[Scan]
initial_time=2016-02-16T02:30:05
final_time=2016-02-16T02:30:24
ip_count=19
run=1030
dataset=6
scan=466
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=6.01745E-10
ql2_vset=
ql2_vmon=-7.97653E-1
ql2_imon=2.73597E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.29206E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=4.85325E-10
mult1=-1.00655E-8
mult2=-2.83838E-9
rf_tmon=-5.26947E-3
rf_agc=3.30151E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.63731E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19754E1
lens5a_imon=1.97873E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05312E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.09334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04675E1
cs_ea1_imon=2.16101E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41621E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.59364E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.02847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.7117E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.84935E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15459E1
os_ea1_imon=1.89413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63936E1
os_ef1bup_imon=3.12686E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23676E0
cs_ionrep_imon=1.26483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.2512E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.86586E-10
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-1.71468E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58125E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98381E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.78716E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=2.01943E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.21657E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74459E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60474E-1
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00722E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64441E0
os_ef2alow_imon=-2.19424E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61985E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10325E1
os_restr2_imon=2.87098E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.31202E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01275E1
cs_anode2_imon=2.2702E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.12183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67577E1
iondef4_imon=1.13351E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.84963E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.59304E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-2.32758E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47587E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.36348E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-7.92292E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.42953E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47052E0
defgridb_imon=6.29149E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33917E1
os_fil1_imon=5.01048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83959E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30833E1
cs_fil1_imon=1.00904E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63147E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67059E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.3296E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.07965E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73187E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.73688E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.55998E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16464E-1	-7.98488E-1	-9.13098E0	-9.14216E0	5.24521E-3	9.35316E-2	2.73175E1	-3.26449E1	-3.26366E1	2.67833E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9911E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16751E-1	-7.98202E-1	-9.13143E0	-9.14207E0	5.29289E-3	9.34362E-2	2.73238E1	-3.26522E1	-3.26179E1	2.6782E1	1.73677E-7	2.51077E-3	2.51077E-3	6.31269E-3	1.98063E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16727E-1	-7.98368E-1	-9.13143E0	-9.14204E0	5.50747E-3	9.33409E-2	2.7279E1	-3.26486E1	-3.26185E1	2.6813E1	1.73761E-7	2.51611E-3	2.51611E-3	6.3074E-3	1.99523E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16679E-1	-7.98273E-1	-9.1311E0	-9.14216E0	4.86374E-3	9.33886E-2	2.73315E1	-3.26603E1	-3.26272E1	2.67937E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16679E-1	-7.98059E-1	-9.13129E0	-9.14218E0	4.88758E-3	9.33409E-2	2.72775E1	-3.26266E1	-3.26645E1	2.67992E1	1.73831E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.1656E-1	-7.98249E-1	-9.13107E0	-9.14204E0	4.86374E-3	9.30786E-2	2.72817E1	-3.2653E1	-3.26146E1	2.67547E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16512E-1	-7.98297E-1	-9.13119E0	-9.14228E0	5.19753E-3	9.32932E-2	2.73225E1	-3.26549E1	-3.26314E1	2.67433E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16369E-1	-7.97939E-1	-9.13157E0	-9.14235E0	5.07832E-3	9.29832E-2	2.73039E1	-3.2632E1	-3.26212E1	2.68112E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16107E-1	-7.98202E-1	-9.13131E0	-9.14218E0	5.60284E-3	9.28164E-2	2.72833E1	-3.26508E1	-3.26266E1	2.67818E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16345E-1	-7.97868E-1	-9.13148E0	-9.14204E0	5.4121E-3	9.29594E-2	2.73216E1	-3.26413E1	-3.25912E1	2.67642E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.98661E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16369E-1	-7.98082E-1	-9.13131E0	-9.14221E0	5.34058E-3	9.34362E-2	2.73198E1	-3.26561E1	-3.26354E1	2.67619E1	1.73605E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.01219E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16202E-1	-7.98082E-1	-9.13141E0	-9.14204E0	5.55515E-3	9.32455E-2	2.72961E1	-3.26302E1	-3.26056E1	2.67529E1	1.7368E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.00499E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16464E-1	-7.97939E-1	-9.13122E0	-9.14202E0	5.72205E-3	9.30786E-2	2.72945E1	-3.26673E1	-3.26396E1	2.67781E1	1.73679E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00192E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16607E-1	-7.98154E-1	-9.13124E0	-9.14211E0	5.03063E-3	9.29832E-2	2.73207E1	-3.26494E1	-3.25972E1	2.67783E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98937E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16751E-1	-7.97963E-1	-9.13129E0	-9.14237E0	5.17368E-3	9.31978E-2	2.73544E1	-3.26284E1	-3.26428E1	2.68036E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16417E-1	-7.98154E-1	-9.13146E0	-9.14192E0	5.03063E-3	9.31025E-2	2.73429E1	-3.26783E1	-3.26146E1	2.6801E1	1.73753E-7	2.50882E-3	2.50882E-3	6.32896E-3	1.9985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16393E-1	-7.98154E-1	-9.13143E0	-9.14207E0	5.38826E-3	9.31978E-2	2.73417E1	-3.26968E1	-3.26307E1	2.67746E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00151E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17037E-1	-7.97987E-1	-9.13141E0	-9.1423E0	5.34058E-3	9.31978E-2	2.72835E1	-3.26026E1	-3.2587E1	2.6789E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16989E-1	-7.98059E-1	-9.13131E0	-9.14187E0	5.26905E-3	9.32693E-2	2.72957E1	-3.26337E1	-3.26596E1	2.67949E1	1.73605E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16822E-1	-7.97653E-1	-9.13124E0	-9.1419E0	5.38826E-3	9.34362E-2	2.73213E1	-3.26723E1	-3.2611E1	2.67577E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.98661E-1