[Scan]
initial_time=2016-02-16T02:12:09
final_time=2016-02-16T02:12:28
ip_count=19
run=1030
dataset=6
scan=428
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.17585E-1
ql1_imon=7.98357E-10
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.73967E-10
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=9.9839E-10
ql4_vset=
ql4_vmon=-9.14147E0
ql4_imon=4.93443E-10
mult1=-9.71631E-9
mult2=-2.7745E-9
rf_tmon=-3.68329E-3
rf_agc=3.43189E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=3.53181E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62052E0
bslens_imon=2.73281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20071E1
lens5a_imon=1.99609E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.06071E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04756E1
cs_ea1_imon=2.19806E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4079E0
lens1_imon=2.7189E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64707E1
os_ef1alow_imon=2.99051E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03621E1
cs_ea2_imon=1.59076E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84128E1
cs_ef1a_imon=3.01866E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=3.59166E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11164E1
os_restr1_imon=2.88417E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15172E1
os_ea1_imon=1.88659E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63462E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24341E0
cs_ionrep_imon=1.25844E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01636E1
cs_anode1_imon=3.28938E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.77156E-10
tplens_vset=1.4E-1
tplens_vmon=1.57596E0
tplens_imon=-2.32397E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.48995E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26326E1
iondef2_imon=1.58902E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=3.31533E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26253E0
ionrepsh_imon=1.99365E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.21474E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7475E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71229E-1
os_ea2_imon=-4.47922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6662E0
os_ef2alow_imon=-2.55721E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42785E-1
os_ef2bup_imon=-5.10804E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.87583E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31666E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.29303E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.08602E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.06974E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.79977E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.27284E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-1.88996E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47278E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=2.47225E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39348E-4
mask2_vset=0.0E0
mask2_vmon=-1.8646E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.96102E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.81735E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.57168E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.69942E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33943E1
os_fil1_imon=4.96479E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.97667E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66683E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30866E1
cs_fil1_imon=1.00926E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6353E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66777E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38187E-2
os_fil2_imon=-2.22899E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.85622E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64159E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.20003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.003E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22576E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40102E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.25439E-1
res40_imon=-2.64061E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.18086E-1	-7.98726E-1	-9.13117E0	-9.14221E0	5.10216E-3	9.3317E-2	2.73198E1	-3.26614E1	-3.26272E1	2.6783E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.1737E-1	-7.98798E-1	-9.1311E0	-9.14259E0	5.00679E-3	9.31025E-2	2.73075E1	-3.2648E1	-3.26634E1	2.68178E1	1.73605E-7	2.51287E-3	2.51287E-3	6.29157E-3	1.99227E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.17418E-1	-7.98559E-1	-9.13115E0	-9.14245E0	4.98295E-3	9.34362E-2	2.72868E1	-3.26832E1	-3.26319E1	2.67992E1	1.73758E-7	2.51025E-3	2.51025E-3	6.33538E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.17561E-1	-7.97987E-1	-9.13126E0	-9.14216E0	5.17368E-3	9.33409E-2	2.72666E1	-3.26573E1	-3.2608E1	2.67908E1	1.7368E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17585E-1	-7.98774E-1	-9.13126E0	-9.14192E0	4.74453E-3	9.31978E-2	2.73281E1	-3.25959E1	-3.26337E1	2.68007E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.98661E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.1737E-1	-7.9813E-1	-9.13134E0	-9.14233E0	5.126E-3	9.35316E-2	2.73277E1	-3.26585E1	-3.26217E1	2.67901E1	1.7368E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17561E-1	-7.98368E-1	-9.13091E0	-9.14185E0	5.26905E-3	9.35078E-2	2.72907E1	-3.26735E1	-3.26434E1	2.68226E1	1.7368E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.17394E-1	-7.98368E-1	-9.1311E0	-9.14192E0	5.24521E-3	9.31978E-2	2.73514E1	-3.26362E1	-3.26002E1	2.67746E1	1.7368E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.98419E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17704E-1	-7.98202E-1	-9.13107E0	-9.14204E0	5.07832E-3	9.34124E-2	2.7265E1	-3.26579E1	-3.26095E1	2.67902E1	1.73758E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.97643E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18253E-1	-7.98059E-1	-9.13095E0	-9.14192E0	5.126E-3	9.35316E-2	2.73026E1	-3.26497E1	-3.2636E1	2.67848E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.97647E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.18157E-1	-7.98702E-1	-9.1311E0	-9.14197E0	5.34058E-3	9.33886E-2	2.73195E1	-3.26422E1	-3.26723E1	2.67776E1	1.73758E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.98169E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.17728E-1	-7.98917E-1	-9.13126E0	-9.14178E0	5.36442E-3	9.34362E-2	2.73171E1	-3.26392E1	-3.26278E1	2.67788E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98764E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18038E-1	-7.98726E-1	-9.13126E0	-9.14197E0	4.91142E-3	9.28164E-2	2.73273E1	-3.26518E1	-3.25894E1	2.6792E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17776E-1	-7.98392E-1	-9.13153E0	-9.14202E0	5.34058E-3	9.2721E-2	2.72842E1	-3.26996E1	-3.25947E1	2.67827E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99456E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.18086E-1	-7.98583E-1	-9.13131E0	-9.14195E0	5.24521E-3	9.28879E-2	2.72945E1	-3.27009E1	-3.26124E1	2.67944E1	1.7375E-7	2.51287E-3	2.51287E-3	6.30212E-3	2.00231E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.18062E-1	-7.98225E-1	-9.13129E0	-9.14209E0	5.43594E-3	9.33886E-2	2.73145E1	-3.26496E1	-3.26248E1	2.68829E1	1.73755E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.99803E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.183E-1	-7.98345E-1	-9.13143E0	-9.14192E0	5.48363E-3	9.32932E-2	2.72853E1	-3.26753E1	-3.25966E1	2.68064E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00192E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.1799E-1	-7.99084E-1	-9.13124E0	-9.1419E0	5.43594E-3	9.3174E-2	2.73004E1	-3.26555E1	-3.26378E1	2.67824E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.17847E-1	-7.98965E-1	-9.13115E0	-9.14159E0	5.05447E-3	9.30071E-2	2.73021E1	-3.26343E1	-3.26602E1	2.67671E1	1.7375E-7	2.51603E-3	2.51603E-3	6.29157E-3	2.0124E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17585E-1	-7.98631E-1	-9.13091E0	-9.14147E0	5.10216E-3	9.33409E-2	2.73201E1	-3.26326E1	-3.2644E1	2.68028E1	1.73679E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9951E-1