[Scan]
initial_time=2016-02-16T02:17:13
final_time=2016-02-16T02:17:36
ip_count=19
run=1030
dataset=6
scan=439
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09371E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=6.85847E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.78604E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=6.45292E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=4.85218E-10
mult1=-1.02914E-8
mult2=-2.64094E-9
rf_tmon=-3.91367E-3
rf_agc=3.40052E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=3.57151E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.9149E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.9674E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.05348E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53459E1
cs_ef1b_imon=3.05863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=2.20065E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42742E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.99642E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.58621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83855E1
cs_ef1a_imon=3.0138E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.66879E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11233E1
os_restr1_imon=2.88139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15606E1
os_ea1_imon=1.89555E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21906E0
cs_ionrep_imon=1.28217E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01914E1
cs_anode1_imon=3.30468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.91974E-10
tplens_vset=1.4E-1
tplens_vmon=1.57949E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.49029E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.58373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.5007E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=2.01624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.22082E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74414E1
cs_ef2b_imon=3.12535E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41597E-1
os_ea2_imon=-7.6255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00881E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71298E1
cs_ef2a_imon=3.19694E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63087E0
os_ef2alow_imon=-2.48075E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52053E-1
os_ef2bup_imon=-5.2401E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10747E1
os_restr2_imon=2.88348E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.29651E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.85106E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=2.64955E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12667E0
cs_ionaccel_imon=-1.87258E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47355E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56492E1
einzel_imon=7.85118E-6
window_vset=0.0E0
window_vmon=1.97993E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.71268E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.1728E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58273E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=5.1038E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.57702E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66843E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=1.00931E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63061E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6686E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.28691E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.58196E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.07839E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21731E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22538E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.96479E-1
res40_imon=-2.53288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16989E-1	-7.98488E-1	-9.13119E0	-9.14197E0	5.05447E-3	9.32455E-2	2.73478E1	-3.2629E1	-3.26765E1	2.68196E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9917E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.17156E-1	-7.98321E-1	-9.13103E0	-9.14192E0	5.05447E-3	9.29117E-2	2.73106E1	-3.26383E1	-3.26395E1	2.6789E1	1.73605E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17037E-1	-7.97796E-1	-9.1311E0	-9.14171E0	5.26905E-3	9.30786E-2	2.7301E1	-3.2688E1	-3.26036E1	2.6792E1	1.73528E-7	2.51581E-3	2.51581E-3	6.29624E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17204E-1	-7.98273E-1	-9.13093E0	-9.14216E0	5.29289E-3	9.30309E-2	2.73275E1	-3.26868E1	-3.26679E1	2.6768E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16798E-1	-7.98321E-1	-9.13165E0	-9.14199E0	4.95911E-3	9.2864E-2	2.7291E1	-3.26444E1	-3.2648E1	2.67956E1	1.73605E-7	2.51552E-3	2.51552E-3	6.35692E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17347E-1	-7.97939E-1	-9.13122E0	-9.14199E0	4.91142E-3	9.29832E-2	2.73452E1	-3.26301E1	-3.26384E1	2.67728E1	1.73755E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17132E-1	-7.98106E-1	-9.13141E0	-9.14204E0	5.05447E-3	9.33886E-2	2.73634E1	-3.26597E1	-3.26224E1	2.68279E1	1.73605E-7	2.51225E-3	2.51225E-3	6.34588E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.17275E-1	-7.98035E-1	-9.13162E0	-9.14202E0	4.79221E-3	9.34839E-2	2.72763E1	-3.265E1	-3.26284E1	2.67889E1	1.73679E-7	2.51847E-3	2.51847E-3	6.34518E-3	1.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16822E-1	-7.9813E-1	-9.13172E0	-9.14221E0	5.126E-3	9.34362E-2	2.72955E1	-3.26266E1	-3.26284E1	2.6818E1	1.73681E-7	2.5147E-3	2.5147E-3	6.28511E-3	1.98169E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.17227E-1	-7.98297E-1	-9.1311E0	-9.14202E0	5.00679E-3	9.34124E-2	2.72763E1	-3.26945E1	-3.2644E1	2.67902E1	1.73605E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9883E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16846E-1	-7.98631E-1	-9.13119E0	-9.14214E0	5.10216E-3	9.34124E-2	2.73448E1	-3.26633E1	-3.26122E1	2.67806E1	1.73642E-7	2.51716E-3	2.51716E-3	6.31288E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16941E-1	-7.98273E-1	-9.13098E0	-9.14199E0	5.10216E-3	9.3317E-2	2.73016E1	-3.26331E1	-3.26502E1	2.68208E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.1687E-1	-7.98702E-1	-9.13103E0	-9.14216E0	5.10216E-3	9.31025E-2	2.73069E1	-3.27013E1	-3.2615E1	2.67968E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00673E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.17251E-1	-7.9875E-1	-9.13131E0	-9.14211E0	5.07832E-3	9.32932E-2	2.73605E1	-3.26461E1	-3.2626E1	2.68076E1	1.73605E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.00673E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.17037E-1	-7.98535E-1	-9.13131E0	-9.14257E0	4.95911E-3	9.34601E-2	2.72833E1	-3.27222E1	-3.25682E1	2.68244E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.1737E-1	-7.98488E-1	-9.13115E0	-9.14245E0	4.93526E-3	9.30309E-2	2.7267E1	-3.26841E1	-3.2618E1	2.68138E1	1.73605E-7	2.50882E-3	2.50882E-3	6.29665E-3	1.9883E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16917E-1	-7.98321E-1	-9.13131E0	-9.14216E0	5.29289E-3	9.30548E-2	2.73223E1	-3.26362E1	-3.26744E1	2.67777E1	1.73605E-7	2.51679E-3	2.51679E-3	6.31779E-3	1.98301E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17251E-1	-7.98631E-1	-9.13129E0	-9.14233E0	5.26905E-3	9.32932E-2	2.72998E1	-3.2688E1	-3.26313E1	2.67822E1	1.73683E-7	2.51498E-3	2.51498E-3	6.33592E-3	1.99523E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.17013E-1	-7.9844E-1	-9.1316E0	-9.14233E0	5.31673E-3	9.3317E-2	2.72939E1	-3.26791E1	-3.25883E1	2.68094E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09371E0	-8.16822E-1	-7.98488E-1	-9.13141E0	-9.14223E0	4.86374E-3	9.31978E-2	2.73134E1	-3.26655E1	-3.26142E1	2.67812E1	1.73605E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9883E-1