[Scan]
initial_time=2016-02-16T02:19:15
final_time=2016-02-16T02:19:37
ip_count=19
run=1030
dataset=6
scan=443
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09711E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.16894E-1
ql1_imon=6.4559E-10
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.98131E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=6.2412E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.70662E-10
mult1=-9.76447E-9
mult2=-2.88229E-9
rf_tmon=-8.56199E-3
rf_agc=2.99089E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=3.78084E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=2.00598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05224E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.0692E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04674E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=2.19852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41267E0
lens1_imon=2.72377E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=3.01261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.57842E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.02451E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.81935E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=2.87134E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=1.9044E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.12037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=1.25775E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.2566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.82521E-10
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.51329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26296E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98664E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=3.56412E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=2.03748E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.15137E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.92918E-1
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00513E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70843E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67444E0
os_ef2alow_imon=-2.342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.10929E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23107E2
cs_ionfoca_imon=6.32406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.29542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68123E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.92676E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=2.98738E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55877E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=1.75296E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.86299E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.42953E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.28961E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55615E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33938E1
os_fil1_imon=4.84229E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90567E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66927E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30858E1
cs_fil1_imon=1.00897E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6278E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66971E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.86051E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53318E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22616E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.98491E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.6681E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16512E-1	-7.98464E-1	-9.13117E0	-9.14195E0	5.17368E-3	9.28164E-2	2.72985E1	-3.26903E1	-3.25773E1	2.67984E1	1.73605E-7	2.50882E-3	2.50882E-3	6.29128E-3	1.9917E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16798E-1	-7.98059E-1	-9.13134E0	-9.14202E0	5.05447E-3	9.27687E-2	2.72916E1	-3.26487E1	-3.26229E1	2.67733E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99803E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.1687E-1	-7.9813E-1	-9.13117E0	-9.14221E0	4.88758E-3	9.26733E-2	2.73283E1	-3.26515E1	-3.26654E1	2.68024E1	1.73681E-7	2.51915E-3	2.51915E-3	6.30182E-3	1.9852E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.17227E-1	-7.98082E-1	-9.13126E0	-9.14218E0	4.76837E-3	9.29594E-2	2.73021E1	-3.26609E1	-3.25858E1	2.67595E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16727E-1	-7.98583E-1	-9.13136E0	-9.14221E0	4.95911E-3	9.30309E-2	2.7299E1	-3.26425E1	-3.26021E1	2.68262E1	1.73679E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.17108E-1	-7.9844E-1	-9.13138E0	-9.14228E0	5.19753E-3	9.29594E-2	2.7332E1	-3.26409E1	-3.26843E1	2.68194E1	1.73681E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.0064E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16774E-1	-7.98154E-1	-9.13126E0	-9.14237E0	4.673E-3	9.30309E-2	2.72787E1	-3.26759E1	-3.26236E1	2.68214E1	1.73674E-7	2.51223E-3	2.51223E-3	6.31744E-3	1.98914E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16703E-1	-7.9813E-1	-9.131E0	-9.14204E0	4.88758E-3	9.27687E-2	2.72854E1	-3.26446E1	-3.26277E1	2.68169E1	1.73605E-7	2.51793E-3	2.51793E-3	6.31548E-3	1.9951E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16774E-1	-7.9782E-1	-9.13107E0	-9.14228E0	4.91142E-3	9.3174E-2	2.73326E1	-3.26321E1	-3.26205E1	2.68338E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16989E-1	-7.97915E-1	-9.13136E0	-9.14221E0	4.98295E-3	9.32217E-2	2.73345E1	-3.26813E1	-3.26627E1	2.68146E1	1.73605E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.9852E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.16846E-1	-7.98392E-1	-9.13124E0	-9.1424E0	5.19753E-3	9.30309E-2	2.72951E1	-3.26425E1	-3.2652E1	2.67662E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16917E-1	-7.98345E-1	-9.13134E0	-9.14218E0	5.43594E-3	9.29117E-2	2.73225E1	-3.27029E1	-3.26723E1	2.6807E1	1.73679E-7	2.51593E-3	2.51593E-3	6.31555E-3	1.98712E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.17227E-1	-7.98202E-1	-9.13143E0	-9.14214E0	5.126E-3	9.29832E-2	2.73111E1	-3.26404E1	-3.26158E1	2.68436E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16512E-1	-7.98464E-1	-9.13129E0	-9.14204E0	5.10216E-3	9.29594E-2	2.73021E1	-3.26789E1	-3.26026E1	2.67842E1	1.73755E-7	2.50898E-3	2.50898E-3	6.32936E-3	2.00499E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16894E-1	-7.98321E-1	-9.13115E0	-9.14216E0	4.81606E-3	9.32693E-2	2.73508E1	-3.26717E1	-3.26308E1	2.6825E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98937E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.17204E-1	-7.9782E-1	-9.13124E0	-9.1418E0	5.03063E-3	9.30786E-2	2.72913E1	-3.26512E1	-3.26092E1	2.6774E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99456E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.1706E-1	-7.9813E-1	-9.13153E0	-9.14214E0	5.14984E-3	9.26495E-2	2.73237E1	-3.26825E1	-3.25978E1	2.68028E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98419E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.16798E-1	-7.98178E-1	-9.13136E0	-9.14183E0	5.19753E-3	9.28879E-2	2.73242E1	-3.26515E1	-3.26944E1	2.68244E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98764E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09704E0	-8.17204E-1	-7.97701E-1	-9.13105E0	-9.14202E0	4.91142E-3	9.31501E-2	2.73464E1	-3.26431E1	-3.26402E1	2.67349E1	1.73605E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.99227E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09711E0	-8.16894E-1	-7.98464E-1	-9.13143E0	-9.14183E0	4.95911E-3	9.28402E-2	2.73189E1	-3.26296E1	-3.26218E1	2.68123E1	1.73753E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.98491E-1