[Scan]
initial_time=2016-02-16T02:27:49
final_time=2016-02-16T02:28:09
ip_count=19
run=1030
dataset=6
scan=461
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.05559E-10
ql2_vset=
ql2_vmon=-7.9782E-1
ql2_imon=2.80213E-10
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=5.53072E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.14853E-10
mult1=-9.31897E-9
mult2=-2.71462E-9
rf_tmon=-6.1707E-3
rf_agc=3.33216E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=3.57318E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71721E0
bslens_imon=2.89825E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05201E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53559E1
cs_ef1b_imon=3.09938E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02381E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=2.18711E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42423E0
lens1_imon=2.73602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64826E1
os_ef1alow_imon=2.95581E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.5941E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84097E1
cs_ef1a_imon=3.04283E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=3.64375E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11515E1
os_restr1_imon=2.84271E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15636E1
os_ea1_imon=1.87745E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63338E1
os_ef1bup_imon=3.13023E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23828E0
cs_ionrep_imon=1.28191E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0184E1
cs_anode1_imon=3.25434E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=6.57642E-10
tplens_vset=1.4E-1
tplens_vmon=1.61139E0
tplens_imon=-9.38636E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26987E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98465E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.51238E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23467E0
ionrepsh_imon=2.01083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74593E1
cs_ef2b_imon=3.14528E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29493E-1
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06171E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71239E1
cs_ef2a_imon=3.16988E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61117E0
os_ef2alow_imon=-2.16037E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94772E-1
os_ef2bup_imon=-4.96208E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10358E1
os_restr2_imon=2.8596E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01564E1
cs_anode2_imon=2.26217E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.10887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.13341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.85021E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.48051E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12953E0
cs_ionaccel_imon=-2.35131E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47568E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55964E1
einzel_imon=7.41611E-6
window_vset=0.0E0
window_vmon=2.27259E-1
window_imon=-5.66738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.38816E-4
mask2_vset=0.0E0
mask2_vmon=-1.8654E1
mask2_imon=-3.24389E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.75772E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.5032E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52187E0
defgridb_imon=6.32656E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33899E1
os_fil1_imon=4.23291E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.04196E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66571E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30815E1
cs_fil1_imon=1.00748E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.40111E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.46498E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59993E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30114E-1
cs_fil2_imon=-2.22975E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.74209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2242E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.4777E-1
res40_imon=-2.3403E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16655E-1	-7.98631E-1	-9.13119E0	-9.14242E0	5.72205E-3	9.30309E-2	2.73138E1	-3.26741E1	-3.26556E1	2.68036E1	1.7368E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98764E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16631E-1	-7.98607E-1	-9.13138E0	-9.14221E0	5.62668E-3	9.32693E-2	2.728E1	-3.26462E1	-3.2634E1	2.6799E1	1.73677E-7	2.51603E-3	2.51603E-3	6.3074E-3	1.97731E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16965E-1	-7.98321E-1	-9.13155E0	-9.14202E0	5.34058E-3	9.30071E-2	2.73287E1	-3.26744E1	-3.26449E1	2.67914E1	1.73681E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.17251E-1	-7.98178E-1	-9.13141E0	-9.14202E0	5.55515E-3	9.32932E-2	2.72985E1	-3.26627E1	-3.2632E1	2.67521E1	1.73605E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16917E-1	-7.98488E-1	-9.13107E0	-9.14214E0	5.17368E-3	9.32932E-2	2.73219E1	-3.26609E1	-3.26488E1	2.67818E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16917E-1	-7.98178E-1	-9.13117E0	-9.14195E0	5.07832E-3	9.31263E-2	2.73003E1	-3.26603E1	-3.2638E1	2.67873E1	1.7368E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16989E-1	-7.98345E-1	-9.13146E0	-9.14216E0	5.38826E-3	9.3317E-2	2.73177E1	-3.26795E1	-3.26332E1	2.68088E1	1.73605E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16751E-1	-7.98297E-1	-9.13141E0	-9.14218E0	5.53131E-3	9.3317E-2	2.72787E1	-3.26506E1	-3.26356E1	2.68194E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.97903E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16703E-1	-7.97796E-1	-9.13091E0	-9.14228E0	5.55515E-3	9.28879E-2	2.73033E1	-3.26729E1	-3.26014E1	2.67734E1	1.7368E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.97731E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16393E-1	-7.98178E-1	-9.131E0	-9.14207E0	5.34058E-3	9.31978E-2	2.72775E1	-3.26119E1	-3.26285E1	2.68166E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98419E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16631E-1	-7.98011E-1	-9.13105E0	-9.14199E0	5.17368E-3	9.31978E-2	2.72933E1	-3.26661E1	-3.25953E1	2.67862E1	1.73605E-7	2.51804E-3	2.51804E-3	6.30182E-3	1.98169E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16369E-1	-7.98082E-1	-9.13105E0	-9.14218E0	5.62668E-3	9.34839E-2	2.72823E1	-3.26777E1	-3.26152E1	2.68106E1	1.73753E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16536E-1	-7.98011E-1	-9.13124E0	-9.1424E0	5.67436E-3	9.33647E-2	2.72991E1	-3.26404E1	-3.265E1	2.6819E1	1.73605E-7	2.52099E-3	2.52099E-3	6.27461E-3	1.98764E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16226E-1	-7.97868E-1	-9.13126E0	-9.14218E0	5.60284E-3	9.33409E-2	2.73087E1	-3.27041E1	-3.26008E1	2.67932E1	1.73605E-7	2.50898E-3	2.50898E-3	6.33486E-3	1.98592E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16488E-1	-7.97963E-1	-9.13141E0	-9.14195E0	5.26905E-3	9.32693E-2	2.72951E1	-3.26461E1	-3.2636E1	2.6792E1	1.73454E-7	2.51662E-3	2.51662E-3	6.28006E-3	1.99283E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16202E-1	-7.97892E-1	-9.13141E0	-9.14178E0	5.38826E-3	9.33886E-2	2.73117E1	-3.2629E1	-3.2626E1	2.6774E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.99E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16274E-1	-7.98035E-1	-9.13129E0	-9.14185E0	5.43594E-3	9.31501E-2	2.73291E1	-3.26957E1	-3.26122E1	2.67944E1	1.7368E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16441E-1	-7.97987E-1	-9.13117E0	-9.14187E0	5.55515E-3	9.35078E-2	2.7275E1	-3.26478E1	-3.26048E1	2.68157E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16727E-1	-7.97629E-1	-9.13115E0	-9.1418E0	5.4121E-3	9.34362E-2	2.72644E1	-3.26691E1	-3.26508E1	2.68238E1	1.73753E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.00021E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16417E-1	-7.9782E-1	-9.13119E0	-9.14214E0	5.60284E-3	9.35316E-2	2.73015E1	-3.26987E1	-3.26242E1	2.67812E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.00021E-1