[Scan]
initial_time=2016-02-16T02:28:16
final_time=2016-02-16T02:28:36
ip_count=19
run=1030
dataset=6
scan=462
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08812E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=6.17611E-10
ql2_vset=
ql2_vmon=-7.97725E-1
ql2_imon=2.92552E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.31411E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=5.11611E-10
mult1=-1.04451E-8
mult2=-2.66838E-9
rf_tmon=-5.14657E-3
rf_agc=3.43355E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=3.75056E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62079E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20338E1
lens5a_imon=1.98864E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04948E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.06732E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02362E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.17198E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40677E0
lens1_imon=2.86534E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.99086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03378E1
cs_ea2_imon=1.58727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.00546E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.52764E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=2.90189E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15571E1
os_ea1_imon=1.90192E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2462E0
cs_ionrep_imon=1.24855E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93625E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.28104E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=6.58059E-10
tplens_vset=1.4E-1
tplens_vmon=1.60545E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.51931E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27051E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=3.41034E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=2.00563E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33811E1
lens5b_imon=2.21657E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.13647E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65193E-1
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06169E2
lens4b_imon=2.00856E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.18721E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60017E0
os_ef2alow_imon=-2.40777E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.57265E-1
os_ef2bup_imon=-5.26443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10695E1
os_restr2_imon=2.86332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.32512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.30311E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72827E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67932E1
iondef4_imon=1.08607E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.85878E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=2.80774E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09886E0
cs_ionaccel_imon=-1.75442E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56144E1
einzel_imon=7.8338E-6
window_vset=0.0E0
window_vmon=2.10156E-1
window_imon=-1.16363E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86547E1
mask2_imon=-5.13757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.5074E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.47012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.7097E0
defgridb_imon=6.50032E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33927E1
os_fil1_imon=4.83736E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.88979E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30838E1
cs_fil1_imon=1.00862E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63032E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67092E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30657E-2
os_fil2_imon=-2.29849E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.52404E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59393E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.39919E-1
res40_imon=-2.59543E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16846E-1	-7.98035E-1	-9.13117E0	-9.14195E0	5.24521E-3	9.3174E-2	2.72939E1	-3.2708E1	-3.26124E1	2.67716E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9968E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.17156E-1	-7.97677E-1	-9.13136E0	-9.14204E0	5.24521E-3	9.33409E-2	2.72812E1	-3.26523E1	-3.26395E1	2.67956E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17251E-1	-7.97749E-1	-9.13131E0	-9.14192E0	5.55515E-3	9.32932E-2	2.7304E1	-3.26431E1	-3.26156E1	2.67942E1	1.73605E-7	2.51025E-3	2.51025E-3	6.29624E-3	1.99577E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1718E-1	-7.97868E-1	-9.13103E0	-9.14197E0	5.22137E-3	9.34362E-2	2.73045E1	-3.26508E1	-3.26502E1	2.6772E1	1.73605E-7	2.51823E-3	2.51823E-3	6.29237E-3	1.9844E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16989E-1	-7.98106E-1	-9.13129E0	-9.14195E0	5.57899E-3	9.34839E-2	2.73003E1	-3.26332E1	-3.25936E1	2.67794E1	1.73605E-7	2.51296E-3	2.51296E-3	6.31902E-3	2.0131E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1706E-1	-7.97725E-1	-9.13112E0	-9.1419E0	5.29289E-3	9.32932E-2	2.73309E1	-3.2644E1	-3.26615E1	2.68172E1	1.73605E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.00673E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17251E-1	-7.97987E-1	-9.13112E0	-9.14187E0	5.50747E-3	9.31263E-2	2.73234E1	-3.26573E1	-3.26443E1	2.68238E1	1.7368E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.1656E-1	-7.98106E-1	-9.13124E0	-9.14247E0	5.45979E-3	9.31978E-2	2.73129E1	-3.26597E1	-3.2629E1	2.67932E1	1.73753E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.97984E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16727E-1	-7.98368E-1	-9.13093E0	-9.14228E0	5.43594E-3	9.31978E-2	2.72829E1	-3.25978E1	-3.26356E1	2.68082E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.16917E-1	-7.98011E-1	-9.13117E0	-9.14204E0	5.34058E-3	9.32455E-2	2.73147E1	-3.2644E1	-3.26488E1	2.6771E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99803E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16512E-1	-7.98249E-1	-9.13124E0	-9.14202E0	5.34058E-3	9.31025E-2	2.73165E1	-3.26723E1	-3.259E1	2.67848E1	1.7368E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16369E-1	-7.98106E-1	-9.13141E0	-9.14221E0	5.48363E-3	9.34124E-2	2.72812E1	-3.26444E1	-3.26425E1	2.6789E1	1.73492E-7	2.51935E-3	2.51935E-3	6.32386E-3	1.98764E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16846E-1	-7.97582E-1	-9.13124E0	-9.14237E0	5.34058E-3	9.3317E-2	2.72817E1	-3.26296E1	-3.26356E1	2.67842E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16607E-1	-7.97987E-1	-9.13138E0	-9.14216E0	5.88894E-3	9.30309E-2	2.73163E1	-3.26596E1	-3.26449E1	2.67986E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16965E-1	-7.97749E-1	-9.13126E0	-9.14235E0	5.43594E-3	9.30071E-2	2.73099E1	-3.26837E1	-3.26188E1	2.67842E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.16989E-1	-7.97606E-1	-9.13138E0	-9.14195E0	5.57899E-3	9.3174E-2	2.73381E1	-3.26735E1	-3.26536E1	2.67728E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.98322E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16965E-1	-7.97558E-1	-9.13126E0	-9.14199E0	5.6982E-3	9.29117E-2	2.72603E1	-3.2639E1	-3.26178E1	2.68099E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99803E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16607E-1	-7.97963E-1	-9.13107E0	-9.14166E0	5.126E-3	9.31263E-2	2.73424E1	-3.26416E1	-3.26549E1	2.681E1	1.7368E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00151E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16846E-1	-7.97486E-1	-9.13126E0	-9.14207E0	5.65052E-3	9.30309E-2	2.72889E1	-3.27035E1	-3.25809E1	2.6792E1	1.73605E-7	2.51007E-3	2.51007E-3	6.33486E-3	1.99803E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16822E-1	-7.97725E-1	-9.13136E0	-9.14214E0	5.53131E-3	9.28164E-2	2.72827E1	-3.27051E1	-3.25912E1	2.67932E1	1.73753E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9917E-1