[Scan]
initial_time=2016-02-16T02:25:02
final_time=2016-02-16T02:25:23
ip_count=19
run=1030
dataset=6
scan=455
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=6.217E-10
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.84576E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=6.01673E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=4.92442E-10
mult1=-1.06916E-8
mult2=-2.86433E-9
rf_tmon=-5.31753E-3
rf_agc=3.21199E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.81231E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66916E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=2.01235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.0482E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=3.06091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.2056E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41798E0
lens1_imon=2.60697E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64422E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.57806E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84688E1
cs_ef1a_imon=3.02631E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.75676E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15577E1
os_ea1_imon=1.89272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63449E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21611E0
cs_ionrep_imon=1.26412E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.28075E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=7.00605E-10
tplens_vset=1.4E-1
tplens_vmon=1.61076E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2587E1
iondef3_imon=1.50763E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.56957E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98756E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.19266E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=2.01306E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34124E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49266E-1
os_ea2_imon=-2.10402E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65522E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45767E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=2.87602E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.2876E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.28677E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72793E1
iondef1_imon=1.11263E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.85608E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=1.89996E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07788E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=8.05184E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.65605E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.73333E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33946E1
os_fil1_imon=5.12461E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.62936E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66584E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=1.00842E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63171E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67093E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54584E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.07732E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22524E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24764E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16512E-1	-7.9813E-1	-9.13126E0	-9.14197E0	5.10216E-3	9.31978E-2	2.72877E1	-3.26326E1	-3.2599E1	2.67845E1	1.7368E-7	2.51007E-3	2.51007E-3	6.3514E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.16727E-1	-7.97915E-1	-9.13129E0	-9.14199E0	5.07832E-3	9.32932E-2	2.72812E1	-3.26376E1	-3.26205E1	2.67745E1	1.73642E-7	2.51826E-3	2.51826E-3	6.31563E-3	1.98764E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16536E-1	-7.98154E-1	-9.13095E0	-9.14183E0	4.8399E-3	9.32217E-2	2.73248E1	-3.26446E1	-3.26422E1	2.67694E1					
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.1687E-1	-7.97963E-1	-9.13093E0	-9.14207E0	5.07832E-3	9.3317E-2	2.73446E1	-3.26638E1	-3.26048E1	2.6789E1	1.73605E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.99562E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16774E-1	-7.98464E-1	-9.13115E0	-9.14197E0	5.126E-3	9.32932E-2	2.72708E1	-3.26456E1	-3.2607E1	2.68142E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99456E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16989E-1	-7.98154E-1	-9.13093E0	-9.14197E0	5.29289E-3	9.30548E-2	2.7298E1	-3.26714E1	-3.26113E1	2.68346E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17156E-1	-7.98082E-1	-9.13103E0	-9.14197E0	5.19753E-3	9.30786E-2	2.73198E1	-3.26505E1	-3.2664E1	2.67938E1	1.73605E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.1706E-1	-7.97606E-1	-9.13138E0	-9.14195E0	5.14984E-3	9.30309E-2	2.72817E1	-3.26338E1	-3.26074E1	2.67926E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16488E-1	-7.97892E-1	-9.13134E0	-9.14209E0	5.19753E-3	9.3174E-2	2.72769E1	-3.26825E1	-3.25659E1	2.68004E1	1.73605E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99977E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16417E-1	-7.97915E-1	-9.13141E0	-9.14197E0	5.50747E-3	9.30071E-2	2.73234E1	-3.26437E1	-3.26254E1	2.6801E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16774E-1	-7.97582E-1	-9.13134E0	-9.14195E0	5.65052E-3	9.31025E-2	2.73105E1	-3.26591E1	-3.26458E1	2.68123E1	1.7368E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16727E-1	-7.98011E-1	-9.13157E0	-9.14195E0	5.34058E-3	9.32217E-2	2.72988E1	-3.26585E1	-3.26294E1	2.67653E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.97984E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.17156E-1	-7.97606E-1	-9.13129E0	-9.14187E0	5.65052E-3	9.29832E-2	2.72982E1	-3.26659E1	-3.26366E1	2.67333E1	1.73676E-7	2.51575E-3	2.51575E-3	6.31779E-3	1.98955E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16798E-1	-7.9813E-1	-9.13126E0	-9.14204E0	5.29289E-3	9.29832E-2	2.73189E1	-3.26663E1	-3.26554E1	2.6789E1	1.73605E-7	2.50818E-3	2.50818E-3	6.3245E-3	1.98984E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.17013E-1	-7.98035E-1	-9.13115E0	-9.14187E0	5.31673E-3	9.2864E-2	2.72991E1	-3.26482E1	-3.26416E1	2.68424E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16679E-1	-7.98273E-1	-9.13146E0	-9.14207E0	5.38826E-3	9.30548E-2	2.73375E1	-3.26428E1	-3.2644E1	2.6834E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.98937E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16464E-1	-7.98512E-1	-9.13095E0	-9.14176E0	5.38826E-3	9.27925E-2	2.73015E1	-3.26278E1	-3.26284E1	2.67932E1	1.7368E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17037E-1	-7.98178E-1	-9.13129E0	-9.14202E0	5.26905E-3	9.3317E-2	2.73476E1	-3.27051E1	-3.26119E1	2.67937E1	1.7368E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17037E-1	-7.98082E-1	-9.13088E0	-9.14197E0	5.43594E-3	9.32932E-2	2.73057E1	-3.26573E1	-3.26526E1	2.68118E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.9951E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16703E-1	-7.98488E-1	-9.1311E0	-9.14178E0	5.38826E-3	9.32217E-2	2.72793E1	-3.26801E1	-3.2587E1	2.67914E1	1.73605E-7	2.51739E-3	2.51739E-3	6.35059E-3	1.9883E-1