[Scan]
initial_time=2016-02-16T02:01:32
final_time=2016-02-16T02:01:54
ip_count=19
run=1030
dataset=5
scan=406
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.76989E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.27673E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=3.65078E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.69858E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.00121E-10
mult1=-1.13779E-8
mult2=-2.76652E-9
rf_tmon=-3.5511E-3
rf_agc=3.31053E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=4.01771E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.05553E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=3.04E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04565E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0487E1
cs_ea1_imon=2.20065E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02121E0
lens1_imon=1.56992E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6432E1
os_ef1alow_imon=3.01658E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.5547E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.90732E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=2.89765E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=1.90404E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.27155E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0232E1
cs_anode1_imon=3.27462E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.11882E-10
tplens_vset=1.4E-1
tplens_vmon=1.61371E0
tplens_imon=-5.07712E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.5186E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98643E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.93832E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23676E0
ionrepsh_imon=2.03748E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74369E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61064E-1
os_ea2_imon=-3.66136E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06152E2
lens4b_imon=2.00495E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71624E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59155E0
os_ef2alow_imon=-2.2519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10517E1
os_restr2_imon=2.90233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.32618E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.29074E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.08007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.12269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89199E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=3.42512E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-2.19784E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55847E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.44663E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92586E3
multa_neg_imon=7.84529E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.2259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6536E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33929E1
os_fil1_imon=4.89635E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80355E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66651E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=1.00852E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63123E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66951E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.23349E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-1.93917E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22581E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.2752E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16955E-1
res40_imon=-2.73843E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3101E4	1.7E1	1.47E2	4.1E1	-7.29374E-2	-8.80017E1	-3.09944E-4	-8.80001E1	1.43051E-4	5.14984E-3	9.32693E-2	2.7346E1	-3.26783E1	-3.2599E1	2.67896E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.99E-1
2.0E0	6.049E3	3.0E0	3.16E2	1.6E2	-7.30146E-2	-8.8002E1	-4.29153E-4	-8.8E1	4.29153E-4	5.50747E-3	9.35316E-2	2.72997E1	-3.26819E1	-3.26386E1	2.67872E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9963E-1
3.0E0	2.0E0	1.0E0	4.85E2	2.79E2	-7.23964E-2	-8.8002E1	-5.00679E-4	-8.8E1	4.52995E-4	5.36442E-3	9.32693E-2	2.73039E1	-3.26561E1	-3.26018E1	2.67613E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.9963E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80016E1	-3.8147E-4	-8.80002E1	6.19888E-4	5.55515E-3	9.34362E-2	2.73122E1	-3.26703E1	-3.26632E1	2.68148E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80013E1	-4.76837E-4	-8.80001E1	5.72205E-4	5.03063E-3	9.33409E-2	2.73357E1	-3.26645E1	-3.2614E1	2.678E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9968E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80016E1	-6.67572E-4	-8.80002E1	3.33786E-4	5.10216E-3	9.32932E-2	2.73003E1	-3.26675E1	-3.25659E1	2.67752E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80015E1	-2.86102E-4	-8.80001E1	3.8147E-4	5.05447E-3	9.32217E-2	2.72959E1	-3.26805E1	-3.2648E1	2.67824E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80015E1	-1.90735E-4	-8.80003E1	3.8147E-4	5.53131E-3	9.31978E-2	2.73075E1	-3.26661E1	-3.25936E1	2.68022E1	1.73605E-7	2.51915E-3	2.51915E-3	6.33538E-3	1.97994E-1
1.2E1	3.68E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80018E1	-1.19209E-4	-8.80001E1	1.90735E-4	5.43594E-3	9.32217E-2	2.72757E1	-3.26603E1	-3.26162E1	2.67511E1	1.73679E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9883E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80017E1	-3.57628E-4	-8.80002E1	4.52995E-4	5.17368E-3	9.30786E-2	2.73257E1	-3.27056E1	-3.25942E1	2.67451E1	1.73605E-7	2.50692E-3	2.50692E-3	6.32418E-3	1.99401E-1
1.4E1	7.43E2	1.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80017E1	-3.09944E-4	-8.80001E1	1.43051E-4	5.60284E-3	9.27925E-2	2.73075E1	-3.26549E1	-3.26236E1	2.68226E1	1.73753E-7	2.50989E-3	2.50989E-3	6.31817E-3	1.9917E-1
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80021E1	-2.14577E-4	-8.80001E1	0.0E0	5.55515E-3	9.30071E-2	2.72909E1	-3.26508E1	-3.26697E1	2.67872E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99456E-1
1.6E1	3.199E3	1.0E0	6.47E2	4.41E2	-7.23189E-2	-8.8002E1	-7.15256E-5	-8.80001E1	1.43051E-4	5.29289E-3	9.33409E-2	2.73099E1	-3.26224E1	-3.265E1	2.67535E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99803E-1
1.7E1	4.0851E4	2.5E1	6.87E2	4.7E2	-7.30146E-2	-8.80019E1	-2.86102E-4	-8.80001E1	5.24521E-4	5.67436E-3	9.3317E-2	2.73231E1	-3.26554E1	-3.26266E1	2.68157E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00847E-1
1.8E1	1.79502E5	9.3E1	7.27E2	5.0E2	-7.23189E-2	-8.8002E1	-1.43051E-4	-8.80004E1	1.43051E-4	5.65052E-3	9.33409E-2	2.73339E1	-3.27378E1	-3.262E1	2.68051E1	1.73753E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.00021E-1
1.9E1	2.326E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.8002E1	-1.90735E-4	-8.80003E1	2.38419E-5	5.88894E-3	9.30309E-2	2.72372E1	-3.26326E1	-3.26002E1	2.67792E1	1.73681E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.00463E-1
2.0E1	3.09E2	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80021E1	-2.6226E-4	-8.80003E1	2.14577E-4	5.79357E-3	9.33647E-2	2.7301E1	-3.26756E1	-3.26113E1	2.67716E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9951E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.8002E1	-2.6226E-4	-8.80005E1	1.43051E-4	5.36442E-3	9.31263E-2	2.7251E1	-3.26182E1	-3.26711E1	2.67836E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9951E-1
2.2E1	4.9E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80022E1	-4.29153E-4	-8.80004E1	6.4373E-4	5.14984E-3	9.29832E-2	2.72656E1	-3.2675E1	-3.26189E1	2.67804E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9963E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80021E1	-3.8147E-4	-8.8E1	2.38419E-4	5.50747E-3	9.30309E-2	2.72955E1	-3.26482E1	-3.26176E1	2.68064E1	1.73679E-7	2.51417E-3	2.51417E-3	6.2752E-3	1.9934E-1