[Scan]
initial_time=2016-02-16T02:20:16
final_time=2016-02-16T02:20:38
ip_count=19
run=1030
dataset=6
scan=445
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=6.46293E-10
ql2_vset=
ql2_vmon=-7.9782E-1
ql2_imon=2.90167E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=6.06775E-10
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=4.90034E-10
mult1=-8.74102E-9
mult2=-2.90225E-9
rf_tmon=-4.62658E-3
rf_agc=3.26787E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.48496E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65818E0
bslens_imon=2.72585E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20089E1
lens5a_imon=2.00582E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53161E1
cs_ef1b_imon=3.09476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04536E1
cs_ea1_imon=2.18554E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32911E0
lens1_imon=2.8649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65017E1
os_ef1alow_imon=2.96725E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03783E1
cs_ea2_imon=1.56712E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83348E1
cs_ef1a_imon=3.03E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.67773E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11599E1
os_restr1_imon=2.86659E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=1.8918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63126E1
os_ef1bup_imon=3.09912E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2353E0
cs_ionrep_imon=1.27547E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93451E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02033E1
cs_anode1_imon=3.27327E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.96146E-10
tplens_vset=1.4E-1
tplens_vmon=1.62289E0
tplens_imon=-2.21968E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.51255E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.58346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.36742E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28107E0
ionrepsh_imon=2.01973E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33617E1
lens5b_imon=2.20431E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7397E1
cs_ef2b_imon=3.13704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55007E-1
os_ea2_imon=-3.74921E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71934E1
cs_ef2a_imon=3.20515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59758E0
os_ef2alow_imon=-2.64013E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95373E-1
os_ef2bup_imon=-4.89833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10916E1
os_restr2_imon=2.8884E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31562E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01261E1
cs_anode2_imon=2.25423E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72745E1
iondef1_imon=1.10792E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.06104E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.8453E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.47633E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16425E0
cs_ionaccel_imon=-1.58653E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47162E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5631E1
einzel_imon=8.08378E-6
window_vset=0.0E0
window_vmon=1.97314E-1
window_imon=-1.33488E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.3953E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-8.31563E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.7003E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.49754E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.52997E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56311E0
defgridb_imon=6.44192E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33925E1
os_fil1_imon=5.26897E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.05397E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66729E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30801E1
cs_fil1_imon=1.0085E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62601E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66992E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26993E-2
os_fil2_imon=-2.34223E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.40484E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61673E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27723E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08029E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2259E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32945E-1
res40_imon=-2.49249E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16488E-1	-7.98178E-1	-9.13126E0	-9.14195E0	5.36442E-3	9.30071E-2	2.72886E1	-3.26673E1	-3.26502E1	2.68725E1	1.73677E-7	2.51182E-3	2.51182E-3	6.3074E-3	1.99896E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.1687E-1	-7.97558E-1	-9.13129E0	-9.14218E0	5.38826E-3	9.29117E-2	2.73014E1	-3.27056E1	-3.25966E1	2.67686E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9934E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16417E-1	-7.98011E-1	-9.13162E0	-9.14214E0	5.38826E-3	9.31501E-2	2.73293E1	-3.26585E1	-3.26703E1	2.68154E1	1.73758E-7	2.50803E-3	2.50803E-3	6.3074E-3	1.97818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16798E-1	-7.97939E-1	-9.13155E0	-9.14207E0	5.00679E-3	9.29832E-2	2.73297E1	-3.26735E1	-3.26152E1	2.67764E1	1.73753E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16822E-1	-7.98464E-1	-9.13157E0	-9.14207E0	5.62668E-3	9.29117E-2	2.73045E1	-3.26248E1	-3.26343E1	2.67677E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98247E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.1687E-1	-7.98154E-1	-9.13131E0	-9.14216E0	5.36442E-3	9.30786E-2	2.73033E1	-3.26762E1	-3.257E1	2.68448E1	1.73605E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.97815E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16798E-1	-7.98178E-1	-9.13141E0	-9.14197E0	5.17368E-3	9.30071E-2	2.72973E1	-3.26573E1	-3.26627E1	2.68064E1	1.73679E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.97815E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16631E-1	-7.97987E-1	-9.13138E0	-9.14214E0	5.126E-3	9.32455E-2	2.73116E1	-3.26726E1	-3.26006E1	2.67908E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16798E-1	-7.98368E-1	-9.13126E0	-9.14199E0	5.19753E-3	9.31025E-2	2.7245E1	-3.26819E1	-3.2596E1	2.68209E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9985E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.16655E-1	-7.98821E-1	-9.13146E0	-9.14197E0	5.67436E-3	9.30071E-2	2.73141E1	-3.2638E1	-3.2641E1	2.68328E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.16584E-1	-7.98535E-1	-9.13134E0	-9.14207E0	5.45979E-3	9.31501E-2	2.73087E1	-3.26476E1	-3.25918E1	2.67614E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99283E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.16846E-1	-7.98321E-1	-9.13138E0	-9.14207E0	5.34058E-3	9.31978E-2	2.72941E1	-3.2648E1	-3.26046E1	2.67806E1	1.73758E-7	2.51248E-3	2.51248E-3	6.3074E-3	1.98696E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16631E-1	-7.98106E-1	-9.13124E0	-9.14209E0	5.36442E-3	9.29117E-2	2.73364E1	-3.26708E1	-3.26213E1	2.67637E1	1.73605E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16441E-1	-7.98559E-1	-9.13136E0	-9.14214E0	5.36442E-3	9.32932E-2	2.73075E1	-3.26383E1	-3.26138E1	2.67818E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.98491E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16345E-1	-7.98368E-1	-9.13136E0	-9.14214E0	5.29289E-3	9.3174E-2	2.72889E1	-3.26939E1	-3.2617E1	2.68088E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.99224E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16441E-1	-7.98273E-1	-9.13143E0	-9.14214E0	5.36442E-3	9.31025E-2	2.7321E1	-3.26809E1	-3.26001E1	2.68046E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16655E-1	-7.98011E-1	-9.13119E0	-9.14192E0	5.53131E-3	9.33647E-2	2.72809E1	-3.26408E1	-3.25953E1	2.6792E1	1.73679E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9917E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16703E-1	-7.98368E-1	-9.13124E0	-9.14223E0	5.36442E-3	9.30548E-2	2.72974E1	-3.26921E1	-3.26602E1	2.68076E1	1.73531E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16298E-1	-7.97844E-1	-9.13115E0	-9.14226E0	5.36442E-3	9.30548E-2	2.72856E1	-3.2662E1	-3.26207E1	2.68206E1	1.73605E-7	2.51096E-3	2.51096E-3	6.29665E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16751E-1	-7.9782E-1	-9.13141E0	-9.1423E0	5.07832E-3	9.31978E-2	2.72745E1	-3.26855E1	-3.2617E1	2.6801E1	1.73605E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.00705E-1