[Scan]
initial_time=2016-02-16T02:18:14
final_time=2016-02-16T02:18:36
ip_count=19
run=1030
dataset=6
scan=441
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=6.95384E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.95544E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=7.18689E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=5.18191E-10
mult1=-9.80059E-9
mult2=-2.68069E-9
rf_tmon=-4.42831E-3
rf_agc=3.37542E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=3.76844E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53388E1
cs_ef1b_imon=3.0573E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.1918E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65023E1
os_ef1alow_imon=3.00865E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.5703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=2.99387E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.77452E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=2.90269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=1.88321E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.27866E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=3.29264E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.63507E-10
tplens_vset=1.4E-1
tplens_vmon=1.62161E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2605E1
iondef3_imon=1.50794E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98717E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.65353E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=2.02994E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.19757E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74333E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71551E-1
os_ea2_imon=-3.7505E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06047E2
lens4b_imon=2.00814E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.22345E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62699E0
os_ef2alow_imon=-2.73483E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.11529E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23098E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.31308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72576E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67487E1
iondef4_imon=1.06827E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.86241E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=2.92003E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.65724E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47035E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=8.08428E-6
window_vset=0.0E0
window_vmon=2.2395E-1
window_imon=-1.21396E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39513E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.60271E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.78078E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.18093E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55796E0
defgridb_imon=6.359E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33939E1
os_fil1_imon=5.01048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.46428E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66729E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30805E1
cs_fil1_imon=1.00966E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66781E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55223E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.01125E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22553E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.98764E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.8483E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16703E-1	-7.97868E-1	-9.13124E0	-9.14223E0	5.29289E-3	9.26971E-2	2.73147E1	-3.26494E1	-3.26549E1	2.67944E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00534E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16894E-1	-7.97796E-1	-9.13124E0	-9.14216E0	5.55515E-3	9.31263E-2	2.73147E1	-3.26807E1	-3.25912E1	2.67998E1	1.73529E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.98937E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.1656E-1	-7.98178E-1	-9.13146E0	-9.14226E0	5.45979E-3	9.30786E-2	2.73068E1	-3.26718E1	-3.26202E1	2.68169E1	1.73681E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16393E-1	-7.98273E-1	-9.13122E0	-9.14223E0	4.93526E-3	9.3317E-2	2.72979E1	-3.26254E1	-3.26326E1	2.68214E1	1.73605E-7	2.51919E-3	2.51919E-3	6.32328E-3	1.98561E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16607E-1	-7.97868E-1	-9.13091E0	-9.14204E0	4.98295E-3	9.31025E-2	2.72889E1	-3.26763E1	-3.26169E1	2.68049E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16393E-1	-7.98321E-1	-9.13117E0	-9.14216E0	5.126E-3	9.32693E-2	2.73104E1	-3.26661E1	-3.26242E1	2.67668E1	1.73657E-7	2.51687E-3	2.51687E-3	6.30361E-3	1.98924E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16917E-1	-7.9782E-1	-9.13129E0	-9.14209E0	5.00679E-3	9.29117E-2	2.73016E1	-3.26638E1	-3.2606E1	2.68192E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16512E-1	-7.9813E-1	-9.13138E0	-9.14216E0	5.10216E-3	9.33409E-2	2.73069E1	-3.26446E1	-3.265E1	2.67962E1	1.7368E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.00499E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16441E-1	-7.97963E-1	-9.13129E0	-9.14235E0	4.86374E-3	9.3317E-2	2.72629E1	-3.26554E1	-3.26321E1	2.67595E1	1.73605E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.00847E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.17108E-1	-7.97153E-1	-9.13138E0	-9.14223E0	5.05447E-3	9.3174E-2	2.73243E1	-3.26188E1	-3.26434E1	2.68119E1	1.73755E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1706E-1	-7.97844E-1	-9.13126E0	-9.14221E0	5.26905E-3	9.33886E-2	2.73045E1	-3.27011E1	-3.26056E1	2.67752E1	1.73605E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.9911E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17132E-1	-7.97582E-1	-9.13136E0	-9.14204E0	5.126E-3	9.34362E-2	2.73045E1	-3.26619E1	-3.2601E1	2.68041E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00325E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16894E-1	-7.97844E-1	-9.13105E0	-9.14216E0	5.24521E-3	9.31501E-2	2.72683E1	-3.26435E1	-3.26454E1	2.68799E1	1.73676E-7	2.51886E-3	2.51886E-3	6.323E-3	2.01095E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.17251E-1	-7.97415E-1	-9.13124E0	-9.14214E0	5.00679E-3	9.3627E-2	2.73141E1	-3.26741E1	-3.26302E1	2.67992E1	1.73684E-7	2.51411E-3	2.51411E-3	6.3074E-3	2.00202E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16631E-1	-7.98321E-1	-9.13129E0	-9.14221E0	4.76837E-3	9.30548E-2	2.72984E1	-3.26432E1	-3.26395E1	2.68444E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98661E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16894E-1	-7.98297E-1	-9.13117E0	-9.1423E0	4.72069E-3	9.33886E-2	2.72991E1	-3.26579E1	-3.2626E1	2.6789E1	1.73605E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.00818E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.1687E-1	-7.98512E-1	-9.13112E0	-9.14211E0	4.81606E-3	9.31501E-2	2.73291E1	-3.26711E1	-3.26392E1	2.67955E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16917E-1	-7.98535E-1	-9.13124E0	-9.14216E0	4.64916E-3	9.31501E-2	2.73225E1	-3.26335E1	-3.26532E1	2.67968E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.17299E-1	-7.98368E-1	-9.13126E0	-9.14228E0	5.17368E-3	9.32932E-2	2.73532E1	-3.26434E1	-3.26236E1	2.67974E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.1718E-1	-7.98297E-1	-9.13131E0	-9.14221E0	4.69685E-3	9.33886E-2	2.72576E1	-3.26536E1	-3.2605E1	2.67487E1	1.7368E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.98764E-1