[Scan]
initial_time=2016-02-16T02:07:33
final_time=2016-02-16T02:07:54
ip_count=19
run=1030
dataset=6
scan=418
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.19635E-1
ql1_imon=1.67013E-9
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.2037E-10
ql3_vset=
ql3_vmon=-9.13019E0
ql3_imon=3.74629E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=1.96242E-10
mult1=-1.02914E-8
mult2=-2.73894E-9
rf_tmon=-4.17323E-3
rf_agc=3.28254E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=2.70724E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63259E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.0521E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.06523E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=2.18649E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34424E0
lens1_imon=2.59281E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.59647E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=3.51655E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=2.86269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=1.8729E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.11244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.27898E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=3.27282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=6.05023E-10
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26714E1
iondef3_imon=1.48993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98675E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.0185E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30637E0
ionrepsh_imon=2.01483E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.20773E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7935E-1
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00732E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.2029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61498E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.05939E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=2.88395E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30034E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.29434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73151E1
iondef1_imon=1.1236E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.7725E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.13087E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=1.85508E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.39351E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.98687E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=6.27026E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.36039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33922E1
os_fil1_imon=5.07055E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76751E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30839E1
cs_fil1_imon=1.00887E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62918E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66986E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.00407E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65088E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22541E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.69213E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.20017E-1	-7.98059E-1	-9.13024E0	-9.14214E0	5.05447E-3	9.31263E-2	2.73183E1	-3.26536E1	-3.26332E1	2.68148E1	1.7368E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.9963E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.19778E-1	-7.98512E-1	-9.13055E0	-9.14228E0	5.29289E-3	9.31978E-2	2.72979E1	-3.26092E1	-3.2653E1	2.68016E1	1.73753E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.20041E-1	-7.98512E-1	-9.13043E0	-9.1419E0	4.98295E-3	9.30548E-2	2.7347E1	-3.26596E1	-3.25877E1	2.68094E1	1.7368E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98937E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.20041E-1	-7.97892E-1	-9.13064E0	-9.14197E0	5.24521E-3	9.31025E-2	2.72877E1	-3.26795E1	-3.26266E1	2.6822E1	1.73679E-7	2.52169E-3	2.52169E-3	6.33977E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.20041E-1	-7.9844E-1	-9.1301E0	-9.14202E0	5.26905E-3	9.34601E-2	2.72775E1	-3.26398E1	-3.26452E1	2.67806E1	1.73681E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.99401E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.19898E-1	-7.98392E-1	-9.13031E0	-9.14192E0	4.88758E-3	9.31025E-2	2.73345E1	-3.26783E1	-3.2635E1	2.6813E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9917E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.19707E-1	-7.98321E-1	-9.13029E0	-9.14195E0	4.8399E-3	9.29117E-2	2.73123E1	-3.26488E1	-3.26356E1	2.67686E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.19683E-1	-7.98416E-1	-9.13084E0	-9.14173E0	5.14984E-3	9.32217E-2	2.72943E1	-3.27318E1	-3.262E1	2.67884E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.19969E-1	-7.98583E-1	-9.13055E0	-9.14159E0	5.05447E-3	9.31263E-2	2.72697E1	-3.26632E1	-3.26077E1	2.67734E1	1.73605E-7	2.51552E-3	2.51552E-3	6.28552E-3	1.98764E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.19802E-1	-7.98583E-1	-9.13062E0	-9.14171E0	5.14984E-3	9.31263E-2	2.73165E1	-3.2644E1	-3.2632E1	2.6771E1	1.73605E-7	2.50882E-3	2.50882E-3	6.30202E-3	1.9883E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.19755E-1	-7.98655E-1	-9.13029E0	-9.14214E0	5.22137E-3	9.30548E-2	2.72997E1	-3.26554E1	-3.26549E1	2.68046E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.19492E-1	-7.98297E-1	-9.13048E0	-9.14173E0	5.07832E-3	9.31263E-2	2.72939E1	-3.26431E1	-3.26254E1	2.67787E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00673E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.19898E-1	-7.98345E-1	-9.13081E0	-9.1419E0	5.26905E-3	9.28879E-2	2.73291E1	-3.26765E1	-3.262E1	2.68118E1	1.73679E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00021E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.19707E-1	-7.97677E-1	-9.13067E0	-9.14218E0	5.74589E-3	9.33647E-2	2.73045E1	-3.2635E1	-3.26909E1	2.68004E1	1.73758E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.0064E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.19778E-1	-7.98273E-1	-9.13053E0	-9.14195E0	5.6982E-3	9.33647E-2	2.73303E1	-3.26831E1	-3.26524E1	2.68052E1	1.73605E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9883E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.19588E-1	-7.98106E-1	-9.13088E0	-9.14195E0	5.6982E-3	9.34362E-2	2.72985E1	-3.26464E1	-3.26278E1	2.68046E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98419E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.19635E-1	-7.98225E-1	-9.13081E0	-9.14159E0	5.17368E-3	9.32693E-2	2.73126E1	-3.26509E1	-3.26185E1	2.68065E1	1.7368E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.1985E-1	-7.98464E-1	-9.13074E0	-9.14214E0	5.38826E-3	9.3317E-2	2.72348E1	-3.26597E1	-3.26362E1	2.67944E1	1.73677E-7	2.51709E-3	2.51709E-3	6.30212E-3	1.99729E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.19707E-1	-7.97892E-1	-9.1305E0	-9.14211E0	5.07832E-3	9.32455E-2	2.72991E1	-3.26506E1	-3.26482E1	2.67914E1	1.73681E-7	2.52139E-3	2.52139E-3	6.3074E-3	1.99401E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.19635E-1	-7.97939E-1	-9.13019E0	-9.14211E0	5.38826E-3	9.31263E-2	2.73151E1	-3.26614E1	-3.26714E1	2.68028E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00021E-1