[Scan]
initial_time=2016-02-16T01:58:33
final_time=2016-02-16T01:58:53
ip_count=19
run=1030
dataset=5
scan=400
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.77921E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.06954E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=3.94714E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.67743E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.0924E-10
mult1=-1.12093E-8
mult2=-2.81642E-9
rf_tmon=-4.25407E-3
rf_agc=3.30452E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.9494E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.83349E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.97483E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53783E1
cs_ef1b_imon=3.07149E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.0239E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.18189E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03832E0
lens1_imon=1.57346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64915E1
os_ef1alow_imon=2.98043E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.57736E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84157E1
cs_ef1a_imon=3.01554E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=3.32201E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=2.89147E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=1.91643E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63705E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22083E0
cs_ionrep_imon=1.27261E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01612E1
cs_anode1_imon=3.26958E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.11393E-10
tplens_vset=1.4E-1
tplens_vmon=1.62315E0
tplens_imon=-5.82074E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.52285E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.5809E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.83627E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=1.99678E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.19569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74351E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64013E-1
os_ea2_imon=-3.23663E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62392E0
os_ef2alow_imon=-2.70317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49736E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=2.86158E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.3322E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.27253E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.1229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67693E1
iondef4_imon=1.10415E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.82747E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=3.49545E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10871E0
cs_ionaccel_imon=-2.11585E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56104E1
einzel_imon=7.8616E-6
window_vset=0.0E0
window_vmon=1.75983E-1
window_imon=-1.04547E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82596E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86414E1
mask2_imon=-4.61629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.6931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.74454E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.51613E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33944E1
os_fil1_imon=5.18489E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.02301E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66424E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=1.00848E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62725E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6684E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40787E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.42354E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79768E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2703E-1
cs_fil2_imon=-1.8525E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19993E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22545E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98013E-1
res40_imon=-2.58848E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3541E4	1.7E1	1.47E2	4.1E1	-7.19325E-2	-8.80018E1	-2.86102E-4	-8.8E1	1.90735E-4	5.43594E-3	9.31978E-2	2.73092E1	-3.26655E1	-3.26343E1	2.67619E1	1.73677E-7	2.51498E-3	2.51498E-3	6.30212E-3	1.99227E-1
2.0E0	5.987E3	5.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80017E1	-4.76837E-5	-8.80001E1	9.53674E-5	5.43594E-3	9.3317E-2	2.73448E1	-3.26464E1	-3.2635E1	2.67836E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9985E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80019E1	1.43051E-4	-8.79999E1	2.38419E-4	5.43594E-3	9.29832E-2	2.73141E1	-3.26645E1	-3.262E1	2.6804E1	1.73681E-7	2.51248E-3	2.51248E-3	6.32418E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80021E1	-2.38419E-4	-8.80002E1	1.66893E-4	5.72205E-3	9.30071E-2	2.72992E1	-3.2639E1	-3.26543E1	2.67878E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80019E1	-5.24521E-4	-8.8E1	-2.38419E-5	5.17368E-3	9.30548E-2	2.72903E1	-3.26874E1	-3.26201E1	2.68036E1	1.73753E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80018E1	-4.05312E-4	-8.80004E1	7.15256E-5	5.126E-3	9.32932E-2	2.73129E1	-3.26518E1	-3.25912E1	2.67848E1	1.73827E-7	2.51417E-3	2.51417E-3	6.33436E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80018E1	-1.14441E-3	-8.80002E1	1.43051E-4	5.22137E-3	9.31978E-2	2.72751E1	-3.26723E1	-3.25809E1	2.68088E1	1.7368E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.8002E1	-5.24521E-4	-8.80002E1	4.29153E-4	5.31673E-3	9.30786E-2	2.73009E1	-3.26849E1	-3.25785E1	2.67908E1	1.73679E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9883E-1
1.2E1	3.21E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80019E1	-6.67572E-4	-8.8E1	3.57628E-4	5.31673E-3	9.3174E-2	2.73243E1	-3.26543E1	-3.26326E1	2.67872E1	1.73758E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.99754E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80018E1	-8.58307E-4	-8.80001E1	1.43051E-4	5.00679E-3	9.31978E-2	2.72809E1	-3.2626E1	-3.26484E1	2.67636E1	1.73679E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00192E-1
1.4E1	6.92E2	1.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80018E1	-3.57628E-4	-8.80003E1	4.29153E-4	4.8399E-3	9.3317E-2	2.73326E1	-3.26933E1	-3.25972E1	2.67801E1	1.73605E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.99803E-1
1.5E1	5.2E1	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.80015E1	-2.14577E-4	-8.80005E1	1.66893E-4	5.126E-3	9.33886E-2	2.73099E1	-3.26627E1	-3.26188E1	2.67974E1	1.73605E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99931E-1
1.6E1	3.211E3	1.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80015E1	-6.19888E-4	-8.80003E1	4.76837E-4	5.34058E-3	9.34362E-2	2.72775E1	-3.2644E1	-3.26074E1	2.67962E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9985E-1
1.7E1	4.0504E4	1.7E1	6.87E2	4.7E2	-7.25507E-2	-8.80017E1	-6.67572E-4	-8.80002E1	4.52995E-4	5.38826E-3	9.35555E-2	2.72973E1	-3.26603E1	-3.26585E1	2.68034E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00151E-1
1.8E1	1.80159E5	1.05E2	7.27E2	5.0E2	-7.24736E-2	-8.80017E1	-6.4373E-4	-8.80006E1	5.48363E-4	5.4121E-3	9.31263E-2	2.71501E1	-3.25617E1	-3.26651E1	2.67884E1	1.73605E-7	2.52428E-3	2.52428E-3	6.28552E-3	1.99977E-1
1.9E1	2.326E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80017E1	-3.09944E-4	-8.80004E1	4.76837E-4	5.43594E-3	9.33647E-2	2.72921E1	-3.2698E1	-3.26195E1	2.681E1	1.73755E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98937E-1
2.0E1	3.5E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80019E1	-4.29153E-4	-8.80001E1	5.00679E-4	5.45979E-3	9.33409E-2	2.73357E1	-3.2641E1	-3.26086E1	2.67949E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.9911E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80025E1	-2.38419E-5	-8.80002E1	4.52995E-4	5.29289E-3	9.32217E-2	2.73057E1	-3.26172E1	-3.26319E1	2.67698E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9934E-1
2.2E1	5.7E1	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80018E1	-4.76837E-5	-8.80003E1	3.33786E-4	5.38826E-3	9.31978E-2	2.73216E1	-3.26667E1	-3.26384E1	2.67716E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99456E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.8002E1	-5.00679E-4	-8.80004E1	2.6226E-4	5.48363E-3	9.3174E-2	2.73111E1	-3.26518E1	-3.26446E1	2.67693E1	1.73679E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.00021E-1