[Scan]
initial_time=2016-02-16T02:31:53
final_time=2016-02-16T02:32:13
ip_count=19
run=1030
dataset=6
scan=470
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0968E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=6.07348E-10
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=2.87211E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=4.91881E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.10514E-10
mult1=-9.63202E-9
mult2=-2.76851E-9
rf_tmon=-5.83424E-3
rf_agc=3.23362E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.81553E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05262E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=3.06271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.19468E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36655E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=3.00757E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04093E1
cs_ea2_imon=1.57319E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=3.02451E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.81947E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=2.88539E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=1.89006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20644E0
cs_ionrep_imon=1.28515E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=3.29516E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.47748E-10
tplens_vset=1.4E-1
tplens_vmon=1.67208E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.5256E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.59626E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=3.30698E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=2.01912E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.76958E-1
os_ea2_imon=-4.39939E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62338E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34354E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=2.87242E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.29867E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.85981E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=2.96557E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56063E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.72889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.48157E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63315E0
defgridb_imon=6.43471E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33911E1
os_fil1_imon=4.72216E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.8456E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66785E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=1.00911E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62954E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67064E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.80044E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52259E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22622E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.05853E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16512E-1	-7.97868E-1	-9.13124E0	-9.14166E0	5.88894E-3	9.32217E-2	2.72821E1	-3.2672E1	-3.25617E1	2.67949E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.98153E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16393E-1	-7.98011E-1	-9.13134E0	-9.14154E0	5.07832E-3	9.33886E-2	2.72873E1	-3.26774E1	-3.25966E1	2.67876E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.96973E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16417E-1	-7.98202E-1	-9.13136E0	-9.14173E0	5.60284E-3	9.32693E-2	2.73184E1	-3.26984E1	-3.25907E1	2.68169E1	1.73605E-7	2.52362E-3	2.52362E-3	6.31858E-3	1.97818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16178E-1	-7.97844E-1	-9.13143E0	-9.14187E0	5.6982E-3	9.32217E-2	2.72751E1	-3.26543E1	-3.26266E1	2.6783E1	1.73605E-7	2.51709E-3	2.51709E-3	6.32858E-3	1.97897E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16345E-1	-7.97868E-1	-9.13143E0	-9.14192E0	5.55515E-3	9.34839E-2	2.72955E1	-3.26621E1	-3.26326E1	2.67499E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16321E-1	-7.97629E-1	-9.13134E0	-9.14209E0	5.24521E-3	9.35793E-2	2.73092E1	-3.26738E1	-3.26142E1	2.67902E1	1.73605E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16488E-1	-7.98059E-1	-9.13136E0	-9.14197E0	5.60284E-3	9.31978E-2	2.73075E1	-3.26206E1	-3.26404E1	2.68118E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.98491E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16536E-1	-7.97892E-1	-9.13162E0	-9.14214E0	5.36442E-3	9.32455E-2	2.72672E1	-3.26579E1	-3.25671E1	2.6768E1	1.73605E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.1656E-1	-7.98059E-1	-9.13143E0	-9.14216E0	5.57899E-3	9.32217E-2	2.73309E1	-3.26669E1	-3.26633E1	2.68046E1	1.73605E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.01022E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16011E-1	-7.97796E-1	-9.13148E0	-9.14192E0	5.88894E-3	9.3317E-2	2.72859E1	-3.26597E1	-3.25954E1	2.6801E1	1.73605E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16035E-1	-7.97677E-1	-9.1316E0	-9.14242E0	5.126E-3	9.29117E-2	2.73305E1	-3.2662E1	-3.26508E1	2.67818E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.9911E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.15964E-1	-7.97868E-1	-9.13172E0	-9.14242E0	5.6982E-3	9.34124E-2	2.73003E1	-3.26224E1	-3.26573E1	2.67932E1	1.73827E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16393E-1	-7.97915E-1	-9.13165E0	-9.14223E0	5.17368E-3	9.32217E-2	2.73225E1	-3.26747E1	-3.26729E1	2.67571E1	1.73605E-7	2.51248E-3	2.51248E-3	6.29624E-3	1.98872E-1
1.7E1	1.0E0	2.0E0	6.87E2	4.7E2	-2.09533E0	-8.16154E-1	-7.98035E-1	-9.13198E0	-9.14199E0	5.126E-3	9.2864E-2	2.73124E1	-3.26738E1	-3.2645E1	2.68064E1	1.73605E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9934E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.16154E-1	-7.9813E-1	-9.13188E0	-9.14204E0	5.17368E-3	9.30309E-2	2.73057E1	-3.26484E1	-3.26325E1	2.67421E1	1.73758E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99577E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.15845E-1	-7.97963E-1	-9.13157E0	-9.14192E0	5.36442E-3	9.27925E-2	2.73051E1	-3.26458E1	-3.2626E1	2.67926E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.98661E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16488E-1	-7.97749E-1	-9.13169E0	-9.14214E0	5.45979E-3	9.28164E-2	2.73087E1	-3.26212E1	-3.26723E1	2.68004E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16083E-1	-7.98225E-1	-9.13129E0	-9.14204E0	5.60284E-3	9.30309E-2	2.73558E1	-3.27304E1	-3.2544E1	2.68262E1	1.7368E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.16059E-1	-7.98082E-1	-9.13169E0	-9.14216E0	5.19753E-3	9.32217E-2	2.73493E1	-3.2672E1	-3.25959E1	2.68028E1	1.73605E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0968E0	-8.16369E-1	-7.97963E-1	-9.13138E0	-9.14197E0	5.36442E-3	9.29356E-2	2.73039E1	-3.26452E1	-3.26188E1	2.68274E1	1.73679E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9883E-1