1.86322E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5623E1
einzel_imon=7.74398E-6
window_vset=0.0E0
window_vmon=2.27577E-1
window_imon=-1.096E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39346E-4
mask2_vset=0.0E0
mask2_vmon=-1.86693E1
mask2_imon=-4.70985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.82846E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=7.10122E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.28486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5108E0
defgridb_imon=6.24174E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33946E1
os_fil1_imon=4.99107E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7793E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=1.00804E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6274E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66798E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38398E-2
os_fil2_imon=-2.23834E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.86711E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87275E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29786E-1
cs_fil2_imon=-1.94517E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52295E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22468E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8184E-1
res40_imon=-2.38719E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=134
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3476E4	1.0E1	1.47E2	4.1E1	-7.37103E-2	-8.80018E1	-3.33786E-4	-8.80004E1	2.38419E-4	5.26905E-3	9.32455E-2	2.729E1	-3.26509E1	-3.26144E1	2.68238E1	1.73605E-7	2.50705E-3	2.50705E-3	6.3245E-3	1.98984E-1
2.0E0	6.047E3	6.0E0	3.16E2	1.6E2	-7.32464E-2	-8.8002E1	-2.6226E-4	-8.80003E1	4.29153E-4	5.03063E-3	9.3174E-2	2.72859E1	-3.26218E1	-3.26266E1	2.6792E1	1.7375E-7	2.51077E-3	2.51077E-3	6.32858E-3	1.98894E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80021E1	-2.86102E-4	-8.80005E1	1.19209E-4	5.31673E-3	9.30548E-2	2.72727E1	-3.2675E1	-3.26172E1	2.6825E1	1.7368E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.9963E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.8002E1	-3.33786E-4	-8.80002E1	1.66893E-4	5.34058E-3	9.31025E-2	2.72913E1	-3.26639E1	-3.26308E1	2.67839E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80018E1	-5.48363E-4	-8.80004E1	1.90735E-4	5.14984E-3	9.29594E-2	2.72883E1	-3.26422E1	-3.26386E1	2.67746E1	1.7368E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80024E1	-4.76837E-5	-8.80005E1	4.05312E-4	5.26905E-3	9.32217E-2	2.72889E1	-3.26885E1	-3.26212E1	2.68088E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80018E1	-2.38419E-5	-8.80003E1	1.90735E-4	5.24521E-3	9.30071E-2	2.73039E1	-3.26404E1	-3.2614E1	2.6783E1	1.7368E-7	2.50462E-3	2.50462E-3	6.3074E-3	1.99977E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80019E1	-3.57628E-4	-8.80003E1	2.14577E-4	5.24521E-3	9.30309E-2	2.73027E1	-3.2639E1	-3.26372E1	2.67746E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99977E-1
1.2E1	3.45E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.8002E1	-3.8147E-4	-8.80002E1	5.48363E-4	5.00679E-3	9.34362E-2	2.73051E1	-3.27104E1	-3.26077E1	2.68112E1	1.73679E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.00876E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80019E1	-3.8147E-4	-8.80001E1	3.09944E-4	4.72069E-3	9.33647E-2	2.72967E1	-3.26783E1	-3.26218E1	2.6836E1	1.73605E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.00021E-1
1.4E1	7.44E2	2.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80019E1	-2.38419E-4	-8.79999E1	2.38419E-5	4.76837E-3	9.31263E-2	2.73159E1	-3.26849E1	-3.26573E1	2.67932E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00325E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80019E1	-5.48363E-4	-8.8E1	1.66893E-4	5.34058E-3	9.32217E-2	2.73225E1	-3.26476E1	-3.26368E1	2.68221E1	1.73605E-7	2.51007E-3	2.51007E-3	6.32936E-3	2.00499E-1
1.6E1	3.306E3	3.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80018E1	-6.91414E-4	-8.80001E1	3.09944E-4	5.57899E-3	9.30548E-2	2.72973E1	-3.26807E1	-3.25942E1	2.68022E1	1.7368E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.99456E-1
1.7E1	4.0059E4	2.0E1	6.87E2	4.7E2	-7.23964E-2	-8.80019E1	-2.38419E-4	-8.80002E1	3.57628E-4	5.57899E-3	9.32455E-2	2.72829E1	-3.26506E1	-3.26753E1	2.67963E1	1.7368E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99456E-1
1.8E1	1.79908E5	1.32E2	7.27E2	5.0E2	-7.23964E-2	-8.80019E1	-5.24521E-4	-8.80004E1	5.72205E-4	5.34058E-3	9.33886E-2	2.71339E1	-3.25491E1	-3.27978E1	2.67833E1	1.73755E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98592E-1
1.9E1	2.342E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80019E1	-4.05312E-4	-8.80007E1	3.09944E-4	5.34058E-3	9.32455E-2	2.72827E1	-3.26697E1	-3.26006E1	2.67746E1	1.7368E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.9963E-1
2.0E1	3.85E2	1.0E0	8.08E2	5.58E2	-7.23964E-2	-8.80018E1	-8.10623E-4	-8.80004E1	2.6226E-4	5.48363E-3	9.33409E-2	2.73442E1	-3.26669E1	-3.2623E1	2.67968E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98491E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80019E1	-8.58307E-4	-8.80006E1	2.38419E-4	5.67436E-3	9.34601E-2	2.7311E1	-3.26579E1	-3.26614E1	2.68154E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
2.2E1	6.1E1	2.0E0	8.89E2	6.17E2	-7.34782E-2	-8.8002E1	-5.96046E-4	-8.80005E1	1.90735E-4	5.45979E-3	9.34124E-2	2.73502E1	-3.265E1	-3.26038E1	2.67949E1	1.73679E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.9951E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80019E1	-6.19888E-4	-8.8E1	3.09944E-4	5.76973E-3	9.33886E-2	2.73234E1	-3.26461E1	-3.26425E1	2.67812E1	1.7368E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99977E-1