[Scan]
initial_time=2016-02-16T02:20:46
final_time=2016-02-16T02:21:08
ip_count=19
run=1030
dataset=6
scan=446
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08862E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=6.34027E-10
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.61247E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=6.04522E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.60732E-10
mult1=-1.05074E-8
mult2=-2.80926E-9
rf_tmon=-4.58558E-3
rf_agc=3.347E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=3.91924E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.69637E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05244E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.08181E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.026E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04507E1
cs_ea1_imon=2.18711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37556E0
lens1_imon=2.48728E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.57679E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=3.03063E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.09722E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=2.87782E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=1.90016E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63347E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.2765E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.28579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.94489E-10
tplens_vset=1.4E-1
tplens_vmon=1.61079E0
tplens_imon=-4.69992E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26184E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26712E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=3.70324E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=2.03642E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.88374E-1
os_ea2_imon=-2.70506E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.21624E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60597E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67991E-1
os_ef2bup_imon=-5.05578E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=2.87566E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.2875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.10851E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68575E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.90083E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.00002E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47057E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=8.03382E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.82261E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.4311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50184E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.37703E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33941E1
os_fil1_imon=5.69523E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50923E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66648E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00792E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6263E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66945E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60379E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22582E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33863E-3
inlet_lpb_pmon=1.98301E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.53596E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16655E-1	-7.98225E-1	-9.13134E0	-9.14233E0	5.29289E-3	9.31263E-2	2.73022E1	-3.26503E1	-3.26121E1	2.68209E1	1.73755E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.1687E-1	-7.97939E-1	-9.13119E0	-9.14226E0	4.69685E-3	9.28164E-2	2.73216E1	-3.26603E1	-3.26248E1	2.67932E1	1.73677E-7	2.51287E-3	2.51287E-3	6.32328E-3	1.98894E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16965E-1	-7.98368E-1	-9.13105E0	-9.14216E0	4.86374E-3	9.30071E-2	2.73016E1	-3.26767E1	-3.26378E1	2.67984E1	1.73605E-7	2.51581E-3	2.51581E-3	6.30182E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.17227E-1	-7.98178E-1	-9.13126E0	-9.14214E0	4.95911E-3	9.2864E-2	2.73393E1	-3.26767E1	-3.26178E1	2.67986E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.1656E-1	-7.98249E-1	-9.13122E0	-9.14223E0	5.17368E-3	9.32932E-2	2.72865E1	-3.26603E1	-3.25906E1	2.67758E1	1.73605E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16798E-1	-7.9782E-1	-9.13146E0	-9.14173E0	4.76837E-3	9.29594E-2	2.72973E1	-3.26771E1	-3.26092E1	2.6781E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16417E-1	-7.97987E-1	-9.13112E0	-9.14195E0	5.34058E-3	9.30548E-2	2.72915E1	-3.26649E1	-3.26236E1	2.68046E1	1.73755E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.1625E-1	-7.97915E-1	-9.13115E0	-9.14204E0	4.98295E-3	9.30786E-2	2.73628E1	-3.26843E1	-3.2614E1	2.68058E1	1.73753E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.01047E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16417E-1	-7.9813E-1	-9.13134E0	-9.14195E0	5.24521E-3	9.32217E-2	2.72915E1	-3.26349E1	-3.26048E1	2.6792E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.01197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16774E-1	-7.98011E-1	-9.13093E0	-9.14207E0	5.22137E-3	9.32932E-2	2.73225E1	-3.2644E1	-3.26242E1	2.67451E1	1.73679E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.98661E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16536E-1	-7.98392E-1	-9.13112E0	-9.14178E0	5.19753E-3	9.28879E-2	2.73228E1	-3.26703E1	-3.26183E1	2.68046E1	1.7368E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.9963E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.17132E-1	-7.97892E-1	-9.13095E0	-9.14192E0	5.55515E-3	9.30071E-2	2.72803E1	-3.26514E1	-3.26313E1	2.6774E1	1.73827E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9968E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.17084E-1	-7.98297E-1	-9.13122E0	-9.14216E0	5.57899E-3	9.31501E-2	2.72964E1	-3.26622E1	-3.26716E1	2.67806E1	1.73679E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.98661E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.16679E-1	-7.98249E-1	-9.131E0	-9.14187E0	5.24521E-3	9.27448E-2	2.72797E1	-3.26614E1	-3.26172E1	2.67577E1	1.73681E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.00108E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0968E0	-8.16703E-1	-7.98202E-1	-9.13148E0	-9.1418E0	5.24521E-3	9.30071E-2	2.72793E1	-3.26807E1	-3.26603E1	2.6783E1	1.7368E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16369E-1	-7.98106E-1	-9.13126E0	-9.14176E0	5.14984E-3	9.32693E-2	2.72871E1	-3.26819E1	-3.26314E1	2.67854E1	1.73679E-7	2.51203E-3	2.51203E-3	6.33977E-3	2.00705E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16751E-1	-7.97629E-1	-9.13115E0	-9.1418E0	4.93526E-3	9.30786E-2	2.73147E1	-3.26446E1	-3.26549E1	2.68238E1	1.73681E-7	2.51136E-3	2.51136E-3	6.32978E-3	1.99754E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.16727E-1	-7.98368E-1	-9.13146E0	-9.14178E0	5.17368E-3	9.29832E-2	2.72626E1	-3.26449E1	-3.26549E1	2.67758E1	1.7368E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.16631E-1	-7.98702E-1	-9.13141E0	-9.14173E0	5.48363E-3	9.30071E-2	2.72954E1	-3.26704E1	-3.2638E1	2.67668E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16584E-1	-7.98464E-1	-9.13146E0	-9.14176E0	5.14984E-3	9.30071E-2	2.73293E1	-3.26712E1	-3.26184E1	2.68575E1	1.73605E-7	2.51575E-3	2.51575E-3	6.33863E-3	1.98301E-1