[Scan]
initial_time=2016-02-16T02:08:01
final_time=2016-02-16T02:08:22
ip_count=19
run=1030
dataset=6
scan=419
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.19206E-1
ql1_imon=1.3453E-9
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.42269E-10
ql3_vset=
ql3_vmon=-9.1305E0
ql3_imon=2.77901E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=3.07345E-10
mult1=-1.06039E-8
mult2=-2.54702E-9
rf_tmon=-4.14207E-3
rf_agc=3.37814E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.24059E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.95383E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20149E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05387E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.05793E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=2.20843E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36843E0
lens1_imon=2.65298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.99851E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.58479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83925E1
cs_ef1a_imon=3.01519E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=3.41713E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=2.88556E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=1.91643E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63884E1
os_ef1bup_imon=3.10693E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29516E0
cs_ionrep_imon=1.26341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01607E1
cs_anode1_imon=3.26541E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=5.85151E-10
tplens_vset=1.4E-1
tplens_vmon=1.59188E0
tplens_imon=3.02779E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.52037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26517E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98597E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.6068E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.18755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.13786E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.06793E-1
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00839E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63435E0
os_ef2alow_imon=-2.44252E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53211E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10735E1
os_restr2_imon=2.86888E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.27739E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.07972E-5
iondef4_vset=2.691E1
iondef4_vmon=2.683E1
iondef4_imon=1.10623E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.83759E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=2.37775E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-1.98031E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47317E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.8616E-6
window_vset=0.0E0
window_vmon=2.16527E-1
window_imon=-1.00029E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39244E-4
mask2_vset=0.0E0
mask2_vmon=-1.86721E1
mask2_imon=-7.22272E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.73557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.96044E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=6.87549E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63883E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33953E1
os_fil1_imon=5.10959E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.98246E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66432E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=1.0086E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62812E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66732E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.58196E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71415E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.03785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22889E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22551E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.50989E-3
foreline_cvt_pmon=2.50989E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.69274E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.19373E-1	-7.98178E-1	-9.13048E0	-9.14204E0	5.65052E-3	9.31025E-2	2.73428E1	-3.27133E1	-3.25812E1	2.6781E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.19588E-1	-7.98154E-1	-9.13081E0	-9.14245E0	5.43594E-3	9.31025E-2	2.72991E1	-3.26765E1	-3.25755E1	2.67645E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.19445E-1	-7.97892E-1	-9.13072E0	-9.14202E0	5.36442E-3	9.31025E-2	2.73417E1	-3.26933E1	-3.26128E1	2.68034E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.9911E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.19564E-1	-7.98774E-1	-9.13033E0	-9.1419E0	5.36442E-3	9.31263E-2	2.72892E1	-3.26885E1	-3.25782E1	2.68088E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98764E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.19159E-1	-7.98368E-1	-9.13038E0	-9.1423E0	5.24521E-3	9.34362E-2	2.72666E1	-3.26368E1	-3.2632E1	2.68028E1	1.7368E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.19182E-1	-7.98178E-1	-9.13062E0	-9.14209E0	5.55515E-3	9.31978E-2	2.72931E1	-3.26452E1	-3.26428E1	2.67938E1	1.73753E-7	2.50882E-3	2.50882E-3	6.32896E-3	1.9934E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.1954E-1	-7.97963E-1	-9.13079E0	-9.14209E0	5.29289E-3	9.31025E-2	2.73501E1	-3.26363E1	-3.26801E1	2.68175E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.19278E-1	-7.98297E-1	-9.13057E0	-9.14207E0	5.34058E-3	9.29832E-2	2.72968E1	-3.26629E1	-3.26171E1	2.6782E1	1.73605E-7	2.51369E-3	2.51369E-3	6.33341E-3	1.98792E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.19421E-1	-7.98011E-1	-9.13067E0	-9.14216E0	5.48363E-3	9.31978E-2	2.73307E1	-3.26807E1	-3.26135E1	2.67989E1	1.73605E-7	2.51642E-3	2.51642E-3	6.31902E-3	1.9965E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.19564E-1	-7.98225E-1	-9.1305E0	-9.14221E0	5.19753E-3	9.33647E-2	2.73115E1	-3.26731E1	-3.26686E1	2.67583E1	1.73676E-7	2.51162E-3	2.51162E-3	6.31779E-3	2.00435E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.19468E-1	-7.9813E-1	-9.13045E0	-9.14195E0	5.38826E-3	9.30309E-2	2.72861E1	-3.26499E1	-3.26585E1	2.68207E1	1.73605E-7	2.52384E-3	2.52384E-3	6.32518E-3	2.00534E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.19468E-1	-7.98368E-1	-9.13093E0	-9.14207E0	5.10216E-3	9.30071E-2	2.73204E1	-3.26667E1	-3.26284E1	2.68018E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.19182E-1	-7.98321E-1	-9.13069E0	-9.14209E0	4.98295E-3	9.32217E-2	2.72931E1	-3.26789E1	-3.26428E1	2.67553E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9934E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.19302E-1	-7.98059E-1	-9.13074E0	-9.14197E0	5.05447E-3	9.32217E-2	2.72901E1	-3.26254E1	-3.26068E1	2.6804E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99977E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.19445E-1	-7.98392E-1	-9.13067E0	-9.14185E0	4.86374E-3	9.34601E-2	2.73165E1	-3.26885E1	-3.2605E1	2.6777E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.19063E-1	-7.98535E-1	-9.13088E0	-9.14209E0	4.88758E-3	9.3174E-2	2.73123E1	-3.26392E1	-3.26218E1	2.68232E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00847E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.19254E-1	-7.98678E-1	-9.13086E0	-9.14216E0	4.88758E-3	9.3174E-2	2.73111E1	-3.26236E1	-3.26494E1	2.67998E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.19039E-1	-7.98607E-1	-9.13064E0	-9.14209E0	5.26905E-3	9.3174E-2	2.72957E1	-3.26697E1	-3.26124E1	2.6792E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.19111E-1	-7.98702E-1	-9.131E0	-9.14223E0	5.126E-3	9.34362E-2	2.72909E1	-3.26697E1	-3.25924E1	2.67781E1	1.73605E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.19206E-1	-7.98249E-1	-9.1305E0	-9.14185E0	5.07832E-3	9.32455E-2	2.73051E1	-3.26517E1	-3.2626E1	2.683E1	1.73605E-7	2.50989E-3	2.50989E-3	6.32896E-3	1.98661E-1