[Scan]
initial_time=2016-02-16T02:38:08
final_time=2016-02-16T02:38:28
ip_count=19
run=1030
dataset=6
scan=484
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=6.04546E-10
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=2.89154E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=4.79662E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.02253E-10
mult1=-1.06434E-8
mult2=-2.77251E-9
rf_tmon=-3.59316E-3
rf_agc=3.41567E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=3.77488E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6281E0
bslens_imon=2.41818E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20686E1
lens5a_imon=2.00117E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04876E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53325E1
cs_ef1b_imon=3.06373E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04671E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.16205E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43194E0
lens1_imon=2.85526E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6482E1
os_ef1alow_imon=2.98289E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03623E1
cs_ea2_imon=1.54315E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=3.01508E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.80719E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11167E1
os_restr1_imon=2.89494E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15508E1
os_ea1_imon=1.90384E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63498E1
os_ef1bup_imon=3.08694E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=1.2394E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93699E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02065E1
cs_anode1_imon=3.27818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.75845E-10
tplens_vset=1.4E-1
tplens_vmon=1.5796E0
tplens_imon=-4.90817E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.5336E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.56592E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98768E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.3834E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26006E0
ionrepsh_imon=1.97766E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33627E1
lens5b_imon=2.21494E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74345E1
cs_ef2b_imon=3.13484E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29788E-1
os_ea2_imon=-9.42592E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00836E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71145E1
cs_ef2a_imon=3.19098E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62405E0
os_ef2alow_imon=-2.38719E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30889E-1
os_ef2bup_imon=-5.0781E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.87623E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.30553E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.30586E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.08587E-5
iondef4_vset=2.691E1
iondef4_vmon=2.667E1
iondef4_imon=1.11048E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.93584E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=3.10683E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10082E0
cs_ionaccel_imon=-2.01667E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56436E1
einzel_imon=7.65416E-6
window_vset=0.0E0
window_vmon=2.03874E-1
window_imon=-8.97639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86406E1
mask2_imon=-5.72035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.15998E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.55762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.49055E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59967E0
defgridb_imon=6.65311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33934E1
os_fil1_imon=5.00979E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7793E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66967E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=1.00786E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63301E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23943E-2
os_fil2_imon=-2.15725E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.92948E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65474E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31131E-1
cs_fil2_imon=-2.18844E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34206E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22539E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.93493E-1
res40_imon=-2.48824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16679E-1	-7.97868E-1	-9.13129E0	-9.14207E0	5.50747E-3	9.31501E-2	2.72933E1	-3.26301E1	-3.26113E1	2.67769E1	1.73605E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.00818E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16607E-1	-7.98178E-1	-9.13138E0	-9.14195E0	5.76973E-3	9.31025E-2	2.72714E1	-3.26278E1	-3.26395E1	2.67945E1	1.73679E-7	2.50775E-3	2.50775E-3	6.32356E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16917E-1	-7.98154E-1	-9.13115E0	-9.14204E0	5.53131E-3	9.32455E-2	2.72767E1	-3.26868E1	-3.25779E1	2.67984E1	1.73605E-7	2.51693E-3	2.51693E-3	6.29624E-3	1.98344E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16488E-1	-7.9813E-1	-9.13136E0	-9.14199E0	5.29289E-3	9.32932E-2	2.72973E1	-3.26723E1	-3.26434E1	2.68148E1	1.73605E-7	2.51919E-3	2.51919E-3	6.31269E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16321E-1	-7.9782E-1	-9.13143E0	-9.14216E0	5.26905E-3	9.35078E-2	2.72618E1	-3.26969E1	-3.25864E1	2.67914E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16488E-1	-7.98011E-1	-9.13095E0	-9.14207E0	5.22137E-3	9.3174E-2	2.72865E1	-3.26482E1	-3.25809E1	2.67908E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.1625E-1	-7.98011E-1	-9.13119E0	-9.14197E0	5.05447E-3	9.34601E-2	2.73015E1	-3.26452E1	-3.26573E1	2.68034E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16393E-1	-7.9751E-1	-9.1311E0	-9.14211E0	5.00679E-3	9.34124E-2	2.72847E1	-3.26747E1	-3.26098E1	2.67932E1	1.7368E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98764E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16345E-1	-7.98202E-1	-9.13138E0	-9.14185E0	4.79221E-3	9.3174E-2	2.72799E1	-3.27233E1	-3.25755E1	2.68034E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16464E-1	-7.97749E-1	-9.13157E0	-9.14214E0	4.95911E-3	9.33886E-2	2.72745E1	-3.26615E1	-3.26076E1	2.68082E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16655E-1	-7.97701E-1	-9.13208E0	-9.14199E0	5.38826E-3	9.32217E-2	2.73499E1	-3.26667E1	-3.26331E1	2.67692E1	1.73605E-7	2.51804E-3	2.51804E-3	6.27399E-3	1.98696E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16321E-1	-7.97772E-1	-9.13186E0	-9.14221E0	5.22137E-3	9.3174E-2	2.7299E1	-3.27386E1	-3.26719E1	2.67758E1	1.73753E-7	2.51417E-3	2.51417E-3	6.28056E-3	1.9883E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16631E-1	-7.97653E-1	-9.13169E0	-9.14214E0	5.65052E-3	9.35078E-2	2.72949E1	-3.2632E1	-3.26152E1	2.68052E1	1.73912E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.9852E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16512E-1	-7.97391E-1	-9.13172E0	-9.14233E0	5.14984E-3	9.33647E-2	2.73033E1	-3.26939E1	-3.25972E1	2.68046E1	1.73605E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.98075E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16679E-1	-7.97415E-1	-9.13148E0	-9.14202E0	5.72205E-3	9.32693E-2	2.7349E1	-3.2626E1	-3.26693E1	2.68202E1	1.7368E-7	2.51716E-3	2.51716E-3	6.32112E-3	1.98592E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16369E-1	-7.97796E-1	-9.13143E0	-9.14187E0	5.24521E-3	9.3174E-2	2.73075E1	-3.26301E1	-3.26278E1	2.67956E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16178E-1	-7.97772E-1	-9.13136E0	-9.14199E0	5.53131E-3	9.34362E-2	2.72835E1	-3.26945E1	-3.26176E1	2.67958E1	1.73605E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9968E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16488E-1	-7.97486E-1	-9.13167E0	-9.14176E0	5.8651E-3	9.35316E-2	2.73138E1	-3.27587E1	-3.26857E1	2.68218E1	1.7368E-7	2.50789E-3	2.50789E-3	6.3074E-3	1.98247E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16345E-1	-7.97653E-1	-9.13174E0	-9.14171E0	5.72205E-3	9.34601E-2	2.73141E1	-3.26807E1	-3.26639E1	2.68046E1	1.73677E-7	2.51814E-3	2.51814E-3	6.35514E-3	1.98229E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.16107E-1	-7.97868E-1	-9.13124E0	-9.14185E0	5.6982E-3	9.35793E-2	2.73105E1	-3.26675E1	-3.26176E1	2.667E1	1.73605E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98592E-1