[Scan]
initial_time=2016-02-16T02:30:32
final_time=2016-02-16T02:30:51
ip_count=19
run=1030
dataset=6
scan=467
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=5.92017E-10
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=2.9552E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.26083E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=5.05674E-10
mult1=-1.01257E-8
mult2=-2.90225E-9
rf_tmon=-4.91498E-3
rf_agc=3.29911E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.42178E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.69998E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=1.98632E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12547E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.07172E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0524E1
cs_ea1_imon=2.17197E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.72521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.56057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=3.01874E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.61919E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.89044E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=1.90232E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.10199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=1.25667E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91918E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01629E1
cs_anode1_imon=3.27174E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.91676E-10
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=1.068E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.59698E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.3505E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24369E0
ionrepsh_imon=2.03534E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.16876E-1
os_ea2_imon=-4.94013E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06156E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.21227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62158E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49371E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.87746E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.32668E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.28497E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.7717E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.04711E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.27609E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.47654E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.40226E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33941E1
os_fil1_imon=4.74018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.95973E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66617E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=1.00861E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61903E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66904E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.92058E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69402E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22546E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.00499E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31371E-1
res40_imon=-2.56184E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.16941E-1	-7.97892E-1	-9.13186E0	-9.1419E0	5.14984E-3	9.29832E-2	2.72957E1	-3.26455E1	-3.26042E1	2.67908E1	1.73605E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.99577E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16607E-1	-7.98225E-1	-9.13129E0	-9.14195E0	5.29289E-3	9.31501E-2	2.73002E1	-3.26774E1	-3.26285E1	2.68269E1	1.73677E-7	2.51814E-3	2.51814E-3	6.32328E-3	1.98727E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16917E-1	-7.97939E-1	-9.13148E0	-9.14178E0	5.26905E-3	9.31978E-2	2.73144E1	-3.26532E1	-3.26376E1	2.67836E1	1.73761E-7	2.52066E-3	2.52066E-3	6.31879E-3	1.98625E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16751E-1	-7.97415E-1	-9.13093E0	-9.14209E0	5.53131E-3	9.3174E-2	2.73173E1	-3.26652E1	-3.26419E1	2.68107E1	1.73462E-7	2.51369E-3	2.51369E-3	6.3074E-3	1.98465E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.1687E-1	-7.97558E-1	-9.13148E0	-9.14207E0	5.10216E-3	9.30071E-2	2.72839E1	-3.26838E1	-3.26065E1	2.67943E1	1.73605E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.97818E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16655E-1	-7.97987E-1	-9.13148E0	-9.14214E0	5.36442E-3	9.29594E-2	2.72805E1	-3.26188E1	-3.25785E1	2.6786E1	1.73753E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.97142E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16607E-1	-7.97939E-1	-9.13146E0	-9.14185E0	5.29289E-3	9.32455E-2	2.73081E1	-3.26585E1	-3.25924E1	2.68058E1	1.73718E-7	2.51771E-3	2.51771E-3	6.31014E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16298E-1	-7.97749E-1	-9.1316E0	-9.14223E0	5.05447E-3	9.32217E-2	2.73057E1	-3.26825E1	-3.26176E1	2.67794E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16607E-1	-7.98225E-1	-9.13136E0	-9.14259E0	5.126E-3	9.30071E-2	2.72827E1	-3.26443E1	-3.26136E1	2.68046E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16417E-1	-7.98202E-1	-9.13138E0	-9.1423E0	5.17368E-3	9.27925E-2	2.73279E1	-3.26482E1	-3.26446E1	2.67487E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98075E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16464E-1	-7.98273E-1	-9.13131E0	-9.14202E0	4.93526E-3	9.31501E-2	2.73165E1	-3.26386E1	-3.25761E1	2.6807E1	1.73827E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.9883E-1
1.5E1	0.0E0	1.0E0	6.06E2	4.11E2	-2.09557E0	-8.16631E-1	-7.98082E-1	-9.13143E0	-9.14218E0	4.93526E-3	9.32217E-2	2.73339E1	-3.26705E1	-3.26993E1	2.6798E1	1.7368E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.97731E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16774E-1	-7.98082E-1	-9.13148E0	-9.1423E0	5.57899E-3	9.32455E-2	2.73063E1	-3.26657E1	-3.26296E1	2.68046E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.97559E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16536E-1	-7.98249E-1	-9.13157E0	-9.14252E0	5.19753E-3	9.32932E-2	2.72954E1	-3.26846E1	-3.26482E1	2.6816E1	1.73831E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.98592E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16917E-1	-7.97939E-1	-9.13143E0	-9.14261E0	5.19753E-3	9.30309E-2	2.73207E1	-3.26497E1	-3.26329E1	2.685E1	1.73676E-7	2.51162E-3	2.51162E-3	6.2815E-3	1.99776E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16607E-1	-7.98106E-1	-9.13143E0	-9.14235E0	5.03063E-3	9.31025E-2	2.73135E1	-3.26675E1	-3.26416E1	2.67583E1	1.73605E-7	2.51384E-3	2.51384E-3	6.3131E-3	1.98088E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16965E-1	-7.97653E-1	-9.13148E0	-9.1424E0	5.05447E-3	9.30071E-2	2.72607E1	-3.26363E1	-3.26562E1	2.6803E1	1.73982E-7	2.5188E-3	2.5188E-3	6.28006E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16989E-1	-7.97796E-1	-9.13131E0	-9.14214E0	5.03063E-3	9.34124E-2	2.7362E1	-3.26995E1	-3.26738E1	2.67758E1	1.73642E-7	2.51417E-3	2.51417E-3	6.32087E-3	2.00021E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16393E-1	-7.98225E-1	-9.1316E0	-9.14207E0	5.34058E-3	9.32455E-2	2.73069E1	-3.26518E1	-3.26236E1	2.67445E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16321E-1	-7.98154E-1	-9.13153E0	-9.14221E0	5.126E-3	9.30786E-2	2.73081E1	-3.26783E1	-3.26362E1	2.68088E1	1.7368E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00499E-1