[Scan]
initial_time=2016-02-16T02:15:45
final_time=2016-02-16T02:16:05
ip_count=19
run=1030
dataset=6
scan=436
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.17084E-1
ql1_imon=7.1032E-10
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=2.81191E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=7.1876E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.09119E-10
mult1=-9.81877E-9
mult2=-2.85005E-9
rf_tmon=-5.81939E-3
rf_agc=3.21224E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=3.80039E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65876E0
bslens_imon=2.67023E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20147E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05375E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53945E1
cs_ef1b_imon=3.05307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02264E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04884E1
cs_ea1_imon=2.20084E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34243E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63913E1
os_ef1alow_imon=3.00963E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04044E1
cs_ea2_imon=1.57825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84539E1
cs_ef1a_imon=3.01067E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.90303E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.8873E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14859E1
os_ea1_imon=1.87998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6385E1
os_ef1bup_imon=3.09929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23356E0
cs_ionrep_imon=1.27929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01166E1
cs_anode1_imon=3.27166E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.8469E-10
tplens_vset=1.4E-1
tplens_vmon=1.64839E0
tplens_imon=-1.38539E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26352E1
iondef3_imon=1.52332E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26707E1
iondef2_imon=1.5998E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98485E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.65281E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2886E0
ionrepsh_imon=2.00721E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3415E1
lens5b_imon=2.18936E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75156E1
cs_ef2b_imon=3.1403E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39943E-1
os_ea2_imon=-5.20922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70812E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65751E0
os_ef2alow_imon=-2.35564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.02241E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10498E1
os_restr2_imon=2.85984E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.30033E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.30728E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.11278E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6768E1
iondef4_imon=1.12534E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.88795E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.59173E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09597E0
cs_ionaccel_imon=-2.31046E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47688E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.38549E-6
window_vset=0.0E0
window_vmon=2.11315E-1
window_imon=-6.2149E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.38903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86315E1
mask2_imon=-9.67269E-8
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.26578E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.93554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50172E3
multb_neg_imon=7.59254E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3862E0
defgridb_imon=6.27506E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=4.11914E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.35692E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66708E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30815E1
cs_fil1_imon=1.00873E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63895E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23262E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.46612E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57323E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-1.95097E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29236E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2248E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.73755E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.01112E-1
res40_imon=-2.71359E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.1768E-1	-7.98225E-1	-9.13138E0	-9.14195E0	5.60284E-3	9.31501E-2	2.73039E1	-3.26741E1	-3.26068E1	2.67698E1	1.73827E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9985E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17442E-1	-7.9844E-1	-9.13117E0	-9.14185E0	5.05447E-3	9.33647E-2	2.72843E1	-3.26315E1	-3.26229E1	2.67882E1	1.73827E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1749E-1	-7.97963E-1	-9.13155E0	-9.14207E0	5.126E-3	9.34124E-2	2.7324E1	-3.2682E1	-3.26236E1	2.67955E1	1.73683E-7	2.50818E-3	2.50818E-3	6.31879E-3	1.98267E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.1706E-1	-7.98202E-1	-9.13107E0	-9.14192E0	4.79221E-3	9.32693E-2	2.72889E1	-3.2635E1	-3.26458E1	2.67475E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17299E-1	-7.98368E-1	-9.13105E0	-9.14211E0	5.126E-3	9.32217E-2	2.73526E1	-3.26446E1	-3.25918E1	2.68022E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1718E-1	-7.98392E-1	-9.13131E0	-9.14209E0	5.43594E-3	9.32932E-2	2.7328E1	-3.26523E1	-3.26585E1	2.67965E1	1.73679E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.9951E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.17347E-1	-7.98798E-1	-9.13131E0	-9.14204E0	4.86374E-3	9.31263E-2	2.72707E1	-3.26775E1	-3.26425E1	2.67874E1	1.73676E-7	2.51886E-3	2.51886E-3	6.3126E-3	1.98628E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17537E-1	-7.98512E-1	-9.13129E0	-9.14228E0	5.14984E-3	9.32932E-2	2.72961E1	-3.26645E1	-3.26158E1	2.68046E1	1.73605E-7	2.51642E-3	2.51642E-3	6.31321E-3	1.991E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.17347E-1	-7.98035E-1	-9.13122E0	-9.14192E0	5.34058E-3	9.33647E-2	2.73186E1	-3.26526E1	-3.26015E1	2.67865E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.17204E-1	-7.98178E-1	-9.13126E0	-9.14187E0	5.38826E-3	9.3627E-2	2.72791E1	-3.26422E1	-3.26022E1	2.68298E1	1.73691E-7	2.51278E-3	2.51278E-3	6.31055E-3	1.99615E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.17442E-1	-7.98249E-1	-9.131E0	-9.14216E0	5.38826E-3	9.31263E-2	2.73559E1	-3.2741E1	-3.26056E1	2.67481E1	1.73605E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.99595E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17442E-1	-7.98154E-1	-9.13091E0	-9.14218E0	5.34058E-3	9.32455E-2	2.73163E1	-3.26684E1	-3.26098E1	2.67861E1	1.73691E-7	2.51404E-3	2.51404E-3	6.3137E-3	1.98423E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.1718E-1	-7.98559E-1	-9.13124E0	-9.14166E0	5.14984E-3	9.35555E-2	2.72733E1	-3.26878E1	-3.26456E1	2.67716E1	1.73684E-7	2.5199E-3	2.5199E-3	6.29002E-3	1.98369E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.17847E-1	-7.98488E-1	-9.13131E0	-9.14195E0	4.98295E-3	9.34839E-2	2.72892E1	-3.2629E1	-3.26331E1	2.68508E1	1.73755E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.98419E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17871E-1	-7.98392E-1	-9.13129E0	-9.14173E0	5.17368E-3	9.33886E-2	2.73285E1	-3.26741E1	-3.26104E1	2.67668E1	1.7368E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.98075E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17585E-1	-7.98798E-1	-9.13138E0	-9.14199E0	5.19753E-3	9.33886E-2	2.73033E1	-3.26446E1	-3.26362E1	2.67271E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.1718E-1	-7.98512E-1	-9.13105E0	-9.14211E0	5.24521E-3	9.30786E-2	2.73161E1	-3.27007E1	-3.26434E1	2.67584E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17275E-1	-7.98678E-1	-9.1311E0	-9.14214E0	5.26905E-3	9.30309E-2	2.73255E1	-3.26434E1	-3.25924E1	2.68262E1	1.73605E-7	2.51393E-3	2.51393E-3	6.31269E-3	1.99061E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.17442E-1	-7.98297E-1	-9.13115E0	-9.14211E0	5.05447E-3	9.28164E-2	2.73201E1	-3.26464E1	-3.26254E1	2.67704E1	1.7368E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00673E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17084E-1	-7.98726E-1	-9.13095E0	-9.14214E0	5.10216E-3	9.3174E-2	2.73027E1	-3.26707E1	-3.26352E1	2.6768E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1