[Scan]
initial_time=2016-02-16T02:29:10
final_time=2016-02-16T02:29:30
ip_count=19
run=1030
dataset=6
scan=464
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08779E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=6.15191E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.77817E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.11944E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.18918E-10
mult1=-9.51118E-9
mult2=-2.84672E-9
rf_tmon=-5.70108E-3
rf_agc=3.3079E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=3.54481E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60482E0
bslens_imon=3.24517E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20101E1
lens5a_imon=1.96545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05218E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53626E1
cs_ef1b_imon=3.06834E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04657E2
lens23_imon=1.01945E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04466E1
cs_ea1_imon=2.21317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43554E0
lens1_imon=2.26802E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.99283E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.62841E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=3.01307E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=3.88134E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11227E1
os_restr1_imon=2.86517E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=1.883E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63499E1
os_ef1bup_imon=3.10649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1923E0
cs_ionrep_imon=1.27915E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93309E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=3.28009E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.63722E-10
tplens_vset=1.4E-1
tplens_vmon=1.56891E0
tplens_imon=1.57211E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.46008E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.60665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02984E2
lens6_imon=2.98426E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.96538E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24383E0
ionrepsh_imon=2.03148E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34167E1
lens5b_imon=2.17958E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74346E1
cs_ef2b_imon=3.12011E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.22142E-1
os_ea2_imon=-1.44333E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06176E2
lens4b_imon=2.0042E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71199E1
cs_ef2a_imon=3.17928E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62348E0
os_ef2alow_imon=-2.40485E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.505E-1
os_ef2bup_imon=-5.33963E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10514E1
os_restr2_imon=2.87451E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.32104E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.29028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7334E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.09807E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.84224E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=2.55418E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08538E0
cs_ionaccel_imon=-1.98059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56178E1
einzel_imon=7.64113E-6
window_vset=0.0E0
window_vmon=2.00356E-1
window_imon=-1.01141E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.3901E-4
mask2_vset=0.0E0
mask2_vmon=-1.86331E1
mask2_imon=-3.53618E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.57366E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.96676E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.13852E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67207E0
defgridb_imon=5.90944E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33957E1
os_fil1_imon=4.47061E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.96717E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66602E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=1.00877E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63001E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6693E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26262E-2
os_fil2_imon=-2.37981E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59341E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30211E-1
cs_fil2_imon=-2.34089E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16865E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.5744E-1
res40_imon=-2.45934E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16417E-1	-7.98512E-1	-9.13112E0	-9.14218E0	5.22137E-3	9.30071E-2	2.73157E1	-3.26756E1	-3.26183E1	2.67902E1	1.73684E-7	2.51527E-3	2.51527E-3	6.32483E-3	2.00755E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16584E-1	-7.98082E-1	-9.13172E0	-9.1419E0	4.8399E-3	9.33409E-2	2.73357E1	-3.26591E1	-3.26438E1	2.67806E1	1.73753E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.17013E-1	-7.97606E-1	-9.13124E0	-9.14197E0	5.07832E-3	9.29832E-2	2.73306E1	-3.2681E1	-3.26162E1	2.68238E1	1.73681E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.99931E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16464E-1	-7.98249E-1	-9.13162E0	-9.14164E0	5.26905E-3	9.30071E-2	2.72877E1	-3.26356E1	-3.26194E1	2.67908E1	1.73605E-7	2.52131E-3	2.52131E-3	6.31269E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16822E-1	-7.97677E-1	-9.13167E0	-9.14204E0	5.43594E-3	9.31263E-2	2.73321E1	-3.26573E1	-3.26344E1	2.67848E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.17037E-1	-7.98178E-1	-9.13157E0	-9.14197E0	5.45979E-3	9.3174E-2	2.72919E1	-3.26981E1	-3.26152E1	2.68331E1	1.73906E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.1687E-1	-7.97939E-1	-9.13148E0	-9.14178E0	5.55515E-3	9.34601E-2	2.72861E1	-3.26352E1	-3.26462E1	2.68076E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.98075E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16393E-1	-7.97701E-1	-9.13131E0	-9.14192E0	5.8651E-3	9.36508E-2	2.72845E1	-3.2672E1	-3.26054E1	2.68058E1	1.7368E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.97045E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16441E-1	-7.97486E-1	-9.13136E0	-9.14197E0	5.03063E-3	9.31978E-2	2.73285E1	-3.26573E1	-3.26128E1	2.67943E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98247E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16154E-1	-7.97939E-1	-9.1316E0	-9.14185E0	4.93526E-3	9.32693E-2	2.72901E1	-3.26765E1	-3.26206E1	2.67926E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9917E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16059E-1	-7.9813E-1	-9.13141E0	-9.14168E0	5.29289E-3	9.34362E-2	2.73177E1	-3.26543E1	-3.26446E1	2.67848E1	1.73681E-7	2.52585E-3	2.52585E-3	6.32978E-3	1.99048E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16488E-1	-7.97939E-1	-9.13167E0	-9.14211E0	5.43594E-3	9.377E-2	2.73015E1	-3.26729E1	-3.26549E1	2.67884E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.9917E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16369E-1	-7.98035E-1	-9.13162E0	-9.14218E0	5.07832E-3	9.36747E-2	2.72662E1	-3.26667E1	-3.26231E1	2.6801E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16512E-1	-7.98082E-1	-9.13167E0	-9.14216E0	5.19753E-3	9.34362E-2	2.72984E1	-3.26346E1	-3.26144E1	2.67878E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16703E-1	-7.98035E-1	-9.13155E0	-9.1423E0	5.17368E-3	9.32693E-2	2.73505E1	-3.26596E1	-3.2639E1	2.6801E1	1.73605E-7	2.51498E-3	2.51498E-3	6.29372E-3	1.99716E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16536E-1	-7.98178E-1	-9.13148E0	-9.14211E0	5.53131E-3	9.30786E-2	2.72955E1	-3.26921E1	-3.26098E1	2.6813E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16321E-1	-7.98368E-1	-9.13146E0	-9.14221E0	5.26905E-3	9.3174E-2	2.72775E1	-3.26591E1	-3.26476E1	2.67932E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9985E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16846E-1	-7.97963E-1	-9.13115E0	-9.14218E0	5.65052E-3	9.31025E-2	2.7347E1	-3.26838E1	-3.26248E1	2.67879E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99977E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16369E-1	-7.97963E-1	-9.13138E0	-9.14233E0	5.24521E-3	9.33409E-2	2.72947E1	-3.26492E1	-3.26185E1	2.68186E1	1.73605E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16727E-1	-7.98297E-1	-9.13136E0	-9.14216E0	5.72205E-3	9.31978E-2	2.7334E1	-3.26614E1	-3.26419E1	2.6804E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9917E-1