[Scan]
initial_time=2016-02-16T02:11:14
final_time=2016-02-16T02:11:34
ip_count=19
run=1030
dataset=6
scan=426
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.17871E-1
ql1_imon=8.40986E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.81024E-10
ql3_vset=
ql3_vmon=-9.13081E0
ql3_imon=1.06561E-9
ql4_vset=
ql4_vmon=-9.14142E0
ql4_imon=4.60494E-10
mult1=-9.6561E-9
mult2=-2.88229E-9
rf_tmon=-4.82485E-3
rf_agc=3.35739E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=3.56758E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62669E0
bslens_imon=2.66006E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20102E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05362E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.0482E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.18118E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39498E0
lens1_imon=2.81579E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=3.00615E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04286E1
cs_ea2_imon=1.53736E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85101E1
cs_ef1a_imon=3.01275E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.54528E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11204E1
os_restr1_imon=2.8873E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15494E1
os_ea1_imon=1.91502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=1.26695E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93778E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01427E1
cs_anode1_imon=3.27965E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.81078E-10
tplens_vset=1.4E-1
tplens_vmon=1.64202E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.52639E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98912E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=3.39103E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2167E0
ionrepsh_imon=1.99005E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33947E1
lens5b_imon=2.22578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74188E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45136E-1
os_ea2_imon=-3.94451E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06171E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71368E1
cs_ef2a_imon=3.2098E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6662E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60741E-1
os_ef2bup_imon=-5.14627E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.89321E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01943E1
cs_anode2_imon=2.29546E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.12785E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.06418E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.84755E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.04365E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13072E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02036E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56648E1
einzel_imon=7.91373E-6
window_vset=0.0E0
window_vmon=2.16527E-1
window_imon=-9.75966E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.85933E1
mask2_imon=-6.11064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.91443E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.48073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.81601E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33907E1
os_fil1_imon=5.26018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71603E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66925E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=1.00696E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62992E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66799E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.28691E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.33493E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28778E-1
cs_fil2_imon=-2.35641E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1478E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22538E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29185E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73676E-7
chamber_cvt_pmon=2.51162E-3
foreline_cvt_pmon=2.51162E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.5631E-1
res40_imon=-2.69969E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.17513E-1	-7.97963E-1	-9.13136E0	-9.14216E0	5.43594E-3	9.32217E-2	2.7311E1	-3.26431E1	-3.26472E1	2.68076E1	1.7368E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98075E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.17609E-1	-7.98583E-1	-9.13124E0	-9.14218E0	5.26905E-3	9.3174E-2	2.72539E1	-3.26921E1	-3.25942E1	2.67625E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.97815E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16965E-1	-7.98416E-1	-9.13124E0	-9.14192E0	5.14984E-3	9.35078E-2	2.73103E1	-3.26277E1	-3.26173E1	2.68196E1	1.73681E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.97994E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17394E-1	-7.98225E-1	-9.13124E0	-9.1418E0	5.38826E-3	9.31501E-2	2.73287E1	-3.26325E1	-3.2636E1	2.67717E1	1.73677E-7	2.51498E-3	2.51498E-3	6.32328E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.17466E-1	-7.98583E-1	-9.13088E0	-9.14204E0	4.93526E-3	9.3174E-2	2.72805E1	-3.26302E1	-3.26176E1	2.67968E1	1.73755E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.17466E-1	-7.98035E-1	-9.13131E0	-9.14228E0	5.4121E-3	9.32455E-2	2.72856E1	-3.26313E1	-3.26614E1	2.68058E1	1.73605E-7	2.51225E-3	2.51225E-3	6.33486E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17442E-1	-7.98464E-1	-9.13155E0	-9.14202E0	5.31673E-3	9.34124E-2	2.72843E1	-3.26933E1	-3.26125E1	2.68064E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00363E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.178E-1	-7.9844E-1	-9.13129E0	-9.14202E0	5.4121E-3	9.35555E-2	2.73346E1	-3.26413E1	-3.26296E1	2.68148E1	1.73755E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.17728E-1	-7.98297E-1	-9.13119E0	-9.14197E0	5.07832E-3	9.30786E-2	2.73417E1	-3.26651E1	-3.25918E1	2.67902E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.17823E-1	-7.98106E-1	-9.1315E0	-9.14192E0	5.126E-3	9.3174E-2	2.73303E1	-3.26158E1	-3.26579E1	2.67704E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.1749E-1	-7.98678E-1	-9.13122E0	-9.14216E0	5.14984E-3	9.28164E-2	2.73264E1	-3.26353E1	-3.26376E1	2.67959E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09665E0	-8.18229E-1	-7.97963E-1	-9.13117E0	-9.14192E0	5.24521E-3	9.30786E-2	2.73514E1	-3.26675E1	-3.2623E1	2.67722E1	1.73605E-7	2.50993E-3	2.50993E-3	6.31958E-3	1.99326E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.17919E-1	-7.98202E-1	-9.1311E0	-9.14218E0	5.17368E-3	9.30786E-2	2.73405E1	-3.26158E1	-3.26524E1	2.67992E1	1.73755E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98247E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.17895E-1	-7.98106E-1	-9.13112E0	-9.1418E0	5.45979E-3	9.32217E-2	2.73135E1	-3.26675E1	-3.2653E1	2.68166E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99283E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.1737E-1	-7.98917E-1	-9.13136E0	-9.14218E0	5.84126E-3	9.30071E-2	2.73249E1	-3.26669E1	-3.26272E1	2.68046E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.9934E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.178E-1	-7.98535E-1	-9.13129E0	-9.14197E0	5.36442E-3	9.30309E-2	2.7263E1	-3.26855E1	-3.26086E1	2.66947E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98764E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.17323E-1	-7.98345E-1	-9.13081E0	-9.14173E0	4.88758E-3	9.31263E-2	2.73594E1	-3.26178E1	-3.26124E1	2.67836E1	1.7368E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.17823E-1	-7.98368E-1	-9.13119E0	-9.14202E0	5.00679E-3	9.29832E-2	2.73193E1	-3.26785E1	-3.26236E1	2.67845E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17871E-1	-7.98202E-1	-9.1311E0	-9.14156E0	5.22137E-3	9.2864E-2	2.72906E1	-3.26532E1	-3.2622E1	2.68088E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.17871E-1	-7.98225E-1	-9.13081E0	-9.14142E0	5.24521E-3	9.27925E-2	2.72811E1	-3.26416E1	-3.26146E1	2.6801E1	1.73676E-7	2.51162E-3	2.51162E-3	6.29185E-3	1.99283E-1