[Scan]
initial_time=2016-02-16T02:09:25
final_time=2016-02-16T02:09:45
ip_count=19
run=1030
dataset=6
scan=422
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.18205E-1
ql1_imon=1.04058E-9
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.7343E-10
ql3_vset=
ql3_vmon=-9.13064E0
ql3_imon=1.62734E-9
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=4.08876E-10
mult1=-9.41661E-9
mult2=-2.6919E-9
rf_tmon=-3.83699E-3
rf_agc=3.40524E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.31092E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19777E1
lens5a_imon=2.00633E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05189E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=3.07357E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05059E1
cs_ea1_imon=2.1964E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42152E0
lens1_imon=2.99276E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64435E1
os_ef1alow_imon=2.986E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.5901E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83798E1
cs_ef1a_imon=3.01136E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=3.38137E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11089E1
os_restr1_imon=2.88452E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=1.87891E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08921E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.24855E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=3.27097E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=6.5316E-10
tplens_vset=1.4E-1
tplens_vmon=1.58539E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26225E1
iondef3_imon=1.47967E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26874E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98572E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.46375E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26508E0
ionrepsh_imon=2.01058E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34224E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7449E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75811E-1
os_ea2_imon=-4.47542E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.20424E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62682E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45681E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10741E1
os_restr2_imon=2.86228E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.31804E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.29407E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73364E1
iondef1_imon=1.09104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68198E1
iondef4_imon=1.09615E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.86139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=2.62153E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12261E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56712E1
einzel_imon=7.86855E-6
window_vset=0.0E0
window_vmon=2.22899E-1
window_imon=-9.41213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86321E1
mask2_imon=-5.58936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.42056E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=7.04539E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.34624E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33911E1
os_fil1_imon=5.20226E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.84345E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66492E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30843E1
cs_fil1_imon=1.00849E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62627E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66833E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.35062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64202E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-1.97993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33894E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22587E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.33924E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.18729E-1	-7.98631E-1	-9.13098E0	-9.14192E0	5.19753E-3	9.30786E-2	2.73189E1	-3.26314E1	-3.262E1	2.67794E1	1.73605E-7	2.51739E-3	2.51739E-3	6.35059E-3	1.97815E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18682E-1	-7.98416E-1	-9.13048E0	-9.14202E0	5.10216E-3	9.31501E-2	2.72984E1	-3.27117E1	-3.26432E1	2.67726E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98247E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.18348E-1	-7.98893E-1	-9.13098E0	-9.1418E0	5.34058E-3	9.34124E-2	2.72296E1	-3.26396E1	-3.2603E1	2.68036E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98247E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.18586E-1	-7.98321E-1	-9.13086E0	-9.14223E0	5.67436E-3	9.32217E-2	2.72808E1	-3.26642E1	-3.26422E1	2.67775E1	1.73755E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.1811E-1	-7.98225E-1	-9.13067E0	-9.14207E0	5.36442E-3	9.33886E-2	2.72991E1	-3.26795E1	-3.25743E1	2.68172E1	1.73605E-7	2.51919E-3	2.51919E-3	6.31798E-3	1.99896E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.18181E-1	-7.98845E-1	-9.13088E0	-9.14195E0	5.50747E-3	9.36747E-2	2.72847E1	-3.26825E1	-3.25924E1	2.67992E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18419E-1	-7.98726E-1	-9.13081E0	-9.14211E0	4.95911E-3	9.35555E-2	2.73003E1	-3.26633E1	-3.25978E1	2.68022E1	1.73755E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.18586E-1	-7.98297E-1	-9.13086E0	-9.14223E0	5.10216E-3	9.34124E-2	2.72974E1	-3.26803E1	-3.26071E1	2.67644E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.18396E-1	-7.98225E-1	-9.13081E0	-9.14192E0	5.14984E-3	9.34601E-2	2.72768E1	-3.26107E1	-3.26172E1	2.67833E1	1.73753E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.9883E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.18396E-1	-7.98655E-1	-9.13074E0	-9.14204E0	5.55515E-3	9.35078E-2	2.73195E1	-3.26711E1	-3.26152E1	2.68502E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9883E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.18324E-1	-7.98416E-1	-9.13105E0	-9.14204E0	4.88758E-3	9.31025E-2	2.73299E1	-3.26626E1	-3.26124E1	2.67908E1	1.73605E-7	2.51116E-3	2.51116E-3	6.29645E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.18563E-1	-7.98607E-1	-9.13095E0	-9.14214E0	4.91142E-3	9.32932E-2	2.73369E1	-3.26038E1	-3.26422E1	2.67595E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00534E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.18753E-1	-7.98798E-1	-9.13107E0	-9.14183E0	5.07832E-3	9.29594E-2	2.72839E1	-3.26673E1	-3.25759E1	2.68123E1	1.7368E-7	2.52757E-3	2.52757E-3	6.33486E-3	2.00325E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.18586E-1	-7.98368E-1	-9.13079E0	-9.1418E0	5.17368E-3	9.32693E-2	2.72727E1	-3.26402E1	-3.26496E1	2.67986E1	1.73679E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00021E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.18348E-1	-7.9844E-1	-9.13048E0	-9.14204E0	5.03063E-3	9.32217E-2	2.72586E1	-3.26615E1	-3.26229E1	2.68064E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9985E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18467E-1	-7.98345E-1	-9.13064E0	-9.14199E0	4.8399E-3	9.32693E-2	2.72986E1	-3.26461E1	-3.26449E1	2.67535E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.01022E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.18372E-1	-7.9813E-1	-9.13074E0	-9.14178E0	4.57764E-3	9.3317E-2	2.72919E1	-3.26735E1	-3.26422E1	2.67956E1	1.73755E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.18372E-1	-7.98392E-1	-9.13086E0	-9.14223E0	4.60148E-3	9.32693E-2	2.7334E1	-3.26425E1	-3.26343E1	2.68012E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00151E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18372E-1	-7.98345E-1	-9.13081E0	-9.14209E0	5.19753E-3	9.3317E-2	2.73145E1	-3.2649E1	-3.2616E1	2.67649E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.18205E-1	-7.98512E-1	-9.13064E0	-9.14214E0	5.26905E-3	9.34839E-2	2.73364E1	-3.26874E1	-3.26225E1	2.68198E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9985E-1