[Scan]
initial_time=2016-02-16T02:21:16
final_time=2016-02-16T02:21:38
ip_count=19
run=1030
dataset=6
scan=447
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=5.70571E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.58398E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=5.69248E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=5.0652E-10
mult1=-1.04096E-8
mult2=-2.82713E-9
rf_tmon=-3.45945E-3
rf_agc=3.42529E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.85511E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20343E1
lens5a_imon=1.98235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=3.07136E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04471E1
cs_ea1_imon=2.18855E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38998E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.57391E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.0346E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.93701E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15131E1
os_ea1_imon=1.88466E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.28335E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01509E1
cs_anode1_imon=3.28435E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=6.47831E-10
tplens_vset=1.4E-1
tplens_vmon=1.65285E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2685E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26172E1
iondef2_imon=1.60888E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.45397E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=2.01876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.21595E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65542E-1
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00922E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61197E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.87062E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.28641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72662E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68454E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.87232E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=2.88296E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10311E0
cs_ionaccel_imon=-2.04287E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.96895E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.6676E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.79881E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.501E3
multb_neg_imon=7.56666E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=6.359E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33925E1
os_fil1_imon=6.32593E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47319E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66814E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30805E1
cs_fil1_imon=1.00901E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63249E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67087E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60637E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22496E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31406E-3
inlet_lpb_pmon=2.00407E-1
chamber_ion_pmon=1.7365E-7
chamber_cvt_pmon=2.51548E-3
foreline_cvt_pmon=2.51548E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.60203E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16417E-1	-7.98225E-1	-9.13103E0	-9.14171E0	5.43594E-3	9.29117E-2	2.7308E1	-3.26201E1	-3.26496E1	2.67836E1	1.73755E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00151E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16798E-1	-7.97987E-1	-9.13119E0	-9.14214E0	5.17368E-3	9.29594E-2	2.72984E1	-3.26658E1	-3.26187E1	2.67986E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16822E-1	-7.98249E-1	-9.13148E0	-9.14183E0	5.34058E-3	9.29117E-2	2.7321E1	-3.27169E1	-3.26201E1	2.67897E1	1.73681E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16083E-1	-7.98178E-1	-9.13105E0	-9.14183E0	4.95911E-3	9.30309E-2	2.72892E1	-3.26012E1	-3.26437E1	2.68112E1	1.73605E-7	2.51603E-3	2.51603E-3	6.32858E-3	1.99394E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16441E-1	-7.98702E-1	-9.13117E0	-9.14204E0	5.07832E-3	9.34601E-2	2.72787E1	-3.26488E1	-3.2641E1	2.6795E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16774E-1	-7.98392E-1	-9.13115E0	-9.14204E0	5.50747E-3	9.3317E-2	2.72564E1	-3.2644E1	-3.26194E1	2.68058E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16941E-1	-7.98392E-1	-9.13136E0	-9.14214E0	5.00679E-3	9.32693E-2	2.73165E1	-3.26585E1	-3.2602E1	2.67698E1	1.73758E-7	2.52473E-3	2.52473E-3	6.31858E-3	1.98872E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16607E-1	-7.98893E-1	-9.13141E0	-9.14221E0	5.05447E-3	9.31025E-2	2.72957E1	-3.26514E1	-3.26219E1	2.68196E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
1.2E1	0.0E0	2.0E0	4.85E2	3.23E2	-2.09549E0	-8.16655E-1	-7.97987E-1	-9.13148E0	-9.14221E0	5.36442E-3	9.30786E-2	2.73161E1	-3.26297E1	-3.26321E1	2.68124E1	1.73679E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9917E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16464E-1	-7.98273E-1	-9.13134E0	-9.14209E0	5.07832E-3	9.34124E-2	2.73213E1	-3.26464E1	-3.26368E1	2.67788E1	1.73605E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16751E-1	-7.98392E-1	-9.13107E0	-9.14216E0	5.34058E-3	9.32455E-2	2.72833E1	-3.26254E1	-3.26626E1	2.6807E1	1.73605E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99224E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16727E-1	-7.98202E-1	-9.13134E0	-9.14211E0	5.4121E-3	9.32693E-2	2.73494E1	-3.26934E1	-3.26248E1	2.6795E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98661E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16655E-1	-7.98392E-1	-9.13126E0	-9.14223E0	5.43594E-3	9.33409E-2	2.7285E1	-3.26791E1	-3.26508E1	2.68184E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16822E-1	-7.98345E-1	-9.13129E0	-9.14221E0	5.88894E-3	9.32932E-2	2.72763E1	-3.26464E1	-3.26212E1	2.68004E1	1.73605E-7	2.5147E-3	2.5147E-3	6.31299E-3	1.99577E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16822E-1	-7.98202E-1	-9.13126E0	-9.14221E0	5.6982E-3	9.34362E-2	2.73305E1	-3.26691E1	-3.2649E1	2.68142E1	1.73605E-7	2.50989E-3	2.50989E-3	6.30202E-3	1.98153E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.1687E-1	-7.98321E-1	-9.13119E0	-9.1419E0	5.45979E-3	9.3174E-2	2.73129E1	-3.26645E1	-3.26284E1	2.6803E1	1.73605E-7	2.51116E-3	2.51116E-3	6.29098E-3	1.99977E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16703E-1	-7.98321E-1	-9.13105E0	-9.14202E0	5.53131E-3	9.29356E-2	2.73177E1	-3.26543E1	-3.262E1	2.68124E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.17132E-1	-7.98202E-1	-9.13105E0	-9.1419E0	5.4121E-3	9.31501E-2	2.73126E1	-3.267E1	-3.26521E1	2.67692E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16774E-1	-7.9875E-1	-9.13103E0	-9.14207E0	5.43594E-3	9.32217E-2	2.73025E1	-3.26953E1	-3.261E1	2.67866E1	1.73605E-7	2.51498E-3	2.51498E-3	6.31269E-3	1.98894E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16464E-1	-7.98488E-1	-9.13093E0	-9.14233E0	5.48363E-3	9.35316E-2	2.72662E1	-3.26172E1	-3.2685E1	2.68454E1	1.7365E-7	2.51548E-3	2.51548E-3	6.31406E-3	2.00407E-1