[Scan]
initial_time=2016-02-16T02:02:32
final_time=2016-02-16T02:02:54
ip_count=19
run=1030
dataset=5
scan=408
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.79407E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.9582E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=3.83711E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.70885E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=7.69663E-10
mult1=-1.14622E-8
mult2=-2.82041E-9
rf_tmon=-4.97506E-3
rf_agc=3.34417E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=3.72589E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61704E0
bslens_imon=2.59376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.97036E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05305E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53934E1
cs_ef1b_imon=3.07392E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02097E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04861E1
cs_ea1_imon=2.20709E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02149E0
lens1_imon=1.67952E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64591E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.56121E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83931E1
cs_ef1a_imon=3.03117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.92604E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=2.88104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15062E1
os_ea1_imon=1.88728E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.10832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24746E0
cs_ionrep_imon=1.27304E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=3.28104E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.59971E-10
tplens_vset=1.4E-1
tplens_vmon=1.58871E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.47987E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.60119E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.97754E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32104E0
ionrepsh_imon=1.98948E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18067E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74148E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.89189E-1
os_ea2_imon=-6.46065E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71466E1
cs_ef2a_imon=3.20633E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63435E0
os_ef2alow_imon=-2.7553E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43944E-1
os_ef2bup_imon=-5.19145E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.84838E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31597E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.30728E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73087E1
iondef1_imon=1.11487E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.87688E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=3.00694E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.87258E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47171E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56017E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=1.52235E-1
window_imon=-8.23055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82569E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86269E1
mask2_imon=-6.00639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.1754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.70958E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.06416E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51961E0
defgridb_imon=6.46277E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3391E1
os_fil1_imon=5.28914E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64073E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66663E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=1.00848E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6265E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67019E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2575E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.87156E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64905E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.44909E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22385E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.8084E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3481E4	1.4E1	1.47E2	4.1E1	-7.29374E-2	-8.80024E1	-1.66893E-4	-8.80006E1	1.43051E-4	5.22137E-3	9.3317E-2	2.72921E1	-3.26502E1	-3.25883E1	2.67856E1	1.73605E-7	2.50972E-3	2.50972E-3	6.32858E-3	1.99562E-1
2.0E0	6.087E3	6.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80022E1	-1.43051E-4	-8.80002E1	3.57628E-4	5.29289E-3	9.33409E-2	2.73173E1	-3.26713E1	-3.26376E1	2.68007E1	1.73679E-7	2.52384E-3	2.52384E-3	6.30202E-3	1.9985E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80024E1	2.38419E-5	-8.80002E1	4.05312E-4	5.45979E-3	9.33886E-2	2.7337E1	-3.26455E1	-3.26124E1	2.68134E1	1.7368E-7	2.51662E-3	2.51662E-3	6.33762E-3	1.99543E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80025E1	-1.90735E-4	-8.80003E1	5.00679E-4	5.34058E-3	9.3317E-2	2.73105E1	-3.26711E1	-3.26284E1	2.67932E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80023E1	-5.96046E-4	-8.80001E1	5.00679E-4	5.48363E-3	9.31978E-2	2.73027E1	-3.2645E1	-3.26346E1	2.67908E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80024E1	-2.38419E-5	-8.80001E1	2.38419E-4	5.65052E-3	9.34362E-2	2.72889E1	-3.26512E1	-3.26464E1	2.68052E1	1.73681E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99048E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80022E1	-2.6226E-4	-8.80003E1	1.43051E-4	5.88894E-3	9.34124E-2	2.73411E1	-3.2675E1	-3.26349E1	2.68041E1	1.7368E-7	2.51116E-3	2.51116E-3	6.34037E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80023E1	-5.96046E-4	-8.8E1	4.76837E-5	5.76973E-3	9.32217E-2	2.72943E1	-3.26867E1	-3.26092E1	2.68184E1	1.73605E-7	2.50668E-3	2.50668E-3	6.32896E-3	1.9934E-1
1.2E1	3.43E2	1.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80023E1	-3.57628E-4	-8.80002E1	2.6226E-4	5.91278E-3	9.33647E-2	2.72962E1	-3.26626E1	-3.2629E1	2.68448E1	1.7368E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.99283E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80024E1	-4.29153E-4	-8.8E1	5.72205E-4	5.79357E-3	9.32217E-2	2.73021E1	-3.26296E1	-3.25954E1	2.6807E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.99E-1
1.4E1	7.96E2	3.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80023E1	-7.86781E-4	-8.80001E1	4.76837E-4	5.38826E-3	9.32217E-2	2.72642E1	-3.2647E1	-3.26615E1	2.67728E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.98764E-1
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80023E1	-1.66893E-4	-8.8E1	4.05312E-4	5.38826E-3	9.30309E-2	2.7288E1	-3.26608E1	-3.26052E1	2.67987E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9963E-1
1.6E1	3.137E3	3.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80021E1	-4.05312E-4	-8.8E1	1.66893E-4	5.38826E-3	9.31263E-2	2.72967E1	-3.26536E1	-3.26434E1	2.6829E1	1.73605E-7	2.51017E-3	2.51017E-3	6.30117E-3	1.9925E-1
1.7E1	4.0437E4	1.9E1	6.87E2	4.7E2	-7.19325E-2	-8.80023E1	-3.57628E-4	-8.79999E1	6.19888E-4	5.34058E-3	9.32217E-2	2.72698E1	-3.26295E1	-3.26515E1	2.67999E1	1.73642E-7	2.51701E-3	2.51701E-3	6.31555E-3	1.98712E-1
1.8E1	1.79002E5	1.07E2	7.27E2	5.0E2	-7.20871E-2	-8.80023E1	-5.96046E-4	-8.79999E1	3.57628E-4	5.31673E-3	9.33647E-2	2.73207E1	-3.26322E1	-3.26322E1	2.67649E1					
1.9E1	2.463E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.8002E1	-5.72205E-4	-8.79999E1	2.38419E-5	5.07832E-3	9.33647E-2	2.72937E1	-3.26603E1	-3.26404E1	2.6789E1	1.73605E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.99577E-1
2.0E1	3.29E2	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80023E1	-3.8147E-4	-8.80003E1	5.00679E-4	5.31673E-3	9.34124E-2	2.73063E1	-3.26467E1	-3.26384E1	2.67854E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98592E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.8002E1	-6.67572E-4	-8.80002E1	2.38419E-4	5.29289E-3	9.34601E-2	2.73122E1	-3.26496E1	-3.26478E1	2.6781E1	1.73679E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9968E-1
2.2E1	4.4E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80023E1	-6.4373E-4	-8.80001E1	2.38419E-4	5.29289E-3	9.31978E-2	2.73216E1	-3.2639E1	-3.26236E1	2.67872E1	1.73605E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80022E1	-8.82149E-4	-8.8E1	3.57628E-4	5.50747E-3	9.32455E-2	2.73087E1	-3.26879E1	-3.26272E1	2.6795E1	1.73605E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.98661E-1