[Scan]
initial_time=2016-02-16T02:16:43
final_time=2016-02-16T02:17:05
ip_count=19
run=1030
dataset=6
scan=438
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.16989E-1
ql1_imon=6.89781E-10
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.70069E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=7.15172E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.90093E-10
mult1=-1.0222E-8
mult2=-2.78049E-9
rf_tmon=-3.39489E-3
rf_agc=3.3628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.75927E-10
bslens_vset=-6.2E0
bslens_vmon=-6.57714E0
bslens_imon=2.67776E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20562E1
lens5a_imon=2.00492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.05838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.029E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04599E1
cs_ea1_imon=2.16348E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37669E0
lens1_imon=3.16619E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.99459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.554E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83589E1
cs_ef1a_imon=3.01442E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.79562E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=2.88647E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=1.93484E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23853E0
cs_ionrep_imon=1.23014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.94075E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.27174E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=6.64783E-10
tplens_vset=1.4E-1
tplens_vmon=1.6025E0
tplens_imon=-4.93555E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.53807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.53913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.9881E-4
ql6_vset=1.0E-1
ql6_vmon=9.27687E-2
ql6_imon=3.53777E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.37421E0
ionrepsh_imon=1.99465E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33103E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.49549E-1
os_ea2_imon=-4.0153E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71486E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61077E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.12066E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10523E1
os_restr2_imon=2.87062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23137E2
cs_ionfoca_imon=6.32689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.28461E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.06874E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6855E1
iondef4_imon=1.10539E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.86366E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=2.87485E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-2.05728E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.4705E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-6.80569E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.38922E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.78512E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.75869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50195E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.03452E0
defgridb_imon=6.28441E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33921E1
os_fil1_imon=4.99246E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.88765E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66898E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=1.00775E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62966E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67046E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56608E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.65919E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.78223E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09665E0	-8.1737E-1	-7.97677E-1	-9.13119E0	-9.14207E0	5.22137E-3	9.31025E-2	2.73255E1	-3.2653E1	-3.25942E1	2.67827E1	1.7368E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.98937E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16917E-1	-7.98249E-1	-9.13131E0	-9.14214E0	4.88758E-3	9.34601E-2	2.73104E1	-3.27056E1	-3.25747E1	2.67962E1	1.73531E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.17108E-1	-7.97772E-1	-9.13126E0	-9.14216E0	5.17368E-3	9.36031E-2	2.73279E1	-3.26476E1	-3.26494E1	2.67788E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98764E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16703E-1	-7.98011E-1	-9.13115E0	-9.1423E0	4.86374E-3	9.34601E-2	2.72294E1	-3.26536E1	-3.26398E1	2.68118E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.17299E-1	-7.98106E-1	-9.13136E0	-9.14228E0	4.98295E-3	9.2864E-2	2.73222E1	-3.26166E1	-3.2672E1	2.67908E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.17442E-1	-7.98011E-1	-9.1311E0	-9.14237E0	4.76837E-3	9.30786E-2	2.72883E1	-3.26873E1	-3.25828E1	2.67938E1	1.73679E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.1706E-1	-7.97939E-1	-9.131E0	-9.14197E0	4.673E-3	9.29594E-2	2.7308E1	-3.27145E1	-3.26313E1	2.67984E1	1.73831E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.1687E-1	-7.98225E-1	-9.13105E0	-9.14207E0	4.673E-3	9.27925E-2	2.72943E1	-3.26711E1	-3.26116E1	2.68178E1	1.73679E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.98491E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17323E-1	-7.98464E-1	-9.13131E0	-9.14173E0	5.05447E-3	9.27925E-2	2.72947E1	-3.26891E1	-3.26083E1	2.67956E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98419E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16917E-1	-7.9813E-1	-9.1311E0	-9.1419E0	4.91142E-3	9.26495E-2	2.73015E1	-3.26488E1	-3.26236E1	2.68148E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16941E-1	-7.98464E-1	-9.1311E0	-9.14185E0	5.00679E-3	9.28879E-2	2.73249E1	-3.26434E1	-3.26086E1	2.67962E1	1.7368E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.17466E-1	-7.98559E-1	-9.13076E0	-9.14176E0	4.95911E-3	9.28879E-2	2.72937E1	-3.26909E1	-3.26056E1	2.6804E1	1.7368E-7	2.50898E-3	2.50898E-3	6.31837E-3	2.00151E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.1718E-1	-7.98106E-1	-9.13088E0	-9.14195E0	5.10216E-3	9.32455E-2	2.72829E1	-3.26897E1	-3.26098E1	2.67049E1	1.73605E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99803E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.17227E-1	-7.97606E-1	-9.13098E0	-9.14197E0	5.05447E-3	9.29594E-2	2.73586E1	-3.26795E1	-3.26044E1	2.68124E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17299E-1	-7.97868E-1	-9.13091E0	-9.14209E0	5.31673E-3	9.29832E-2	2.73093E1	-3.26843E1	-3.26494E1	2.67896E1	1.73605E-7	2.5199E-3	2.5199E-3	6.28552E-3	1.98764E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.17251E-1	-7.9782E-1	-9.13079E0	-9.14202E0	4.88758E-3	9.31263E-2	2.72874E1	-3.26431E1	-3.26296E1	2.67872E1	1.73605E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98764E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16798E-1	-7.9813E-1	-9.131E0	-9.14204E0	4.81606E-3	9.29356E-2	2.72829E1	-3.27083E1	-3.26194E1	2.67686E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98247E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16774E-1	-7.98059E-1	-9.13117E0	-9.14202E0	4.8399E-3	9.31025E-2	2.72715E1	-3.26633E1	-3.26891E1	2.67577E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98247E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16822E-1	-7.98202E-1	-9.13146E0	-9.14195E0	5.24521E-3	9.29117E-2	2.7321E1	-3.26526E1	-3.26785E1	2.67818E1	1.73679E-7	2.50989E-3	2.50989E-3	6.34518E-3	1.98322E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16989E-1	-7.98392E-1	-9.13112E0	-9.14185E0	5.14984E-3	9.27687E-2	2.72883E1	-3.26753E1	-3.26476E1	2.6855E1	1.73605E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.98937E-1