[Scan]
initial_time=2016-02-16T02:23:10
final_time=2016-02-16T02:23:31
ip_count=19
run=1030
dataset=6
scan=451
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=6.17588E-10
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=2.87437E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.73361E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=4.98843E-10
mult1=-8.74277E-9
mult2=-2.8624E-9
rf_tmon=-4.22042E-3
rf_agc=3.29375E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=3.63576E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.0522E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.09406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.19251E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39793E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64422E1
os_ef1alow_imon=2.96864E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.59612E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=3.0227E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.48961E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=2.8699E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.89838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63035E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.281E0
cs_ionrep_imon=1.26164E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93484E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=3.2912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.59454E-10
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=-1.18377E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98583E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=3.62825E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=2.01306E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74333E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.44546E-1
os_ea2_imon=-3.97991E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00761E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.2011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61678E0
os_ef2alow_imon=-2.67356E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.88071E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30282E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.29434E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73458E1
iondef1_imon=1.10803E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.87353E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.86174E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08449E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56111E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.67186E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=7.18342E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.04539E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50595E0
defgridb_imon=6.47908E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33931E1
os_fil1_imon=4.95642E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.89966E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66553E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=1.00766E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63405E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66884E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53824E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-1.8731E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22484E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.98322E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.64113E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16417E-1	-7.9813E-1	-9.13153E0	-9.14168E0	5.24521E-3	9.29117E-2	2.73297E1	-3.26554E1	-3.26212E1	2.67758E1	1.7368E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16846E-1	-7.98273E-1	-9.13138E0	-9.14176E0	5.31673E-3	9.28879E-2	2.72973E1	-3.26416E1	-3.26362E1	2.67914E1	1.73753E-7	2.51203E-3	2.51203E-3	6.29665E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.1718E-1	-7.98249E-1	-9.1315E0	-9.14195E0	5.38826E-3	9.31263E-2	2.72973E1	-3.26639E1	-3.2617E1	2.6783E1	1.73681E-7	2.51248E-3	2.51248E-3	6.3074E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16941E-1	-7.98321E-1	-9.13138E0	-9.14221E0	5.07832E-3	9.31025E-2	2.73151E1	-3.26697E1	-3.26083E1	2.67938E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.98153E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16751E-1	-7.98106E-1	-9.13162E0	-9.14204E0	5.48363E-3	9.29117E-2	2.73222E1	-3.26266E1	-3.26634E1	2.68232E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.17204E-1	-7.98202E-1	-9.13165E0	-9.14204E0	5.14984E-3	9.29356E-2	2.72915E1	-3.26419E1	-3.26296E1	2.68022E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.16846E-1	-7.98464E-1	-9.1315E0	-9.14207E0	5.34058E-3	9.3174E-2	2.72769E1	-3.26416E1	-3.2602E1	2.681E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.1656E-1	-7.98082E-1	-9.13122E0	-9.14207E0	5.31673E-3	9.36031E-2	2.73039E1	-3.26458E1	-3.26687E1	2.68184E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16584E-1	-7.97844E-1	-9.13117E0	-9.1418E0	5.81741E-3	9.32217E-2	2.73015E1	-3.26518E1	-3.25906E1	2.68099E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.1687E-1	-7.98321E-1	-9.13136E0	-9.14195E0	5.74589E-3	9.31263E-2	2.72991E1	-3.26098E1	-3.26104E1	2.67602E1	1.73605E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9883E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16989E-1	-7.97939E-1	-9.1311E0	-9.14185E0	5.57899E-3	9.29832E-2	2.72618E1	-3.26813E1	-3.26374E1	2.67966E1	1.73605E-7	2.52139E-3	2.52139E-3	6.32418E-3	1.98344E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.1625E-1	-7.98273E-1	-9.13126E0	-9.14202E0	5.67436E-3	9.3174E-2	2.73303E1	-3.26879E1	-3.26008E1	2.67481E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9968E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16631E-1	-7.98082E-1	-9.13131E0	-9.14176E0	5.55515E-3	9.29832E-2	2.7288E1	-3.26644E1	-3.26054E1	2.68647E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00325E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17227E-1	-7.97629E-1	-9.13141E0	-9.1418E0	5.4121E-3	9.32217E-2	2.72635E1	-3.26603E1	-3.26132E1	2.67674E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00499E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17108E-1	-7.97772E-1	-9.13153E0	-9.14183E0	5.60284E-3	9.30071E-2	2.72997E1	-3.2635E1	-3.26014E1	2.68184E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.99977E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16751E-1	-7.98178E-1	-9.13143E0	-9.14173E0	5.55515E-3	9.34601E-2	2.72756E1	-3.2659E1	-3.26036E1	2.67908E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29098E-3	2.00325E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16679E-1	-7.98321E-1	-9.13136E0	-9.14211E0	5.67436E-3	9.31978E-2	2.72582E1	-3.27023E1	-3.2596E1	2.68436E1	1.7368E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16989E-1	-7.98082E-1	-9.13122E0	-9.1418E0	5.43594E-3	9.30071E-2	2.72943E1	-3.26044E1	-3.26903E1	2.67565E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16703E-1	-7.98202E-1	-9.13153E0	-9.14207E0	5.38826E-3	9.28164E-2	2.73434E1	-3.26537E1	-3.26608E1	2.6752E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9731E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16655E-1	-7.9813E-1	-9.13124E0	-9.14197E0	5.62668E-3	9.27925E-2	2.73458E1	-3.26614E1	-3.26425E1	2.68082E1	1.73679E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.98322E-1