[Scan]
initial_time=2016-02-16T02:14:51
final_time=2016-02-16T02:15:11
ip_count=19
run=1030
dataset=6
scan=434
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=6.86801E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.8888E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=7.74872E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=4.77982E-10
mult1=-1.0055E-8
mult2=-2.68014E-9
rf_tmon=-3.89598E-3
rf_agc=3.36041E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=3.51357E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.79102E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19748E1
lens5a_imon=1.97519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=3.06667E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02524E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.17552E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34247E0
lens1_imon=2.91136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64278E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.58621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84815E1
cs_ef1a_imon=3.02595E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.56317E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11021E1
os_restr1_imon=2.87386E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=1.90086E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.09406E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24384E0
cs_ionrep_imon=1.25881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=3.28363E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.935E-10
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-1.85626E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26213E1
iondef3_imon=1.51329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26809E1
iondef2_imon=1.58798E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.52526E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=2.04137E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.14884E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.33928E-1
os_ea2_imon=-5.2187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64801E0
os_ef2alow_imon=-2.19063E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.16935E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10361E1
os_restr2_imon=2.88107E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2314E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.30407E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.87734E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=2.76995E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.24359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3524E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=5.01649E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80355E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66872E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=1.00926E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63837E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.26953E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50011E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22545E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.05543E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17418E-1	-7.98559E-1	-9.13105E0	-9.14197E0	5.34058E-3	9.34362E-2	2.72921E1	-3.26767E1	-3.26083E1	2.67798E1	1.73605E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.9917E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17561E-1	-7.98059E-1	-9.13129E0	-9.14204E0	5.38826E-3	9.32932E-2	2.73147E1	-3.26524E1	-3.2647E1	2.67866E1	1.73605E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.97984E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17275E-1	-7.98368E-1	-9.13148E0	-9.14176E0	5.43594E-3	9.32217E-2	2.73068E1	-3.26718E1	-3.25901E1	2.68082E1	1.73753E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.9985E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.17633E-1	-7.98225E-1	-9.1315E0	-9.14176E0	5.24521E-3	9.30071E-2	2.73063E1	-3.26476E1	-3.26224E1	2.67896E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.1768E-1	-7.98297E-1	-9.13136E0	-9.14164E0	5.03063E-3	9.29594E-2	2.73147E1	-3.26356E1	-3.2605E1	2.68046E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.17537E-1	-7.98416E-1	-9.13157E0	-9.14185E0	5.22137E-3	9.35078E-2	2.73442E1	-3.26759E1	-3.2623E1	2.68034E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17227E-1	-7.98297E-1	-9.13153E0	-9.14195E0	5.10216E-3	9.30548E-2	2.72973E1	-3.26428E1	-3.26242E1	2.6777E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.1718E-1	-7.98535E-1	-9.13146E0	-9.14214E0	5.126E-3	9.32217E-2	2.72674E1	-3.26515E1	-3.26023E1	2.68007E1	1.73755E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1706E-1	-7.98059E-1	-9.13124E0	-9.14204E0	5.50747E-3	9.31263E-2	2.72588E1	-3.26573E1	-3.2605E1	2.68022E1	1.73605E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.99061E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17156E-1	-7.98392E-1	-9.13124E0	-9.14204E0	5.4121E-3	9.28879E-2	2.72721E1	-3.26224E1	-3.26356E1	2.68556E1	1.7368E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.17442E-1	-7.98106E-1	-9.13141E0	-9.14218E0	5.24521E-3	9.31978E-2	2.73039E1	-3.26248E1	-3.25972E1	2.6804E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.17418E-1	-7.98202E-1	-9.13141E0	-9.14226E0	5.03063E-3	9.31978E-2	2.73093E1	-3.26657E1	-3.26272E1	2.68028E1	1.73605E-7	2.52428E-3	2.52428E-3	6.29098E-3	1.9911E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.17418E-1	-7.98178E-1	-9.13122E0	-9.14195E0	5.07832E-3	9.34124E-2	2.73165E1	-3.26326E1	-3.26482E1	2.68166E1	1.7368E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98937E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.17394E-1	-7.97844E-1	-9.13136E0	-9.14207E0	4.91142E-3	9.32932E-2	2.73134E1	-3.26496E1	-3.26779E1	2.67986E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99977E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.17275E-1	-7.98225E-1	-9.13124E0	-9.14216E0	5.00679E-3	9.31025E-2	2.73111E1	-3.26639E1	-3.26152E1	2.678E1	1.73605E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.17084E-1	-7.98297E-1	-9.13119E0	-9.14187E0	4.93526E-3	9.31263E-2	2.73255E1	-3.26524E1	-3.26296E1	2.69408E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.98592E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17299E-1	-7.98035E-1	-9.13098E0	-9.1418E0	5.29289E-3	9.29832E-2	2.73267E1	-3.26879E1	-3.26338E1	2.68202E1	1.7368E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.17609E-1	-7.98535E-1	-9.13115E0	-9.14211E0	5.34058E-3	9.30548E-2	2.72974E1	-3.2659E1	-3.25936E1	2.68052E1	1.73679E-7	2.51376E-3	2.51376E-3	6.32371E-3	1.99054E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.17251E-1	-7.98297E-1	-9.13098E0	-9.14214E0	5.45979E-3	9.30071E-2	2.7301E1	-3.26862E1	-3.26036E1	2.6795E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17299E-1	-7.98297E-1	-9.13107E0	-9.14218E0	5.26905E-3	9.30548E-2	2.73257E1	-3.26809E1	-3.26213E1	2.6792E1	1.73753E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.00021E-1