[Scan]
initial_time=2016-02-16T02:14:24
final_time=2016-02-16T02:14:44
ip_count=19
run=1030
dataset=6
scan=433
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.17418E-1
ql1_imon=7.25996E-10
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.94912E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=7.79831E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.86553E-10
mult1=-9.88488E-9
mult2=-2.7226E-9
rf_tmon=-4.38625E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=3.52514E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60906E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20175E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=3.08073E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04315E1
cs_ea1_imon=2.1954E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41221E0
lens1_imon=2.8658E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.58725E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=3.03676E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.50988E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=2.86881E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15486E1
os_ea1_imon=1.9135E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.25163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=3.2721E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.96039E-10
tplens_vset=1.4E-1
tplens_vmon=1.59517E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.52524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98703E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.57711E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.99605E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.22352E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74333E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.16613E-1
os_ea2_imon=-8.25669E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.01019E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71552E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60957E0
os_ef2alow_imon=-2.39245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=2.86449E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.26839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72877E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.85193E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=2.5419E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47482E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-4.03064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.72167E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.62937E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5017E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67225E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33929E1
os_fil1_imon=4.10348E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53926E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66597E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30827E1
cs_fil1_imon=1.00844E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62942E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67111E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.31758E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50011E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76749E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-1.94517E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22579E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.74018E-1
res40_imon=-2.46814E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17657E-1	-7.98106E-1	-9.13115E0	-9.1419E0	5.43594E-3	9.31978E-2	2.72909E1	-3.26225E1	-3.26408E1	2.67914E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99977E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17394E-1	-7.98416E-1	-9.13103E0	-9.14185E0	5.10216E-3	9.3174E-2	2.73255E1	-3.26873E1	-3.26356E1	2.67818E1	1.73679E-7	2.51593E-3	2.51593E-3	6.31555E-3	2.0043E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17657E-1	-7.98678E-1	-9.13115E0	-9.14199E0	5.05447E-3	9.33409E-2	2.7312E1	-3.26874E1	-3.26405E1	2.67873E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17394E-1	-7.98488E-1	-9.131E0	-9.14202E0	5.26905E-3	9.31025E-2	2.72672E1	-3.2587E1	-3.26627E1	2.67932E1	1.73605E-7	2.51077E-3	2.51077E-3	6.32328E-3	1.99729E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17823E-1	-7.98059E-1	-9.13105E0	-9.14187E0	5.34058E-3	9.36508E-2	2.72949E1	-3.26518E1	-3.26344E1	2.68094E1	1.7368E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17537E-1	-7.98392E-1	-9.13105E0	-9.14192E0	5.31673E-3	9.31978E-2	2.73082E1	-3.26609E1	-3.26052E1	2.68178E1	1.7368E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17275E-1	-7.98512E-1	-9.13122E0	-9.14209E0	5.36442E-3	9.3317E-2	2.72898E1	-3.26726E1	-3.25824E1	2.68136E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.0064E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16917E-1	-7.98845E-1	-9.13124E0	-9.14228E0	5.48363E-3	9.31025E-2	2.73219E1	-3.26633E1	-3.26615E1	2.68106E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9985E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17108E-1	-7.98655E-1	-9.13081E0	-9.14211E0	5.65052E-3	9.29832E-2	2.72654E1	-3.26627E1	-3.26176E1	2.67914E1	1.73755E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09348E0	-8.16798E-1	-7.98631E-1	-9.13105E0	-9.14185E0	5.6982E-3	9.29356E-2	2.72986E1	-3.26514E1	-3.25971E1	2.6768E1	1.73605E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.97903E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.17084E-1	-7.98035E-1	-9.131E0	-9.14197E0	5.55515E-3	9.30071E-2	2.73207E1	-3.26783E1	-3.26206E1	2.67923E1	1.73605E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.97815E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17466E-1	-7.97749E-1	-9.13103E0	-9.14207E0	5.74589E-3	9.32932E-2	2.73099E1	-3.2629E1	-3.2605E1	2.68029E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.97559E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16989E-1	-7.98178E-1	-9.13103E0	-9.14211E0	5.53131E-3	9.30786E-2	2.73135E1	-3.26879E1	-3.2635E1	2.6816E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.97647E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.16607E-1	-7.98106E-1	-9.13131E0	-9.14218E0	5.53131E-3	9.30548E-2	2.72799E1	-3.26524E1	-3.25936E1	2.67808E1	1.73681E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.98169E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17394E-1	-7.98702E-1	-9.13119E0	-9.14187E0	5.48363E-3	9.33886E-2	2.72889E1	-3.26434E1	-3.26122E1	2.67788E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17275E-1	-7.98559E-1	-9.131E0	-9.14195E0	5.26905E-3	9.30786E-2	2.7269E1	-3.26738E1	-3.26089E1	2.69013E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00673E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17585E-1	-7.98273E-1	-9.131E0	-9.1418E0	5.43594E-3	9.29832E-2	2.73234E1	-3.26933E1	-3.25924E1	2.67509E1	1.73681E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.99754E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17609E-1	-7.98774E-1	-9.13112E0	-9.14197E0	5.17368E-3	9.28879E-2	2.73423E1	-3.26437E1	-3.26231E1	2.67782E1	1.73679E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.00534E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.17609E-1	-7.98464E-1	-9.1311E0	-9.14199E0	5.55515E-3	9.29356E-2	2.72986E1	-3.26419E1	-3.26455E1	2.67986E1	1.73679E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17418E-1	-7.98321E-1	-9.13117E0	-9.14187E0	5.50747E-3	9.31025E-2	2.72877E1	-3.265E1	-3.2617E1	2.68214E1	1.73679E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.99E-1