[Scan]
initial_time=2016-02-16T02:09:53
final_time=2016-02-16T02:10:13
ip_count=19
run=1030
dataset=6
scan=423
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.18086E-1
ql1_imon=9.29654E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.5773E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=1.44541E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.11201E-10
mult1=-9.83671E-9
mult2=-2.83438E-9
rf_tmon=-3.79143E-3
rf_agc=3.42288E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=3.54898E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66667E0
bslens_imon=2.44389E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19639E1
lens5a_imon=1.97289E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05229E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.07028E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02374E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04847E1
cs_ea1_imon=2.20833E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34807E0
lens1_imon=2.76711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.99459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03776E1
cs_ea2_imon=1.57254E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83872E1
cs_ef1a_imon=3.02054E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=3.49712E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=2.86269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15391E1
os_ea1_imon=1.90274E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.09839E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24536E0
cs_ionrep_imon=1.2618E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93479E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01611E1
cs_anode1_imon=3.25408E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=6.42359E-10
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-3.91646E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.50826E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.60376E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98978E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.66521E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=2.01586E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33713E1
lens5b_imon=2.20686E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.14484E-1
os_ea2_imon=-5.42238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6372E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43965E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.87963E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30773E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01497E1
cs_anode2_imon=2.2875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.10203E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.86514E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=2.4395E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.08933E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.75868E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.40607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47709E0
defgridb_imon=5.99565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33938E1
os_fil1_imon=4.9384E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.18798E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66999E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=1.00758E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62936E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66948E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30513E-2
os_fil2_imon=-2.26353E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59433E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22595E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.97045E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.572E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18062E-1	-7.97915E-1	-9.13081E0	-9.14202E0	5.126E-3	9.31978E-2	2.73178E1	-3.267E1	-3.26393E1	2.68458E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00151E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.18229E-1	-7.98321E-1	-9.13072E0	-9.14223E0	5.19753E-3	9.32455E-2	2.734E1	-3.26603E1	-3.25923E1	2.67951E1	1.73605E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.18133E-1	-7.98368E-1	-9.13076E0	-9.14228E0	5.26905E-3	9.29594E-2	2.7314E1	-3.26277E1	-3.26361E1	2.67763E1	1.73758E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.01352E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.18181E-1	-7.98607E-1	-9.13093E0	-9.14242E0	4.98295E-3	9.29594E-2	2.73213E1	-3.26801E1	-3.26068E1	2.68142E1	1.73605E-7	2.51854E-3	2.51854E-3	6.31761E-3	2.00145E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18062E-1	-7.98392E-1	-9.13103E0	-9.14249E0	5.126E-3	9.33886E-2	2.72799E1	-3.26765E1	-3.26573E1	2.67902E1	1.7368E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98247E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18133E-1	-7.98345E-1	-9.13088E0	-9.14199E0	4.98295E-3	9.29594E-2	2.72991E1	-3.26434E1	-3.2641E1	2.67938E1	1.73605E-7	2.50898E-3	2.50898E-3	6.31837E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17966E-1	-7.98607E-1	-9.13091E0	-9.14235E0	5.00679E-3	9.32217E-2	2.72665E1	-3.26707E1	-3.26474E1	2.67517E1	1.7368E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18062E-1	-7.98368E-1	-9.13088E0	-9.1423E0	5.22137E-3	9.32455E-2	2.72803E1	-3.2639E1	-3.26585E1	2.68184E1	1.73681E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.99224E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.18014E-1	-7.98392E-1	-9.13124E0	-9.14207E0	4.98295E-3	9.32217E-2	2.7278E1	-3.26272E1	-3.26231E1	2.67821E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9968E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.18324E-1	-7.98464E-1	-9.131E0	-9.14221E0	5.126E-3	9.33886E-2	2.72696E1	-3.26707E1	-3.26266E1	2.67889E1	1.73605E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9917E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.18491E-1	-7.98655E-1	-9.13095E0	-9.14228E0	4.98295E-3	9.33647E-2	2.73151E1	-3.26673E1	-3.25847E1	2.6814E1	1.73681E-7	2.5147E-3	2.5147E-3	6.32978E-3	1.98169E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18229E-1	-7.98321E-1	-9.13103E0	-9.14216E0	4.74453E-3	9.33886E-2	2.73351E1	-3.26789E1	-3.26314E1	2.68184E1	1.73679E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.99E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.18491E-1	-7.9844E-1	-9.13088E0	-9.14199E0	4.81606E-3	9.30786E-2	2.73075E1	-3.26476E1	-3.26488E1	2.6774E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.97559E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.18372E-1	-7.98392E-1	-9.13076E0	-9.14214E0	5.05447E-3	9.27687E-2	2.72931E1	-3.265E1	-3.26158E1	2.6786E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98247E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.18038E-1	-7.98559E-1	-9.13086E0	-9.14218E0	5.29289E-3	9.29832E-2	2.72786E1	-3.26325E1	-3.26585E1	2.6792E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.18276E-1	-7.98368E-1	-9.13091E0	-9.14221E0	5.07832E-3	9.3174E-2	2.72949E1	-3.26705E1	-3.2617E1	2.67944E1	1.73605E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.9911E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17943E-1	-7.98607E-1	-9.13115E0	-9.14216E0	5.4121E-3	9.3174E-2	2.73201E1	-3.27017E1	-3.26074E1	2.67842E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.18133E-1	-7.98225E-1	-9.1311E0	-9.14199E0	5.07832E-3	9.3174E-2	2.72927E1	-3.26508E1	-3.26213E1	2.67955E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.18014E-1	-7.98368E-1	-9.13107E0	-9.14185E0	5.29289E-3	9.31501E-2	2.73305E1	-3.26785E1	-3.26012E1	2.67788E1	1.73823E-7	2.51709E-3	2.51709E-3	6.32328E-3	1.97897E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18086E-1	-7.98512E-1	-9.13103E0	-9.14185E0	5.34058E-3	9.29594E-2	2.73177E1	-3.26657E1	-3.26128E1	2.67992E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.97045E-1