[Scan]
initial_time=2016-02-16T02:29:37
final_time=2016-02-16T02:29:57
ip_count=19
run=1030
dataset=6
scan=465
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=6.12485E-10
ql2_vset=
ql2_vmon=-7.97677E-1
ql2_imon=2.84112E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=5.22447E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.95636E-10
mult1=-9.85014E-9
mult2=-2.69842E-9
rf_tmon=-5.41713E-3
rf_agc=3.25368E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=3.47281E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20414E1
lens5a_imon=1.98616E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.07893E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02418E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05136E1
cs_ea1_imon=2.19392E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37079E0
lens1_imon=2.92551E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03531E1
cs_ea2_imon=1.5724E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=3.68333E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=2.87782E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=1.92988E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.08145E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=1.27474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93675E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.28579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=6.51765E-10
tplens_vset=1.4E-1
tplens_vmon=1.5966E0
tplens_imon=-1.43153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26909E1
iondef2_imon=1.58762E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98785E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.62456E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30873E0
ionrepsh_imon=2.01164E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.21127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51035E-1
os_ea2_imon=-5.60803E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00747E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.87098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.27488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73113E1
iondef1_imon=1.09104E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67957E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.8612E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=2.02644E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.28253E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.51801E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.50551E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=6.53925E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33919E1
os_fil1_imon=5.2988E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76151E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66711E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=1.00849E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67081E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40787E-2
os_fil2_imon=-2.3296E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68125E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22542E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.43985E-1
res40_imon=-2.56544E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16798E-1	-7.98154E-1	-9.13105E0	-9.14204E0	5.03063E-3	9.32693E-2	2.72805E1	-3.26855E1	-3.26188E1	2.67686E1	1.73827E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16584E-1	-7.98392E-1	-9.13107E0	-9.14192E0	5.6982E-3	9.29356E-2	2.7321E1	-3.26346E1	-3.26474E1	2.67764E1	1.73753E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16655E-1	-7.97796E-1	-9.13131E0	-9.14197E0	4.93526E-3	9.30071E-2	2.72827E1	-3.26455E1	-3.25918E1	2.68322E1	1.7368E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.9937E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16488E-1	-7.98154E-1	-9.13119E0	-9.14223E0	5.57899E-3	9.31025E-2	2.72997E1	-3.26585E1	-3.2608E1	2.67902E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16417E-1	-7.98202E-1	-9.13095E0	-9.14207E0	5.26905E-3	9.30309E-2	2.72943E1	-3.27233E1	-3.25816E1	2.67806E1	1.73755E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99456E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.17037E-1	-7.97892E-1	-9.13069E0	-9.14185E0	5.07832E-3	9.3174E-2	2.72927E1	-3.26732E1	-3.26242E1	2.67949E1	1.73605E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16727E-1	-7.97939E-1	-9.13072E0	-9.1419E0	5.00679E-3	9.31978E-2	2.73305E1	-3.26903E1	-3.26349E1	2.67896E1	1.73605E-7	2.5131E-3	2.5131E-3	6.35059E-3	1.97984E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16345E-1	-7.98106E-1	-9.13069E0	-9.14207E0	5.126E-3	9.32217E-2	2.7367E1	-3.26826E1	-3.26366E1	2.6798E1	1.73457E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.9968E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16202E-1	-7.98202E-1	-9.13088E0	-9.14228E0	5.29289E-3	9.31978E-2	2.73327E1	-3.26927E1	-3.26368E1	2.68226E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98075E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-8.16369E-1	-7.97963E-1	-9.13084E0	-9.14214E0	5.4121E-3	9.30786E-2	2.72953E1	-3.26223E1	-3.26297E1	2.68136E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98247E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09309E0	-8.16321E-1	-7.98035E-1	-9.13105E0	-9.14249E0	5.34058E-3	9.31263E-2	2.7275E1	-3.27092E1	-3.26178E1	2.67878E1	1.7368E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98592E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0934E0	-8.1656E-1	-7.9813E-1	-9.13112E0	-9.14247E0	5.19753E-3	9.32217E-2	2.73442E1	-3.26615E1	-3.26212E1	2.67792E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99456E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09309E0	-8.16369E-1	-7.97844E-1	-9.13098E0	-9.14221E0	5.19753E-3	9.30786E-2	2.72738E1	-3.26596E1	-3.25989E1	2.68262E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99803E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.16369E-1	-7.98321E-1	-9.13084E0	-9.14187E0	4.93526E-3	9.29832E-2	2.73412E1	-3.26523E1	-3.26799E1	2.67734E1	1.73753E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9917E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16512E-1	-7.97939E-1	-9.13088E0	-9.14214E0	5.34058E-3	9.29832E-2	2.73255E1	-3.26518E1	-3.26999E1	2.67812E1	1.7368E-7	2.5199E-3	2.5199E-3	6.35692E-3	1.99803E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16941E-1	-7.97653E-1	-9.13124E0	-9.14209E0	5.19753E-3	9.30786E-2	2.72862E1	-3.26862E1	-3.26012E1	2.67794E1	1.73605E-7	2.51116E-3	2.51116E-3	6.33486E-3	1.99803E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16369E-1	-7.9782E-1	-9.131E0	-9.14235E0	5.22137E-3	9.31978E-2	2.73135E1	-3.26951E1	-3.26554E1	2.68028E1	1.73679E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9917E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16679E-1	-7.9782E-1	-9.13131E0	-9.14214E0	4.95911E-3	9.27925E-2	2.73358E1	-3.27033E1	-3.25688E1	2.67989E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98937E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16941E-1	-7.97749E-1	-9.13122E0	-9.14209E0	4.88758E-3	9.30309E-2	2.72823E1	-3.26573E1	-3.26169E1	2.67509E1	1.73714E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.97731E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.1656E-1	-7.97677E-1	-9.13138E0	-9.14202E0	4.76837E-3	9.30548E-2	2.73113E1	-3.26909E1	-3.2626E1	2.67957E1