[Scan]
initial_time=2016-02-16T02:25:58
final_time=2016-02-16T02:26:19
ip_count=19
run=1030
dataset=6
scan=457
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=6.25241E-10
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=2.82431E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.27537E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=4.97615E-10
mult1=-9.36713E-9
mult2=-2.84836E-9
rf_tmon=-1.57439E-3
rf_agc=3.5064E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=3.61347E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.78289E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.0527E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.06307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=2.19144E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.73963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.58725E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=3.01153E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.77762E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=2.88179E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=1.88538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28334E0
cs_ionrep_imon=1.28119E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=3.28255E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=6.82449E-10
tplens_vset=1.4E-1
tplens_vmon=1.62401E0
tplens_imon=-1.09497E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26567E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98681E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.5696E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=2.01588E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.14812E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7095E-1
os_ea2_imon=-2.16432E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.17155E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65882E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46368E-1
os_ef2bup_imon=-5.41978E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=2.88035E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.30804E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68175E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.87544E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=2.17676E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.38966E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-2.69717E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.60053E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.45851E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=5.95164E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33937E1
os_fil1_imon=5.10058E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.68342E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66489E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=1.00952E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66882E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39615E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78554E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.4879E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16584E-1	-7.98082E-1	-9.13153E0	-9.14168E0	5.26905E-3	9.26495E-2	2.73442E1	-3.26675E1	-3.25906E1	2.68034E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00876E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16607E-1	-7.97582E-1	-9.1315E0	-9.14183E0	5.17368E-3	9.29117E-2	2.72959E1	-3.26817E1	-3.26285E1	2.67752E1	1.7368E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.00847E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16607E-1	-7.97939E-1	-9.1315E0	-9.14195E0	5.29289E-3	9.30548E-2	2.73242E1	-3.26689E1	-3.26202E1	2.67601E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16083E-1	-7.98321E-1	-9.13131E0	-9.14228E0	4.98295E-3	9.31025E-2	2.72821E1	-3.26549E1	-3.25971E1	2.68308E1	1.73677E-7	2.51393E-3	2.51393E-3	6.3074E-3	1.98561E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16083E-1	-7.98106E-1	-9.1316E0	-9.14202E0	5.24521E-3	9.30786E-2	2.73034E1	-3.26376E1	-3.26486E1	2.67804E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16345E-1	-7.97653E-1	-9.13157E0	-9.14202E0	5.38826E-3	9.31978E-2	2.73249E1	-3.2635E1	-3.26681E1	2.67974E1	1.73677E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.99896E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16345E-1	-7.97582E-1	-9.13126E0	-9.14211E0	5.55515E-3	9.31025E-2	2.73051E1	-3.26573E1	-3.2626E1	2.68464E1	1.73831E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.01022E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16321E-1	-7.98011E-1	-9.13141E0	-9.14211E0	5.14984E-3	9.29832E-2	2.72702E1	-3.2653E1	-3.26194E1	2.68263E1	1.73753E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00363E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.1656E-1	-7.98678E-1	-9.13141E0	-9.14204E0	5.67436E-3	9.27925E-2	2.72883E1	-3.26482E1	-3.26116E1	2.68352E1	1.73681E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99577E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.1656E-1	-7.98368E-1	-9.13141E0	-9.14192E0	5.81741E-3	9.30309E-2	2.73093E1	-3.26506E1	-3.26224E1	2.68112E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16774E-1	-7.97701E-1	-9.13107E0	-9.14214E0	5.14984E-3	9.31978E-2	2.73069E1	-3.26597E1	-3.26476E1	2.67584E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.98661E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16369E-1	-7.98202E-1	-9.1311E0	-9.14202E0	5.126E-3	9.2864E-2	2.72791E1	-3.26868E1	-3.26071E1	2.67433E1	1.7368E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.98075E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.1625E-1	-7.97987E-1	-9.1315E0	-9.14242E0	4.95911E-3	9.29832E-2	2.73478E1	-3.26308E1	-3.26242E1	2.68412E1	1.73827E-7	2.51632E-3	2.51632E-3	6.33977E-3	1.98661E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16154E-1	-7.98011E-1	-9.13169E0	-9.14214E0	4.93526E-3	9.30309E-2	2.73544E1	-3.26687E1	-3.25858E1	2.67926E1	1.73755E-7	2.51771E-3	2.51771E-3	6.28552E-3	1.98075E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16274E-1	-7.97868E-1	-9.13129E0	-9.14204E0	5.48363E-3	9.28164E-2	2.72985E1	-3.26422E1	-3.25695E1	2.68244E1	1.73605E-7	2.51552E-3	2.51552E-3	6.28552E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16226E-1	-7.97987E-1	-9.13103E0	-9.14204E0	5.05447E-3	9.31025E-2	2.73246E1	-3.26077E1	-3.26856E1	2.67625E1	1.73605E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16751E-1	-7.97176E-1	-9.13138E0	-9.14226E0	4.91142E-3	9.30071E-2	2.73207E1	-3.27233E1	-3.26404E1	2.68123E1	1.73755E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16751E-1	-7.9751E-1	-9.13122E0	-9.14195E0	5.07832E-3	9.31501E-2	2.73334E1	-3.26425E1	-3.2593E1	2.67968E1	1.73753E-7	2.52061E-3	2.52061E-3	6.29128E-3	1.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16751E-1	-7.97987E-1	-9.1311E0	-9.14207E0	5.126E-3	9.33647E-2	2.72886E1	-3.2649E1	-3.26083E1	2.67848E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16584E-1	-7.97629E-1	-9.13117E0	-9.14209E0	5.53131E-3	9.31501E-2	2.73171E1	-3.26657E1	-3.26567E1	2.68175E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9968E-1