[Scan]
initial_time=2016-02-16T02:00:31
final_time=2016-02-16T02:00:53
ip_count=19
run=1030
dataset=5
scan=404
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.79293E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.74505E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=3.77774E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.66264E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=7.72917E-10
mult1=-9.57651E-9
mult2=-2.78576E-9
rf_tmon=-5.47039E-3
rf_agc=3.28518E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=3.86059E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=2.00279E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.04774E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53401E1
cs_ef1b_imon=3.07183E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02613E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05136E1
cs_ea1_imon=2.16419E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98877E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64933E1
os_ef1alow_imon=2.99364E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04186E1
cs_ea2_imon=1.57311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84157E1
cs_ef1a_imon=3.02214E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.90768E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11077E1
os_restr1_imon=2.89842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14657E1
os_ea1_imon=1.88741E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63386E1
os_ef1bup_imon=3.10172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2751E0
cs_ionrep_imon=1.26589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91821E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=3.27514E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=7.10285E-10
tplens_vset=1.4E-1
tplens_vmon=1.69039E0
tplens_imon=-1.0422E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26489E1
iondef3_imon=1.51577E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26342E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.92544E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=2.02049E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33457E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74391E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.10615E-1
os_ea2_imon=-1.50232E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71686E1
cs_ef2a_imon=3.2164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61639E0
os_ef2alow_imon=-2.60238E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3931E-1
os_ef2bup_imon=-5.1845E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=2.87618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.33184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.27565E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.0819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.89409E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=3.45397E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-1.78222E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.89983E-6
window_vset=0.0E0
window_vmon=2.13052E-1
window_imon=-8.54332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.85782E1
mask2_imon=-5.62411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.25067E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.28795E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.48427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.9607E0
defgridb_imon=6.67021E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33927E1
os_fil1_imon=5.16751E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.57702E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66651E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=1.00835E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63177E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67005E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.28691E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.21909E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-1.77141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40844E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.00996E-1
chamber_ion_pmon=1.73681E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.87791E-1
res40_imon=-2.5155E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3246E4	1.4E1	1.47E2	4.1E1	-7.23964E-2	-8.80021E1	-2.14577E-4	-8.79999E1	2.86102E-4	5.50747E-3	9.31501E-2	2.73193E1	-3.27228E1	-3.25717E1	2.67782E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9934E-1
2.0E0	6.284E3	5.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80022E1	-1.43051E-4	-8.8E1	2.38419E-4	5.126E-3	9.35078E-2	2.73553E1	-3.26554E1	-3.26334E1	2.6801E1	1.73679E-7	2.52815E-3	2.52815E-3	6.34518E-3	1.98322E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80017E1	-6.67572E-4	-8.80002E1	1.90735E-4	5.17368E-3	9.36747E-2	2.73051E1	-3.26667E1	-3.26048E1	2.68328E1	1.73605E-7	2.5147E-3	2.5147E-3	6.29624E-3	1.97119E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80019E1	-5.00679E-4	-8.79998E1	4.52995E-4	5.07832E-3	9.35555E-2	2.72697E1	-3.26744E1	-3.26101E1	2.67964E1	1.73679E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80019E1	-2.6226E-4	-8.80001E1	3.57628E-4	5.4121E-3	9.3627E-2	2.73099E1	-3.2623E1	-3.26194E1	2.67672E1	1.7368E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80017E1	-6.91414E-4	-8.8E1	1.43051E-4	5.03063E-3	9.34362E-2	2.73008E1	-3.26064E1	-3.26689E1	2.68611E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80016E1	-5.24521E-4	-8.80001E1	3.8147E-4	5.24521E-3	9.34124E-2	2.72803E1	-3.26661E1	-3.25995E1	2.67734E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99456E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80017E1	-4.05312E-4	-8.80001E1	2.86102E-4	4.79221E-3	9.37939E-2	2.73111E1	-3.26789E1	-3.26092E1	2.67962E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00192E-1
1.2E1	3.31E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80017E1	-4.29153E-4	-8.80002E1	4.05312E-4	4.81606E-3	9.35078E-2	2.73045E1	-3.26639E1	-3.26362E1	2.67968E1	1.7368E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.00151E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80019E1	-5.96046E-4	-8.80005E1	4.05312E-4	4.98295E-3	9.34362E-2	2.73057E1	-3.26933E1	-3.26014E1	2.67764E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99283E-1
1.4E1	7.16E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80022E1	-7.15256E-4	-8.80005E1	4.29153E-4	4.91142E-3	9.33409E-2	2.73417E1	-3.26981E1	-3.26254E1	2.68052E1	1.73605E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.97994E-1
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80024E1	-9.53674E-4	-8.80001E1	4.05312E-4	4.95911E-3	9.35078E-2	2.73135E1	-3.26747E1	-3.26554E1	2.68196E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.98491E-1
1.6E1	3.194E3	3.0E0	6.47E2	4.41E2	-7.37874E-2	-8.8002E1	-7.15256E-4	-8.80002E1	3.57628E-4	4.91142E-3	9.33409E-2	2.73351E1	-3.26579E1	-3.26284E1	2.6807E1	1.7368E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.97559E-1
1.7E1	4.0951E4	1.8E1	6.87E2	4.7E2	-7.44059E-2	-8.80021E1	-5.24521E-4	-8.80002E1	2.14577E-4	4.8399E-3	9.34124E-2	2.72919E1	-3.27131E1	-3.2605E1	2.67995E1	1.73755E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9911E-1
1.8E1	1.81191E5	8.6E1	7.27E2	5.0E2	-7.42513E-2	-8.8002E1	-4.29153E-4	-8.80003E1	1.04904E-3	5.07832E-3	9.32693E-2	2.72964E1	-3.26415E1	-3.26747E1	2.67806E1	1.73605E-7	2.51248E-3	2.51248E-3	6.34099E-3	1.98696E-1
1.9E1	2.418E3	2.0E0	7.68E2	5.29E2	-7.47149E-2	-8.80021E1	-6.19888E-4	-8.80003E1	1.66893E-4	5.34058E-3	9.32217E-2	2.73175E1	-3.26455E1	-3.2652E1	2.67806E1	1.73605E-7	2.51244E-3	2.51244E-3	6.3108E-3	2.00037E-1
2.0E1	3.82E2	1.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80019E1	-7.86781E-4	-8.80003E1	5.00679E-4	5.26905E-3	9.3317E-2	2.73281E1	-3.26767E1	-3.25924E1	2.68325E1	1.73679E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.01391E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80021E1	-1.09673E-3	-8.8E1	3.57628E-4	5.34058E-3	9.32217E-2	2.7285E1	-3.26484E1	-3.26425E1	2.67746E1	1.73679E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9985E-1
2.2E1	5.5E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80023E1	-7.39098E-4	-8.80001E1	6.67572E-4	5.6982E-3	9.30786E-2	2.72941E1	-3.26174E1	-3.26854E1	2.68142E1	1.73901E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00705E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80021E1	-4.76837E-4	-8.80002E1	2.38419E-4	5.88894E-3	9.33409E-2	2.73003E1	-3.26342E1	-3.26489E1	2.67968E1	1.73681E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.00996E-1