[Scan]
initial_time=2016-02-16T02:03:03
final_time=2016-02-16T02:03:25
ip_count=19
run=1030
dataset=5
scan=409
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.82574E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.68271E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=3.58176E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.6665E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=7.66575E-10
mult1=-9.37713E-9
mult2=-2.91717E-9
rf_tmon=-4.08085E-3
rf_agc=3.21102E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=3.84128E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19966E1
lens5a_imon=2.00032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=3.05514E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04548E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04935E1
cs_ea1_imon=2.19215E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01177E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.57169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84664E1
cs_ef1a_imon=3.01694E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.48759E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=2.89044E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=1.91325E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.27403E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01497E1
cs_anode1_imon=3.26273E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.01106E-10
tplens_vset=1.4E-1
tplens_vmon=1.60427E0
tplens_imon=-4.05103E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25985E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26456E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02964E2
lens6_imon=2.98633E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.7154E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=2.00244E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33734E1
lens5b_imon=2.22082E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29799E-1
os_ea2_imon=-4.33385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65462E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10661E1
os_restr2_imon=2.88107E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.28497E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72714E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68063E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.88214E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=3.17562E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47493E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.56922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.9746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.80636E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.37644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33927E1
os_fil1_imon=4.71616E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.12791E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66756E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=1.00974E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62846E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66716E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.48003E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26415E-1
cs_fil2_imon=-2.08933E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22563E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.12751E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.345E4	1.3E1	1.47E2	4.1E1	-7.25507E-2	-8.8002E1	-6.4373E-4	-8.80002E1	2.38419E-4	5.93662E-3	9.32455E-2	2.72877E1	-3.26561E1	-3.26393E1	2.67839E1	1.73901E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00192E-1
2.0E0	6.048E3	4.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80021E1	-8.82149E-4	-8.80002E1	2.86102E-4	5.65052E-3	9.32217E-2	2.73207E1	-3.27152E1	-3.26741E1	2.67814E1	1.73677E-7	2.51287E-3	2.51287E-3	6.31798E-3	1.99896E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80018E1	-8.10623E-4	-8.80001E1	2.14577E-4	5.60284E-3	9.34839E-2	2.73231E1	-3.26503E1	-3.26306E1	2.67943E1	1.73683E-7	2.51725E-3	2.51725E-3	6.3074E-3	1.99343E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80018E1	-7.39098E-4	-8.79998E1	4.52995E-4	5.29289E-3	9.33886E-2	2.72968E1	-3.26744E1	-3.26018E1	2.67955E1	1.73605E-7	2.52659E-3	2.52659E-3	6.29684E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80025E1	-4.29153E-4	-8.79999E1	2.86102E-4	5.67436E-3	9.3627E-2	2.72913E1	-3.2653E1	-3.2644E1	2.68112E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80022E1	-4.29153E-4	-8.8E1	3.09944E-4	5.67436E-3	9.32455E-2	2.72847E1	-3.26488E1	-3.2602E1	2.6804E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80023E1	-5.48363E-4	-8.80002E1	2.38419E-4	5.45979E-3	9.34601E-2	2.72961E1	-3.26404E1	-3.26164E1	2.6798E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.99456E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80023E1	-4.05312E-4	-8.80002E1	6.4373E-4	5.34058E-3	9.32455E-2	2.7301E1	-3.26679E1	-3.26048E1	2.67944E1	1.73755E-7	2.51552E-3	2.51552E-3	6.28552E-3	1.99283E-1
1.2E1	3.25E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80021E1	-5.24521E-4	-8.80002E1	4.05312E-4	5.14984E-3	9.3627E-2	2.73105E1	-3.26543E1	-3.26278E1	2.68244E1	1.73605E-7	2.51203E-3	2.51203E-3	6.3074E-3	1.99E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.8002E1	-1.09673E-3	-8.80003E1	2.6226E-4	5.22137E-3	9.33886E-2	2.73363E1	-3.26747E1	-3.2635E1	2.68268E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.99283E-1
1.4E1	7.52E2	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80021E1	-7.39098E-4	-8.80005E1	3.33786E-4	5.24521E-3	9.3317E-2	2.73247E1	-3.26422E1	-3.26219E1	2.68014E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98419E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80023E1	-8.58307E-4	-8.80007E1	3.33786E-4	5.55515E-3	9.34362E-2	2.73157E1	-3.26602E1	-3.25782E1	2.67955E1	1.73698E-7	2.51922E-3	2.51922E-3	6.31421E-3	1.97891E-1
1.6E1	3.227E3	3.0E0	6.47E2	4.41E2	-7.33239E-2	-8.8002E1	-3.57628E-4	-8.80005E1	2.38419E-4	5.74589E-3	9.34839E-2	2.72921E1	-3.26461E1	-3.26909E1	2.67962E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98075E-1
1.7E1	4.0363E4	2.0E1	6.87E2	4.7E2	-7.23964E-2	-8.80022E1	-3.57628E-4	-8.80004E1	5.48363E-4	5.79357E-3	9.32932E-2	2.72913E1	-3.2629E1	-3.26224E1	2.67812E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9968E-1
1.8E1	1.79977E5	1.08E2	7.27E2	5.0E2	-7.20871E-2	-8.80022E1	-7.39098E-4	-8.80005E1	4.05312E-4	5.84126E-3	9.35316E-2	2.72962E1	-3.26679E1	-3.26189E1	2.68184E1	1.73679E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.9968E-1
1.9E1	2.44E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.8002E1	-6.19888E-4	-8.80003E1	4.05312E-4	5.96046E-3	9.34839E-2	2.73141E1	-3.26807E1	-3.26206E1	2.67693E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98764E-1
2.0E1	3.28E2	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80017E1	-6.67572E-4	-8.80003E1	5.48363E-4	5.98431E-3	9.32693E-2	2.72967E1	-3.26338E1	-3.26633E1	2.68005E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.01022E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80018E1	-4.29153E-4	-8.80003E1	6.19888E-4	6.10352E-3	9.31978E-2	2.73177E1	-3.27257E1	-3.26158E1	2.6795E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98937E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80019E1	-4.29153E-4	-8.80004E1	6.91414E-4	5.79357E-3	9.34124E-2	2.72935E1	-3.26556E1	-3.267E1	2.67561E1	1.73605E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.01047E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80018E1	-9.05991E-4	-8.80004E1	4.76837E-4	5.8651E-3	9.34124E-2	2.72714E1	-3.26456E1	-3.25985E1	2.68063E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.98153E-1