[Scan]
initial_time=2016-02-16T02:02:02
final_time=2016-02-16T02:02:24
ip_count=19
run=1030
dataset=5
scan=407
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.78586E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.1419E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=3.83472E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.68638E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=8.16214E-10
mult1=-9.05013E-9
mult2=-2.74873E-9
rf_tmon=-3.26478E-3
rf_agc=3.44476E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.10295E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66789E0
bslens_imon=2.66059E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20056E1
lens5a_imon=1.99823E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.08397E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04884E1
cs_ea1_imon=2.1907E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04022E0
lens1_imon=1.6542E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03819E1
cs_ea2_imon=1.55931E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84827E1
cs_ef1a_imon=3.02775E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.89242E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11027E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15367E1
os_ea1_imon=1.87666E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24353E0
cs_ionrep_imon=1.24123E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93707E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.27606E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=7.08222E-10
tplens_vset=1.4E-1
tplens_vmon=1.6249E0
tplens_imon=-1.33303E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26313E1
iondef3_imon=1.49944E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.59494E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.09591E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27965E0
ionrepsh_imon=2.02541E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33731E1
lens5b_imon=2.20098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.14632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.82434E-1
os_ea2_imon=-4.76125E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62338E0
os_ef2alow_imon=-2.36362E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29549E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=2.87782E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.3283E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01605E1
cs_anode2_imon=2.29506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.10754E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67728E1
iondef4_imon=1.10972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.92757E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.6397E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.94012E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=8.90464E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.77799E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.50157E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65789E0
defgridb_imon=6.36295E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33937E1
os_fil1_imon=4.55398E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.91167E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66728E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=1.00805E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63867E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66922E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33141E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66919E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22581E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=1.97045E-1
chamber_ion_pmon=1.73755E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40102E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.81226E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3555E4	9.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80018E1	-2.38419E-4	-8.79999E1	9.53674E-5	5.36442E-3	9.32693E-2	2.73057E1	-3.26897E1	-3.25824E1	2.67723E1					
2.0E0	6.05E3	9.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80019E1	-2.38419E-4	-8.8E1	4.52995E-4	5.88894E-3	9.37462E-2	2.73021E1	-3.26651E1	-3.26236E1	2.67818E1	1.73605E-7	2.51417E-3	2.51417E-3	6.33977E-3	1.9951E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80019E1	-6.4373E-4	-8.79999E1	2.38419E-4	5.48363E-3	9.32693E-2	2.73033E1	-3.26561E1	-3.26338E1	2.68328E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.98937E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80019E1	-2.6226E-4	-8.79999E1	2.86102E-4	5.43594E-3	9.3317E-2	2.7321E1	-3.26779E1	-3.26325E1	2.67656E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99803E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80017E1	-2.6226E-4	-8.79999E1	3.8147E-4	5.6982E-3	9.33409E-2	2.72985E1	-3.26392E1	-3.26002E1	2.68232E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80017E1	-3.57628E-4	-8.80002E1	4.29153E-4	5.81741E-3	9.33409E-2	2.72943E1	-3.26332E1	-3.25924E1	2.68088E1	1.73758E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.98696E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80019E1	-4.76837E-5	-8.80003E1	2.14577E-4	5.26905E-3	9.32455E-2	2.73015E1	-3.26374E1	-3.26212E1	2.6828E1	1.73679E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00876E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.06958E-2	-8.80023E1	-1.90735E-4	-8.80002E1	3.57628E-4	5.74589E-3	9.32455E-2	2.72378E1	-3.2653E1	-3.2626E1	2.68172E1	1.73605E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.99456E-1
1.2E1	3.3E2	1.0E0	4.85E2	3.23E2	-7.07733E-2	-8.80021E1	-3.09944E-4	-8.80003E1	2.14577E-4	5.60284E-3	9.377E-2	2.73009E1	-3.26116E1	-3.26332E1	2.68016E1	1.7368E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00847E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.8002E1	-6.19888E-4	-8.80001E1	4.05312E-4	5.55515E-3	9.34839E-2	2.73147E1	-3.26452E1	-3.26272E1	2.6795E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00673E-1
1.4E1	7.69E2	2.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80022E1	-4.29153E-4	-8.80002E1	3.8147E-4	5.79357E-3	9.33647E-2	2.73267E1	-3.26416E1	-3.26194E1	2.67944E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.01022E-1
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80021E1	-3.09944E-4	-8.79999E1	4.52995E-4	5.65052E-3	9.37223E-2	2.72979E1	-3.26723E1	-3.26284E1	2.6774E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99977E-1
1.6E1	3.21E3	1.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80017E1	0.0E0	-8.79999E1	3.8147E-4	5.38826E-3	9.35316E-2	2.72862E1	-3.26791E1	-3.26284E1	2.67746E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99456E-1
1.7E1	4.0974E4	2.4E1	6.87E2	4.7E2	-7.38649E-2	-8.80021E1	-7.15256E-5	-8.80005E1	5.00679E-4	5.50747E-3	9.31263E-2	2.73333E1	-3.26464E1	-3.26278E1	2.67746E1	1.7368E-7	2.50898E-3	2.50898E-3	6.3074E-3	1.98592E-1
1.8E1	1.79737E5	1.08E2	7.27E2	5.0E2	-7.37103E-2	-8.80017E1	2.38419E-5	-8.80003E1	3.57628E-4	5.17368E-3	9.3174E-2	2.73556E1	-3.27366E1	-3.2599E1	2.67337E1	1.73753E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9883E-1
1.9E1	2.394E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80019E1	-3.57628E-4	-8.80002E1	6.19888E-4	5.24521E-3	9.31025E-2	2.72997E1	-3.26543E1	-3.26452E1	2.68124E1	1.7368E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.95171E-1
2.0E1	3.91E2	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80017E1	-4.76837E-4	-8.80001E1	8.58307E-4	5.38826E-3	9.31501E-2	2.72821E1	-3.26425E1	-3.26514E1	2.681E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.96021E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80016E1	-5.72205E-4	-8.80002E1	3.8147E-4	5.43594E-3	9.31501E-2	2.72597E1	-3.26632E1	-3.2606E1	2.67955E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.95801E-1
2.2E1	5.5E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80016E1	-4.29153E-4	-8.80002E1	4.76837E-4	5.03063E-3	9.30786E-2	2.72721E1	-3.26494E1	-3.26332E1	2.6819E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.95801E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80018E1	-7.39098E-4	-8.80002E1	5.00679E-4	4.95911E-3	9.30309E-2	2.7285E1	-3.26685E1	-3.26313E1	2.67728E1	1.73755E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.97045E-1