[Scan]
initial_time=2016-02-16T02:07:05
final_time=2016-02-16T02:07:26
ip_count=19
run=1030
dataset=6
scan=417
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-8.20279E-1
ql1_imon=3.02999E-9
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.4025E-10
ql3_vset=
ql3_vmon=-9.13057E0
ql3_imon=6.84607E-9
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-6.48975E-11
mult1=-9.78308E-9
mult2=-2.882E-9
rf_tmon=-4.49178E-3
rf_agc=3.29257E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.7817E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20103E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=3.05586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.19576E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41041E0
lens1_imon=2.67835E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.99135E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03564E1
cs_ea2_imon=1.58184E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.02379E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=3.57008E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=2.87891E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=1.89655E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27072E0
cs_ionrep_imon=1.26496E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.27102E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=5.12183E-10
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27198E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=2.48778E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=2.02345E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74327E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52925E-1
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.62586E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.88936E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31659E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.29038E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73175E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.11585E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.45541E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.438E-11
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0953E0
cs_ionaccel_imon=-1.9816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82577E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=8.15066E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.3792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=6.02014E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33913E1
os_fil1_imon=4.53596E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.96573E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66671E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=1.00765E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61993E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66827E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58704E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41252E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.51794E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.21686E-1	-7.98512E-1	-9.13179E0	-9.14185E0	5.55515E-3	9.34124E-2	2.73219E1	-3.26469E1	-3.26243E1	2.67804E1	1.73605E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.98322E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.21543E-1	-7.9813E-1	-9.13203E0	-9.14161E0	5.19753E-3	9.29356E-2	2.73131E1	-3.26523E1	-3.26321E1	2.67686E1	1.73677E-7	2.52342E-3	2.52342E-3	6.31269E-3	1.97731E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.21471E-1	-7.9844E-1	-9.13193E0	-9.14195E0	5.50747E-3	9.30786E-2	2.72809E1	-3.26661E1	-3.26077E1	2.67968E1	1.73758E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.98169E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.21352E-1	-7.98631E-1	-9.13165E0	-9.14161E0	5.34058E-3	9.31978E-2	2.72991E1	-3.26669E1	-3.26212E1	2.6783E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.97478E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.20947E-1	-7.98821E-1	-9.13165E0	-9.14199E0	4.86374E-3	9.34124E-2	2.73141E1	-3.26813E1	-3.2587E1	2.68052E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98419E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.20518E-1	-7.9875E-1	-9.13181E0	-9.14185E0	4.88758E-3	9.34124E-2	2.72865E1	-3.26543E1	-3.262E1	2.67891E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.20255E-1	-7.98821E-1	-9.13138E0	-9.14185E0	5.29289E-3	9.37223E-2	2.73499E1	-3.26502E1	-3.26207E1	2.67972E1	1.73755E-7	2.51007E-3	2.51007E-3	6.32386E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.20613E-1	-7.98893E-1	-9.13155E0	-9.1418E0	5.31673E-3	9.34839E-2	2.72841E1	-3.26561E1	-3.26518E1	2.68229E1	1.7368E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.20351E-1	-7.98774E-1	-9.13146E0	-9.14226E0	5.19753E-3	9.34839E-2	2.73057E1	-3.26609E1	-3.26272E1	2.67902E1	1.73679E-7	2.50989E-3	2.50989E-3	6.32896E-3	2.00192E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.20518E-1	-7.98798E-1	-9.1315E0	-9.14202E0	5.17368E-3	9.34839E-2	2.73183E1	-3.26675E1	-3.26903E1	2.68154E1	1.73605E-7	2.50898E-3	2.50898E-3	6.32936E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.20398E-1	-7.98178E-1	-9.13138E0	-9.14168E0	5.07832E-3	9.36985E-2	2.73315E1	-3.26657E1	-3.26392E1	2.681E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.20446E-1	-7.98655E-1	-9.13165E0	-9.14187E0	5.22137E-3	9.35078E-2	2.73294E1	-3.2659E1	-3.25918E1	2.67937E1	1.73605E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.20255E-1	-7.98607E-1	-9.13122E0	-9.14159E0	5.24521E-3	9.35793E-2	2.72895E1	-3.26291E1	-3.26472E1	2.67932E1	1.73605E-7	2.51287E-3	2.51287E-3	6.29684E-3	2.00567E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.20017E-1	-7.98392E-1	-9.13131E0	-9.14159E0	5.36442E-3	9.32693E-2	2.72949E1	-3.26506E1	-3.25924E1	2.68022E1	1.73761E-7	2.51498E-3	2.51498E-3	6.27901E-3	1.99523E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.20208E-1	-7.98535E-1	-9.13084E0	-9.14176E0	5.31673E-3	9.34124E-2	2.73202E1	-3.26602E1	-3.25779E1	2.68157E1	1.7368E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.98937E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.20231E-1	-7.98416E-1	-9.13064E0	-9.14187E0	5.26905E-3	9.3174E-2	2.73277E1	-3.2705E1	-3.2634E1	2.67876E1	1.73677E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.98894E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.20446E-1	-7.98202E-1	-9.13074E0	-9.14195E0	5.91278E-3	9.34362E-2	2.7254E1	-3.26518E1	-3.2632E1	2.6801E1	1.73605E-7	2.51359E-3	2.51359E-3	6.29067E-3	1.99401E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.20279E-1	-7.98559E-1	-9.13038E0	-9.14183E0	5.43594E-3	9.34601E-2	2.7301E1	-3.26691E1	-3.26472E1	2.67798E1	1.73755E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.20255E-1	-7.9844E-1	-9.13026E0	-9.14226E0	5.43594E-3	9.31025E-2	2.73141E1	-3.26482E1	-3.26248E1	2.67758E1	1.73755E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.01022E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.20279E-1	-7.9844E-1	-9.13057E0	-9.14207E0	5.17368E-3	9.30786E-2	2.73175E1	-3.27198E1	-3.26231E1	2.68124E1	1.73753E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00021E-1