[Scan]
initial_time=2016-02-16T02:13:30
final_time=2016-02-16T02:13:50
ip_count=19
run=1030
dataset=6
scan=431
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=7.28285E-10
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.7442E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=8.15165E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=4.82643E-10
mult1=-1.01141E-8
mult2=-2.81733E-9
rf_tmon=-5.5418E-3
rf_agc=3.27959E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.64125E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64751E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20289E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=3.04072E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05294E1
cs_ea1_imon=2.17666E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35453E0
lens1_imon=2.69998E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64344E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.56562E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83878E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=3.81422E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=2.89116E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=1.90376E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63161E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.26352E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.27102E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.73068E-10
tplens_vset=1.4E-1
tplens_vmon=1.62401E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.58653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.44408E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74405E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75756E-1
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00735E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63239E0
os_ef2alow_imon=-2.342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70995E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=2.88287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.29759E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.86201E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.97487E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-4.10272E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.39505E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.36118E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.40226E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33947E1
os_fil1_imon=5.58111E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.31101E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66363E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=1.0088E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62552E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66827E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.09747E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62828E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.35963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.225E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.74929E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.17347E-1	-7.98321E-1	-9.13126E0	-9.14226E0	5.126E-3	9.32217E-2	2.73039E1	-3.26735E1	-3.26188E1	2.68136E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99803E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.17227E-1	-7.9875E-1	-9.13095E0	-9.14221E0	5.126E-3	9.30071E-2	2.73333E1	-3.26338E1	-3.26543E1	2.67998E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.9963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.17132E-1	-7.98512E-1	-9.13091E0	-9.14221E0	4.74453E-3	9.3317E-2	2.73151E1	-3.2652E1	-3.26248E1	2.68286E1	1.73755E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99283E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.17418E-1	-7.98106E-1	-9.13084E0	-9.14183E0	4.86374E-3	9.29832E-2	2.72781E1	-3.26867E1	-3.26056E1	2.67836E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98661E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.17466E-1	-7.98297E-1	-9.13079E0	-9.14166E0	5.34058E-3	9.32932E-2	2.73207E1	-3.26374E1	-3.26356E1	2.68322E1	1.73605E-7	2.5199E-3	2.5199E-3	6.26371E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17013E-1	-7.98845E-1	-9.13124E0	-9.14183E0	4.81606E-3	9.35316E-2	2.72985E1	-3.26711E1	-3.26194E1	2.67758E1	1.73755E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17537E-1	-7.98607E-1	-9.13091E0	-9.14185E0	5.34058E-3	9.30786E-2	2.73015E1	-3.26476E1	-3.26206E1	2.6789E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17204E-1	-7.98392E-1	-9.13105E0	-9.14149E0	5.29289E-3	9.3317E-2	2.72624E1	-3.27011E1	-3.25864E1	2.68123E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1749E-1	-7.98702E-1	-9.13107E0	-9.14204E0	5.34058E-3	9.33647E-2	2.73287E1	-3.26065E1	-3.26242E1	2.68112E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17776E-1	-7.98488E-1	-9.13115E0	-9.14199E0	5.14984E-3	9.3627E-2	2.72997E1	-3.26603E1	-3.26074E1	2.68244E1	1.73753E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.00021E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.17513E-1	-7.98774E-1	-9.13119E0	-9.1419E0	5.88894E-3	9.3174E-2	2.72933E1	-3.26703E1	-3.26478E1	2.67758E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09704E0	-8.1768E-1	-7.98464E-1	-9.13088E0	-9.14171E0	5.72205E-3	9.32455E-2	2.73004E1	-3.26461E1	-3.25835E1	2.67607E1	1.73605E-7	2.51417E-3	2.51417E-3	6.33977E-3	1.9951E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.17204E-1	-7.98488E-1	-9.13095E0	-9.14199E0	5.36442E-3	9.30786E-2	2.72919E1	-3.26747E1	-3.25972E1	2.68082E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29128E-3	1.98661E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.17227E-1	-7.98488E-1	-9.13093E0	-9.14202E0	5.55515E-3	9.31978E-2	2.73057E1	-3.26573E1	-3.25983E1	2.6843E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99803E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17442E-1	-7.98535E-1	-9.13112E0	-9.14199E0	5.31673E-3	9.31978E-2	2.72696E1	-3.26368E1	-3.26488E1	2.67974E1	1.73605E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9951E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.17251E-1	-7.98655E-1	-9.13138E0	-9.14187E0	5.67436E-3	9.32217E-2	2.73057E1	-3.26549E1	-3.26478E1	2.67086E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.17776E-1	-7.98321E-1	-9.13107E0	-9.14209E0	5.72205E-3	9.30548E-2	2.73069E1	-3.26561E1	-3.26194E1	2.67866E1	1.73755E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.17513E-1	-7.98845E-1	-9.13126E0	-9.1419E0	5.48363E-3	9.34124E-2	2.73435E1	-3.2647E1	-3.2647E1	2.67818E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.00192E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.1718E-1	-7.98678E-1	-9.13122E0	-9.14187E0	5.31673E-3	9.34362E-2	2.72491E1	-3.26815E1	-3.26472E1	2.68204E1	1.73755E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00499E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.17132E-1	-7.98607E-1	-9.13117E0	-9.14221E0	5.07832E-3	9.33886E-2	2.72974E1	-3.2675E1	-3.26219E1	2.67812E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00705E-1