[Scan]
initial_time=2016-02-16T02:22:43
final_time=2016-02-16T02:23:03
ip_count=19
run=1030
dataset=6
scan=450
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=5.85997E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.7107E-10
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=5.90479E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=4.90224E-10
mult1=-1.04749E-8
mult2=-2.7246E-9
rf_tmon=-3.88156E-3
rf_agc=3.38082E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=3.69096E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.05983E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02474E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0521E1
cs_ea1_imon=2.19324E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36535E0
lens1_imon=3.02442E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04045E1
cs_ea2_imon=1.58617E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84821E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.54385E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11015E1
os_restr1_imon=2.88071E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=1.89331E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.10127E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.28623E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=3.27066E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.66845E-10
tplens_vset=1.4E-1
tplens_vmon=1.59217E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.48955E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98775E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.46863E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30497E0
ionrepsh_imon=2.01552E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33411E1
lens5b_imon=2.19721E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74447E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.79962E-1
os_ea2_imon=-3.39E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.0068E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60476E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42163E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.87278E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.29326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.85629E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=2.49767E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82577E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-3.09361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.75412E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58803E0
defgridb_imon=6.42389E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.45497E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.19088E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66549E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=1.00941E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63411E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66993E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.22749E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82034E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.16355E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.17084E-1	-7.97844E-1	-9.13086E0	-9.14197E0	5.8651E-3	9.31501E-2	2.73293E1	-3.26667E1	-3.26136E1	2.67878E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98247E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16941E-1	-7.98178E-1	-9.13103E0	-9.14204E0	5.53131E-3	9.28879E-2	2.73296E1	-3.26713E1	-3.26236E1	2.67795E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9911E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.17108E-1	-7.97892E-1	-9.13119E0	-9.14202E0	5.67436E-3	9.28879E-2	2.73022E1	-3.2633E1	-3.26214E1	2.67816E1	1.73605E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16989E-1	-7.97963E-1	-9.13134E0	-9.14185E0	5.57899E-3	9.31978E-2	2.72845E1	-3.26207E1	-3.26201E1	2.68117E1	1.73605E-7	2.51077E-3	2.51077E-3	6.33388E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.17394E-1	-7.97534E-1	-9.13084E0	-9.14176E0	5.34058E-3	9.32693E-2	2.73087E1	-3.26536E1	-3.25936E1	2.68136E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.97984E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.17084E-1	-7.9782E-1	-9.13062E0	-9.14185E0	5.48363E-3	9.34124E-2	2.73387E1	-3.26793E1	-3.26637E1	2.68105E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16894E-1	-7.98464E-1	-9.13136E0	-9.14178E0	5.24521E-3	9.3317E-2	2.7272E1	-3.26503E1	-3.25942E1	2.67832E1	1.7375E-7	2.51393E-3	2.51393E-3	6.36047E-3	1.98229E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.1687E-1	-7.98059E-1	-9.13107E0	-9.14164E0	5.4121E-3	9.30548E-2	2.73255E1	-3.26488E1	-3.26404E1	2.67884E1	1.73605E-7	2.50931E-3	2.50931E-3	6.30171E-3	1.97909E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09673E0	-8.16774E-1	-7.98345E-1	-9.13098E0	-9.14173E0	5.48363E-3	9.29832E-2	2.73069E1	-3.26195E1	-3.26762E1	2.67878E1	1.73605E-7	2.51203E-3	2.51203E-3	6.33436E-3	1.9934E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09657E0	-8.16488E-1	-7.98082E-1	-9.13136E0	-9.14171E0	5.55515E-3	9.29594E-2	2.73339E1	-3.26681E1	-3.26296E1	2.67722E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16703E-1	-7.98082E-1	-9.13126E0	-9.14192E0	5.22137E-3	9.30786E-2	2.73291E1	-3.26488E1	-3.26308E1	2.68502E1	1.73755E-7	2.51116E-3	2.51116E-3	6.29098E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16631E-1	-7.98297E-1	-9.13124E0	-9.14185E0	5.07832E-3	9.28879E-2	2.73273E1	-3.26591E1	-3.26609E1	2.67873E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.16417E-1	-7.98154E-1	-9.13115E0	-9.14171E0	5.29289E-3	9.33409E-2	2.72951E1	-3.26449E1	-3.26301E1	2.68202E1	1.73679E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.16035E-1	-7.98035E-1	-9.13093E0	-9.14171E0	5.14984E-3	9.30309E-2	2.72985E1	-3.26452E1	-3.2647E1	2.67974E1	1.73605E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.98592E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16083E-1	-7.97939E-1	-9.13095E0	-9.14192E0	5.29289E-3	9.31978E-2	2.73103E1	-3.26834E1	-3.2644E1	2.68435E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16464E-1	-7.98392E-1	-9.13122E0	-9.14176E0	5.07832E-3	9.3317E-2	2.7345E1	-3.26741E1	-3.26454E1	2.67539E1	1.73676E-7	2.51783E-3	2.51783E-3	6.30221E-3	1.98792E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16202E-1	-7.98273E-1	-9.13115E0	-9.14159E0	5.126E-3	9.28164E-2	2.72979E1	-3.26675E1	-3.25996E1	2.67884E1	1.73844E-7	2.50488E-3	2.50488E-3	6.32483E-3	1.99466E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.1656E-1	-7.98082E-1	-9.131E0	-9.14173E0	5.17368E-3	9.28879E-2	2.7288E1	-3.26225E1	-3.26909E1	2.67833E1	1.73605E-7	2.5131E-3	2.5131E-3	6.2752E-3	1.98661E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16369E-1	-7.98297E-1	-9.13107E0	-9.14166E0	5.38826E-3	9.32932E-2	2.73163E1	-3.26691E1	-3.26089E1	2.68106E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98937E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16202E-1	-7.98297E-1	-9.13098E0	-9.14176E0	5.03063E-3	9.33886E-2	2.73171E1	-3.26506E1	-3.26158E1	2.68088E1	1.73753E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9883E-1