[Scan]
initial_time=2016-02-16T02:36:48
final_time=2016-02-16T02:37:07
ip_count=19
run=1030
dataset=6
scan=481
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08837E-4
ql1_vset=
ql1_vmon=-8.15916E-1
ql1_imon=6.30057E-10
ql2_vset=
ql2_vmon=-7.9782E-1
ql2_imon=3.16119E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.03492E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.21827E-10
mult1=-1.04048E-8
mult2=-2.73736E-9
rf_tmon=-5.6364E-3
rf_agc=3.26772E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.66712E-10
bslens_vset=-6.2E0
bslens_vmon=-6.58894E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20727E1
lens5a_imon=1.99536E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.07388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04676E2
lens23_imon=1.02068E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04357E1
cs_ea1_imon=2.21374E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4463E0
lens1_imon=2.32735E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03289E1
cs_ea2_imon=1.5855E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8398E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=3.66116E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=2.85404E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15825E1
os_ea1_imon=1.91148E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.11064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.28075E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01569E1
cs_anode1_imon=3.27174E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=7.038E-10
tplens_vset=1.4E-1
tplens_vmon=1.53761E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26179E1
iondef3_imon=1.51648E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.267E1
iondef2_imon=1.59682E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0305E2
lens6_imon=2.98579E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.60417E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21257E0
ionrepsh_imon=2.00279E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34413E1
lens5b_imon=2.2102E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.14884E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.97354E-1
os_ea2_imon=-3.48439E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06191E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.05218E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.87855E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.2738E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7312E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67891E1
iondef4_imon=1.1245E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.85174E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.23308E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15177E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.85894E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.64001E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.94982E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50207E3
multb_neg_imon=7.21882E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.8101E0
defgridb_imon=6.30211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33912E1
os_fil1_imon=5.25675E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66634E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=1.00792E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62492E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67089E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.28154E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60911E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22479E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30052E-3
inlet_lpb_pmon=1.99791E-1
chamber_ion_pmon=1.73699E-7
chamber_cvt_pmon=2.51532E-3
foreline_cvt_pmon=2.51532E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.99246E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16441E-1	-7.97725E-1	-9.13155E0	-9.1419E0	5.38826E-3	9.27687E-2	2.73289E1	-3.26764E1	-3.26364E1	2.68059E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.16226E-1	-7.97772E-1	-9.13167E0	-9.14209E0	5.00679E-3	9.2864E-2	2.73088E1	-3.26765E1	-3.26572E1	2.6796E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.1687E-1	-7.97725E-1	-9.13157E0	-9.14176E0	5.36442E-3	9.29594E-2	2.7275E1	-3.27025E1	-3.25791E1	2.68165E1	1.73681E-7	2.51581E-3	2.51581E-3	6.32978E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.1737E-1	-7.97462E-1	-9.1315E0	-9.14171E0	5.34058E-3	9.30071E-2	2.72951E1	-3.2662E1	-3.26101E1	2.68001E1	1.73605E-7	2.51182E-3	2.51182E-3	6.30212E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16655E-1	-7.97963E-1	-9.13167E0	-9.14207E0	5.45979E-3	9.32217E-2	2.72684E1	-3.26452E1	-3.26236E1	2.67968E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16274E-1	-7.98178E-1	-9.13141E0	-9.14235E0	5.00679E-3	9.27925E-2	2.72696E1	-3.26573E1	-3.26062E1	2.68256E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.98491E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16584E-1	-7.97725E-1	-9.13148E0	-9.14187E0	5.53131E-3	9.30786E-2	2.72787E1	-3.26615E1	-3.26326E1	2.681E1	1.7368E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16584E-1	-7.9813E-1	-9.13146E0	-9.14197E0	5.62668E-3	9.29832E-2	2.73009E1	-3.2632E1	-3.26561E1	2.68016E1	1.73605E-7	2.5068E-3	2.5068E-3	6.32386E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16178E-1	-7.97701E-1	-9.13181E0	-9.14173E0	5.19753E-3	9.30786E-2	2.72868E1	-3.26596E1	-3.26296E1	2.6816E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16226E-1	-7.97749E-1	-9.13146E0	-9.1418E0	5.38826E-3	9.32693E-2	2.72835E1	-3.26524E1	-3.26038E1	2.68354E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.00192E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16369E-1	-7.97915E-1	-9.13134E0	-9.1418E0	5.57899E-3	9.32693E-2	2.72862E1	-3.26962E1	-3.26166E1	2.68262E1	1.73831E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16536E-1	-7.97391E-1	-9.13103E0	-9.14199E0	5.72205E-3	9.30071E-2	2.73398E1	-3.26685E1	-3.26456E1	2.68239E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16298E-1	-7.97915E-1	-9.13141E0	-9.14173E0	5.74589E-3	9.33647E-2	2.72854E1	-3.26915E1	-3.2626E1	2.68413E1	1.73605E-7	2.52093E-3	2.52093E-3	6.3126E-3	1.99119E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.1563E-1	-7.97796E-1	-9.13153E0	-9.14185E0	5.48363E-3	9.31978E-2	2.7261E1	-3.26915E1	-3.26297E1	2.678E1	1.73761E-7	2.51611E-3	2.51611E-3	6.3074E-3	1.97019E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.15964E-1	-7.98178E-1	-9.13153E0	-9.14195E0	5.79357E-3	9.31025E-2	2.73069E1	-3.26909E1	-3.26356E1	2.68166E1	1.73681E-7	2.51025E-3	2.51025E-3	6.29067E-3	1.97818E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16298E-1	-7.97963E-1	-9.13143E0	-9.14183E0	5.65052E-3	9.2864E-2	2.73087E1	-3.26741E1	-3.26242E1	2.67848E1	1.73605E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98075E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.15916E-1	-7.97868E-1	-9.13134E0	-9.14168E0	5.6982E-3	9.31025E-2	2.72261E1	-3.26406E1	-3.2656E1	2.68048E1	1.7376E-7	2.51824E-3	2.51824E-3	6.31871E-3	1.99117E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.15964E-1	-7.98011E-1	-9.13167E0	-9.14187E0	5.36442E-3	9.30309E-2	2.72251E1	-3.26115E1	-3.27155E1	2.68037E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.15821E-1	-7.9782E-1	-9.13153E0	-9.14197E0	5.88894E-3	9.27925E-2	2.73507E1	-3.26028E1	-3.26608E1	2.68156E1	1.73675E-7	2.50838E-3	2.50838E-3	6.31761E-3	1.99498E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.15916E-1	-7.9782E-1	-9.13153E0	-9.14183E0	5.55515E-3	9.30309E-2	2.7312E1	-3.267E1	-3.26179E1	2.67891E1	1.73699E-7	2.51532E-3	2.51532E-3	6.30052E-3	1.99791E-1