[Scan]
initial_time=2016-02-16T01:59:31
final_time=2016-02-16T01:59:53
ip_count=19
run=1030
dataset=5
scan=402
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.79973E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.85127E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=3.59154E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.67388E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=7.76732E-10
mult1=-9.83036E-9
mult2=-2.68602E-9
rf_tmon=-4.05525E-3
rf_agc=3.466E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=4.12428E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6518E0
bslens_imon=2.71543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=2.00339E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.0518E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.06775E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02017E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.20153E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02149E0
lens1_imon=1.32147E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04154E1
cs_ea2_imon=1.57338E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=3.02018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.75164E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=2.86918E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15369E1
os_ea1_imon=1.87164E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20865E0
cs_ionrep_imon=1.28173E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93257E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01449E1
cs_anode1_imon=3.28363E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=7.23314E-10
tplens_vset=1.4E-1
tplens_vmon=1.6565E0
tplens_imon=-4.46818E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.49065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26797E1
iondef2_imon=1.5998E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.94523E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24457E0
ionrepsh_imon=2.03398E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33762E1
lens5b_imon=2.20084E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.70649E-1
os_ea2_imon=-2.88016E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00821E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.20074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.636E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10691E1
os_restr2_imon=2.86809E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29998E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.28317E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73163E1
iondef1_imon=1.12565E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.1126E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.89302E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.56185E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07668E0
cs_ionaccel_imon=-2.02124E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-3.38193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.92278E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.74782E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.01549E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65012E0
defgridb_imon=6.35849E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33927E1
os_fil1_imon=5.99556E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66622E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30825E1
cs_fil1_imon=1.00685E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63129E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66709E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24506E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80068E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22532E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=1.98075E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.61404E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3502E4	1.1E1	1.47E2	4.1E1	-7.23189E-2	-8.8002E1	-1.66893E-4	-8.80004E1	2.38419E-4	5.38826E-3	9.3174E-2	2.73081E1	-3.26458E1	-3.26549E1	2.67723E1	1.73605E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.97647E-1
2.0E0	6.204E3	6.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80021E1	-2.38419E-4	-8.80003E1	5.00679E-4	5.36442E-3	9.32455E-2	2.73339E1	-3.26687E1	-3.26236E1	2.68338E1	1.73679E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.99E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.8002E1	-6.67572E-4	-8.80002E1	3.57628E-4	5.00679E-3	9.33409E-2	2.72426E1	-3.26753E1	-3.26783E1	2.68215E1	1.73758E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.98344E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.8002E1	-4.05312E-4	-8.80003E1	4.76837E-4	5.45979E-3	9.3317E-2	2.73016E1	-3.26413E1	-3.26095E1	2.68118E1	1.73901E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80023E1	-4.76837E-5	-8.80006E1	5.24521E-4	5.60284E-3	9.34362E-2	2.72594E1	-3.26909E1	-3.26296E1	2.67848E1	1.73679E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00876E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80023E1	-3.57628E-4	-8.80007E1	3.33786E-4	5.72205E-3	9.34362E-2	2.72811E1	-3.26981E1	-3.26338E1	2.68292E1	1.73758E-7	2.52362E-3	2.52362E-3	6.31858E-3	1.99931E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80018E1	-5.00679E-4	-8.80004E1	1.90735E-4	5.26905E-3	9.33647E-2	2.73086E1	-3.26732E1	-3.25965E1	2.68268E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31278E-3	2.00021E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80019E1	-2.86102E-4	-8.80006E1	2.86102E-4	5.26905E-3	9.34124E-2	2.73261E1	-3.26765E1	-3.26464E1	2.68244E1	1.73755E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00151E-1
1.2E1	3.5E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80019E1	-3.09944E-4	-8.80002E1	1.90735E-4	5.50747E-3	9.34362E-2	2.72654E1	-3.26717E1	-3.25936E1	2.67781E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00499E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80018E1	-3.09944E-4	-8.80001E1	4.05312E-4	5.29289E-3	9.30548E-2	2.73033E1	-3.26873E1	-3.26813E1	2.6831E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00673E-1
1.4E1	7.55E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80019E1	-3.8147E-4	-8.79998E1	4.76837E-4	5.43594E-3	9.34839E-2	2.73027E1	-3.26488E1	-3.26272E1	2.6804E1	1.73605E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00192E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80017E1	-2.38419E-4	-8.80001E1	1.90735E-4	5.22137E-3	9.3317E-2	2.7291E1	-3.26872E1	-3.25997E1	2.68063E1	1.73681E-7	2.51693E-3	2.51693E-3	6.33538E-3	2.0064E-1
1.6E1	3.224E3	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80016E1	-3.57628E-4	-8.79999E1	-2.38419E-5	5.34058E-3	9.31978E-2	2.73057E1	-3.26855E1	-3.26134E1	2.67758E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99977E-1
1.7E1	4.0839E4	1.5E1	6.87E2	4.7E2	-7.31692E-2	-8.80017E1	-1.43051E-4	-8.80001E1	2.86102E-4	4.93526E-3	9.3317E-2	2.73004E1	-3.26325E1	-3.26419E1	2.6804E1	1.7368E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00499E-1
1.8E1	1.80663E5	1.25E2	7.27E2	5.0E2	-7.29374E-2	-8.80019E1	-2.14577E-4	-8.80001E1	3.09944E-4	5.38826E-3	9.32217E-2	2.73243E1	-3.26158E1	-3.26452E1	2.68082E1	1.73755E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00151E-1
1.9E1	2.343E3	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80016E1	-5.96046E-4	-8.80002E1	4.29153E-4	5.38826E-3	9.34124E-2	2.73273E1	-3.26975E1	-3.2641E1	2.67807E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.01022E-1
2.0E1	3.31E2	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80016E1	-1.43051E-4	-8.80003E1	5.24521E-4	5.26905E-3	9.35078E-2	2.7265E1	-3.27086E1	-3.25965E1	2.68123E1	1.7368E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80018E1	-1.43051E-4	-8.80003E1	4.29153E-4	5.45979E-3	9.34839E-2	2.73461E1	-3.26793E1	-3.26376E1	2.68154E1	1.73605E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.00363E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.8002E1	4.76837E-5	-8.80003E1	1.90735E-4	5.03063E-3	9.3174E-2	2.72672E1	-3.27155E1	-3.2632E1	2.67836E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99456E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80019E1	-3.8147E-4	-8.8E1	9.53674E-5	5.36442E-3	9.34839E-2	2.73163E1	-3.26797E1	-3.26319E1	2.67926E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98075E-1