[Scan]
initial_time=2016-02-16T01:59:00
final_time=2016-02-16T01:59:22
ip_count=19
run=1030
dataset=5
scan=401
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.13915E-2
qbias_imon=-3.80237E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.53894E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.92699E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.62401E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=8.20422E-10
mult1=-9.52366E-9
mult2=-2.79446E-9
rf_tmon=-4.21201E-3
rf_agc=3.31533E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.0226E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63009E0
bslens_imon=2.46926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=2.01227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.06956E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02359E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=2.19504E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03535E0
lens1_imon=1.61488E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=3.00252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.57571E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=3.00324E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.75271E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=2.89548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=1.90016E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.10235E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22806E0
cs_ionrep_imon=1.27434E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01563E1
cs_anode1_imon=3.25192E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.16448E-10
tplens_vset=1.4E-1
tplens_vmon=1.58496E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98854E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.00233E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26051E0
ionrepsh_imon=2.00398E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.58333E-1
os_ea2_imon=-3.71445E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.20507E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63179E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6619E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=2.87422E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.29326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.10454E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89569E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=3.829E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.85506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=6.94301E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60909E0
defgridb_imon=6.39866E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33934E1
os_fil1_imon=4.98645E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.92969E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66513E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=1.00745E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63393E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70047E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22591E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.63206E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3204E4	1.0E1	1.47E2	4.1E1	-7.29374E-2	-8.80018E1	-1.90735E-4	-8.80003E1	5.00679E-4	5.45979E-3	9.32693E-2	2.7308E1	-3.26573E1	-3.26065E1	2.68064E1	1.73605E-7	2.52169E-3	2.52169E-3	6.29128E-3	1.98322E-1
2.0E0	5.929E3	4.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80017E1	-2.38419E-4	-8.8E1	3.8147E-4	5.38826E-3	9.32217E-2	2.73137E1	-3.26187E1	-3.26468E1	2.67704E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.99803E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80014E1	-2.6226E-4	-8.80003E1	5.48363E-4	5.45979E-3	9.34124E-2	2.72819E1	-3.27077E1	-3.25953E1	2.67944E1	1.73755E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80018E1	-4.29153E-4	-8.80003E1	4.05312E-4	5.24521E-3	9.29832E-2	2.73231E1	-3.26356E1	-3.26236E1	2.67656E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9985E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.8002E1	-8.10623E-4	-8.80002E1	3.09944E-4	5.62668E-3	9.34124E-2	2.73015E1	-3.26831E1	-3.26032E1	2.67722E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8002E1	-5.00679E-4	-8.80001E1	1.43051E-4	5.14984E-3	9.31501E-2	2.72865E1	-3.26236E1	-3.26506E1	2.68076E1	1.73605E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80018E1	-4.76837E-5	-8.80001E1	1.66893E-4	4.93526E-3	9.32932E-2	2.72949E1	-3.26759E1	-3.26182E1	2.68018E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.8002E1	-2.14577E-4	-8.80003E1	2.38419E-4	4.93526E-3	9.33409E-2	2.73009E1	-3.26056E1	-3.25906E1	2.6813E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31014E-3	2.00412E-1
1.2E1	3.38E2	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80018E1	-2.6226E-4	-8.80004E1	1.90735E-4	4.62532E-3	9.29832E-2	2.73033E1	-3.26416E1	-3.26302E1	2.68045E1					
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80016E1	-6.67572E-4	-8.80004E1	1.19209E-4	5.03063E-3	9.31501E-2	2.72853E1	-3.26621E1	-3.26254E1	2.68424E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99803E-1
1.4E1	7.67E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80018E1	-9.53674E-5	-8.80007E1	9.53674E-5	4.98295E-3	9.33409E-2	2.72919E1	-3.26512E1	-3.26344E1	2.67878E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9883E-1
1.5E1	9.6E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80019E1	-1.90735E-4	-8.80003E1	3.8147E-4	4.79221E-3	9.30548E-2	2.73205E1	-3.26596E1	-3.2655E1	2.67856E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9963E-1
1.6E1	3.151E3	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.8002E1	-9.53674E-5	-8.80002E1	1.90735E-4	4.95911E-3	9.30786E-2	2.73013E1	-3.26877E1	-3.26012E1	2.67868E1	1.73605E-7	2.51182E-3	2.51182E-3	6.32858E-3	1.98561E-1
1.7E1	4.035E4	1.5E1	6.87E2	4.7E2	-7.22418E-2	-8.80018E1	-5.96046E-4	-8.80003E1	2.38419E-4	5.19753E-3	9.3174E-2	2.73009E1	-3.26627E1	-3.25978E1	2.67908E1	1.73684E-7	2.51642E-3	2.51642E-3	6.32483E-3	1.991E-1
1.8E1	1.80936E5	1.11E2	7.27E2	5.0E2	-7.26282E-2	-8.80016E1	-5.72205E-4	-8.80003E1	5.00679E-4	4.95911E-3	9.30548E-2	2.73592E1	-3.26494E1	-3.25197E1	2.6786E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.98764E-1
1.9E1	2.348E3	4.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80018E1	-4.76837E-4	-8.80003E1	2.14577E-4	5.126E-3	9.31025E-2	2.73125E1	-3.2687E1	-3.25905E1	2.67893E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
2.0E1	3.76E2	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80019E1	-5.72205E-4	-8.80003E1	2.38419E-4	5.43594E-3	9.31263E-2	2.72648E1	-3.26573E1	-3.2641E1	2.67812E1	1.7366E-7	2.51777E-3	2.51777E-3	6.29941E-3	1.99241E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80021E1	-1.66893E-4	-8.8E1	2.38419E-4	5.17368E-3	9.3174E-2	2.73558E1	-3.2606E1	-3.2682E1	2.67986E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99977E-1
2.2E1	5.1E1	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80019E1	-5.48363E-4	-8.8E1	2.38419E-4	4.98295E-3	9.34362E-2	2.73045E1	-3.26596E1	-3.26408E1	2.67955E1	1.73605E-7	2.51393E-3	2.51393E-3	6.32858E-3	1.99394E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.13915E-2	-8.80017E1	-7.15256E-5	-8.79999E1	4.29153E-4	5.126E-3	9.31978E-2	2.73381E1	-3.265E1	-3.26536E1	2.68238E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9963E-1