[Scan]
initial_time=2016-02-16T02:08:57
final_time=2016-02-16T02:09:17
ip_count=19
run=1030
dataset=6
scan=421
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.18849E-1
ql1_imon=1.04917E-9
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=2.61474E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=1.86344E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.01533E-10
mult1=-9.54665E-9
mult2=-2.99959E-9
rf_tmon=-4.60386E-3
rf_agc=3.34979E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.46351E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53352E1
cs_ef1b_imon=3.06667E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02359E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.18351E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.50891E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03516E1
cs_ea2_imon=1.58328E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=3.02775E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.61526E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=2.8753E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15684E1
os_ea1_imon=1.90052E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=1.26605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93669E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.2894E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=6.37591E-10
tplens_vset=1.4E-1
tplens_vmon=1.65285E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26384E1
iondef3_imon=1.48883E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.59662E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.36075E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24609E0
ionrepsh_imon=2.02237E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.19279E-1
os_ea2_imon=-4.75989E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.20074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61017E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.07741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.32307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.30047E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73169E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.84035E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81879E-1
olens1_imon=2.78056E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0959E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55931E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39344E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.88533E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65119E0
defgridb_imon=6.22562E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=4.80025E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67141E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66752E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30867E1
cs_fil1_imon=1.00911E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67008E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.26953E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.37998E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.46072E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22559E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45186E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18968E-1	-7.98059E-1	-9.13136E0	-9.14183E0	5.07832E-3	9.34362E-2	2.73151E1	-3.2659E1	-3.26001E1	2.68226E1	1.73605E-7	2.50898E-3	2.50898E-3	6.32936E-3	2.00847E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.18729E-1	-7.98416E-1	-9.1311E0	-9.14209E0	5.29289E-3	9.36508E-2	2.72996E1	-3.26505E1	-3.2604E1	2.67884E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.18729E-1	-7.98512E-1	-9.1311E0	-9.14218E0	5.43594E-3	9.38416E-2	2.73611E1	-3.26207E1	-3.26378E1	2.68076E1	1.73681E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0968E0	-8.1892E-1	-7.98702E-1	-9.13091E0	-9.14209E0	5.26905E-3	9.36508E-2	2.73033E1	-3.26837E1	-3.25954E1	2.67842E1	1.73827E-7	2.50989E-3	2.50989E-3	6.30202E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0968E0	-8.18586E-1	-7.99084E-1	-9.13107E0	-9.14197E0	5.43594E-3	9.34124E-2	2.72961E1	-3.26416E1	-3.26374E1	2.68346E1	1.73755E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.18729E-1	-7.98798E-1	-9.13119E0	-9.14192E0	5.50747E-3	9.3627E-2	2.72909E1	-3.26714E1	-3.26366E1	2.67601E1	1.73605E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.18706E-1	-7.98321E-1	-9.13098E0	-9.14197E0	5.29289E-3	9.35555E-2	2.72863E1	-3.26681E1	-3.26323E1	2.6814E1	1.73605E-7	2.50989E-3	2.50989E-3	6.32356E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.18419E-1	-7.98512E-1	-9.13081E0	-9.1419E0	5.29289E-3	9.34839E-2	2.72746E1	-3.26688E1	-3.26091E1	2.68076E1	1.73747E-7	2.51679E-3	2.51679E-3	6.30221E-3	1.9994E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09673E0	-8.1861E-1	-7.98464E-1	-9.131E0	-9.14216E0	5.50747E-3	9.33886E-2	2.73051E1	-3.26675E1	-3.26158E1	2.68294E1	1.73605E-7	2.52266E-3	2.52266E-3	6.3074E-3	1.99221E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.18634E-1	-7.98512E-1	-9.13091E0	-9.14204E0	5.43594E-3	9.34601E-2	2.73222E1	-3.26838E1	-3.2639E1	2.67729E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.18872E-1	-7.98297E-1	-9.13086E0	-9.14202E0	5.53131E-3	9.32693E-2	2.73082E1	-3.26872E1	-3.26083E1	2.68013E1	1.73679E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.9883E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.18849E-1	-7.98082E-1	-9.13084E0	-9.14218E0	5.19753E-3	9.31501E-2	2.73275E1	-3.26897E1	-3.26325E1	2.67474E1	1.73605E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.0064E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.18586E-1	-7.98607E-1	-9.13091E0	-9.14202E0	5.53131E-3	9.34362E-2	2.73057E1	-3.26609E1	-3.25924E1	2.681E1	1.73679E-7	2.51096E-3	2.51096E-3	6.29665E-3	2.00192E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.18586E-1	-7.98488E-1	-9.13076E0	-9.14226E0	5.29289E-3	9.33647E-2	2.72997E1	-3.26639E1	-3.26585E1	2.681E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00847E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18825E-1	-7.98631E-1	-9.13093E0	-9.14207E0	4.93526E-3	9.32932E-2	2.72793E1	-3.26326E1	-3.26254E1	2.67923E1	1.7368E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.19063E-1	-7.9844E-1	-9.13072E0	-9.14214E0	5.38826E-3	9.32932E-2	2.73129E1	-3.26296E1	-3.26609E1	2.66614E1	1.73605E-7	2.5199E-3	2.5199E-3	6.28552E-3	1.99803E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18896E-1	-7.98631E-1	-9.13079E0	-9.14173E0	5.36442E-3	9.3317E-2	2.72901E1	-3.26753E1	-3.26639E1	2.68256E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.18968E-1	-7.98726E-1	-9.13076E0	-9.14204E0	5.126E-3	9.30071E-2	2.72744E1	-3.26148E1	-3.26962E1	2.67716E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.19039E-1	-7.9875E-1	-9.13115E0	-9.14204E0	5.43594E-3	9.30786E-2	2.72744E1	-3.26325E1	-3.26148E1	2.68169E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18849E-1	-7.98965E-1	-9.13112E0	-9.14187E0	5.14984E-3	9.33647E-2	2.73169E1	-3.26626E1	-3.26384E1	2.68094E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9917E-1